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Zhang Chi, Chen Xin-Liang, Wang Fei, Yan Cong-Bo, Huang Qian, Zhao Ying, Zhang Xiao-Dan, Geng Xin-Hua. Temperature-dependant growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputtering. Acta Physica Sinica,
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Ma Jiao-Min, Liang Yan, Gao Xiao-Yong, Chen Chao, Zhao Meng-Ke, Lu Jing-Xiao. Spectroscopic ellipsometry study of the Ag2O film deposited by radio-frequency reactive magnetron sputtering. Acta Physica Sinica,
2012, 61(5): 056106.
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Chen Chao, Ji Yong, Gao Xiao-Yong, Zhao Meng-Ke, Ma Jiao-Min, Zhang Zeng-Yuan, Lu Jing-Xiao. Study on the deposition of aluminum-doped zinc oxide films using direct-current pulse magnetron reactive sputtering technique. Acta Physica Sinica,
2012, 61(3): 036104.
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Li Lin-Na, Chen Xin-Liang, Wang Fei, Sun Jian, Zhang De-Kun, Geng Xin-Hua, Zhao Ying. Effects of hydrogen flux on aluminum doped zinc thin films by pulsed magnetron sputtering. Acta Physica Sinica,
2011, 60(6): 067304.
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Zhang Kun, Liu Fang-Yang, Lai Yan-Qing, Li Yi, Yan Chang, Zhang Zhi-An, Li Jie, Liu Ye-Xiang. In situ growth and characterization of Cu2ZnSnS4 thin films by reactive magnetron co-sputtering for solar cells. Acta Physica Sinica,
2011, 60(2): 028802.
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Zhang Zeng-Yuan, Gao Xiao-Yong, Feng Hong-Liang, Ma Jiao-Min, Lu Jing-Xiao. Effect of the reactive pressure on the structure and optical properties of silver oxide films deposited by direct-current reactive magnetron sputtering. Acta Physica Sinica,
2011, 60(1): 016110.
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Wang Pei-Jun, Jiang Mei-Fu, Du Ji-Long, Dai Yong-Feng. Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputtering. Acta Physica Sinica,
2010, 59(12): 8920-8926.
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Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering. Acta Physica Sinica,
2008, 57(10): 6587-6592.
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Gu Jian-Feng, Liu Zhi-Wen, Liu Ming, Fu Wei-Jia, Ma Chun-Yu, Zhang Qing-Yu. Two-step growth of ZnO films deposited by reactive radio-frequency magnetron sputtering on Si(001) substrate. Acta Physica Sinica,
2007, 56(4): 2369-2376.
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2007, 56(3): 1568-1573.
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Zhang Ren-Gang, Wang Bao-Yi, Zhang Hui, Ma Chuang-Xin, Wei Long. The properties of the as-sputtered ZnO films under different deposition parameters after sulfidation. Acta Physica Sinica,
2005, 54(5): 2389-2393.
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Shen Zi-Cai, Shao Jian-Da, Wang Ying-Jian, Fan Zheng-Xiu. Modeling analysis of gradient-index coatings prepared by reactive magnetron sputtering. Acta Physica Sinica,
2005, 54(10): 4842-4845.
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2004, 53(8): 2780-2785.
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Jiang Mei-Fu, Ning Zhao-Yuan. XPS study of fluorinated diamond-like carbon films prepared by reactive magnetron sputtering. Acta Physica Sinica,
2004, 53(9): 3220-3224.
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ZHAO KUN, ZHU FENG, WANG LI-FANG, MENG TIE-JUN, ZHANG BAO-CHENG, ZHAO KUI. INVESTIGATIONS OF TiO2 FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING. Acta Physica Sinica,
2001, 50(7): 1390-1395.
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1992, 41(12): 2055-2060.
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1992, 41(2): 302-305.
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WANG YIN-YUE, ZHANG FANG-QING, CHEN GUANG-HUA. A STUDY ON THE METASTABLE THERMAL DEFECTS IN REACTIVELY SPUTTERED a-SiGe:H FILMS. Acta Physica Sinica,
1990, 39(10): 1661-1664.
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1989, 38(4): 573-578.
doi: 10.7498/aps.38.573
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