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W-doped ZnO (WZO) thin films for thin film solar cells have been deposited by pulsed direct-current reactive magnetron sputtering. The microstructures, surface morphologies, optical and electrical properties of WZO thin films are investigated at different substrate temperatures. The experimental results indicate that a proper substrate temperature is the key factor for fabricating high-quality WZO thin films. The surface roughness of WZO thin films increases firstly from 15.65 nm to 37.60 nm, and then decreases from 37.60 nm to 11.07 nm with the increase of substrate temperature. Higher Hall mobility deposited at the higher temperatures is attributed to the compact structure and good crystallization quality. The WZO thin film prepared at the temperature of 325 ℃ presents excellent optical and electrical properties with an average transmittance of 85.7% in the wavelength range from 400 nm to 1500 nm, a low resistivity of 9.25× 10-3 Ω·cm, a sheet resistance of 56.24 Ω /sq and a high Hall mobility of 11.8 cm2·V-1·s-1.
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Keywords:
- reactive magnetron sputtering /
- ZnO thin films /
- W-doping /
- substrate temperature
[1] Kim H, Horwitz J S, Kim W H, Mäkinen A J, Kafafi Z H, Chrisey D B 2002 Thin Solid Films 420-421 539
[2] Ellmer K 2001 J. Phys. D: Appl. Phys. 34 3097
[3] Meier J, Spitznagel J, Kroll U, Bucher C, Faÿ S, Moriarty T, Shah A 2004 Thin Solid Films 451452 518
[4] Gordon R G 2000 MRS Bull. 25 52
[5] Meng Y, Yang X L, Chen H X, Shen J, Jiang Y M, Zhang Z J, Hua Z Y 2001 Thin Solid Films 394 218
[6] Calnan S, Tiwari A N 2010 Thin Solid Films 518 1839
[7] Parthiban S, Elangovan E, Ramamurthi K, Martins R , Fortunato E 2010 Sol. Energy Mater. Sol. Cells 94 406
[8] Yamada N, Tatejima T, Ishizaki H, Nakada T 2006 Jpn. J. Appl. Phys. 45 1179
[9] Gupta R K, Ghosh K, Mishra S R, Kahol P K 2008 Appl. Surf. Sci. 254 1661
[10] Newhouse P F, Park C H, Keszler D A, Tate J, Nyholm P S 2005 Appl. Phys. Lett. 87 112108
[11] Ren S R 2010 M. S. Dissertation (Tianjin: Hebei University of Technology) (in Chinese) [任世荣 2010 硕士学位论文 (天津:河北工业大学)]
[12] Xiu X W, Cao Y P, Pang Z Y, Han S H 2009 J. Mater. Sci. Technol. 25 785
[13] Lin Y C, Wang B L, Yen W T, Ha C T, Peng C 2010 Thin Solid Films 518 4928
[14] Lin Y C, Wang B L, Yen W T, Shen C H 2011 Thin Solid Films 519 5571
[15] Kuo C C, Liu C C, He S C, Chang J T, He J L 2011 Vacuum 85 961
[16] Ngom B D, Mpahane T, Manyala N, Nemraoui O, Buttner U, Kana J B, Fasasi A Y, Maaza M, Beye A C 2009 Appl. Surf. Sci. 255 4153
[17] Ngom B D, Sakho O, Manyala N, Kana J B, Mlungisi N, Guerbous L, Fasasi A Y, Maaza M, Beye A C 2009 Appl. Surf. Sci. 255 7314
[18] Ngom B D, Chaker M, Manyala N, Lo B, Maaza M, Beye A C 2011 Appl. Surf. Sci. 257 6226
[19] Zhang H F, Liu H F, Lei C X, Yuan C K, Zhou A P 2010 Vacuum 85 184
[20] Zhang H F, Yang S G, Liu H F, Yuan C K 2011 Journal of Semiconductors 32 31
[21] Wu C G 2010 M. S. Dissertation (Shanghai: Fudan University) (in Chinese) [吴臣国 2010 硕士学位论文 (上海:复旦大学)]
[22] Chen X L, Geng X H, Xue J M, Zhang D K, Hou G F, Zhao Y 2006 J. Cryst. Growth 296 43
[23] Meier J, Spitznagel J, Faÿ S, Bucher C, Graf U, Kroll U, Dubail S, Shah A 2002 Proceedings of the 29th IEEE Photovoltaic Specialists Conference New Orleans, USA, 2002 p1118
[24] Li L N 2010 Ph. D. Dissertation (Tianjin: Nakai University) (in Chinese) [李林娜 2010 博士学位论文(天津:南开大学)]
[25] Kim K K, Song J H, Jung H J, Choi W K, Park S J, Song J H 2000 J. Appl. Phys. 87 3573
[26] Wang J Z, Li M C, Sallet V, Rego A, Martins R, Fortunato E 2011 Infrared and Laser Engineering 40 1490 (in Chinese) [王金忠, 李美成, Sallet V, Rego A, Martins R, Fortunato E 2011 红外与激光工程 40 1490]
[27] Kluth O, Schope G, Hupkes J, Agashe C, Müller J, Rech B 2003 Thin Solid Films 442 80
[28] Meng Y 2001 Ph. D. Dissertation (Shanghai: Fudan University) (in Chinese) [孟杨 2001 博士学位论文 (上海:复旦大学)]
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[1] Kim H, Horwitz J S, Kim W H, Mäkinen A J, Kafafi Z H, Chrisey D B 2002 Thin Solid Films 420-421 539
[2] Ellmer K 2001 J. Phys. D: Appl. Phys. 34 3097
[3] Meier J, Spitznagel J, Kroll U, Bucher C, Faÿ S, Moriarty T, Shah A 2004 Thin Solid Films 451452 518
[4] Gordon R G 2000 MRS Bull. 25 52
[5] Meng Y, Yang X L, Chen H X, Shen J, Jiang Y M, Zhang Z J, Hua Z Y 2001 Thin Solid Films 394 218
[6] Calnan S, Tiwari A N 2010 Thin Solid Films 518 1839
[7] Parthiban S, Elangovan E, Ramamurthi K, Martins R , Fortunato E 2010 Sol. Energy Mater. Sol. Cells 94 406
[8] Yamada N, Tatejima T, Ishizaki H, Nakada T 2006 Jpn. J. Appl. Phys. 45 1179
[9] Gupta R K, Ghosh K, Mishra S R, Kahol P K 2008 Appl. Surf. Sci. 254 1661
[10] Newhouse P F, Park C H, Keszler D A, Tate J, Nyholm P S 2005 Appl. Phys. Lett. 87 112108
[11] Ren S R 2010 M. S. Dissertation (Tianjin: Hebei University of Technology) (in Chinese) [任世荣 2010 硕士学位论文 (天津:河北工业大学)]
[12] Xiu X W, Cao Y P, Pang Z Y, Han S H 2009 J. Mater. Sci. Technol. 25 785
[13] Lin Y C, Wang B L, Yen W T, Ha C T, Peng C 2010 Thin Solid Films 518 4928
[14] Lin Y C, Wang B L, Yen W T, Shen C H 2011 Thin Solid Films 519 5571
[15] Kuo C C, Liu C C, He S C, Chang J T, He J L 2011 Vacuum 85 961
[16] Ngom B D, Mpahane T, Manyala N, Nemraoui O, Buttner U, Kana J B, Fasasi A Y, Maaza M, Beye A C 2009 Appl. Surf. Sci. 255 4153
[17] Ngom B D, Sakho O, Manyala N, Kana J B, Mlungisi N, Guerbous L, Fasasi A Y, Maaza M, Beye A C 2009 Appl. Surf. Sci. 255 7314
[18] Ngom B D, Chaker M, Manyala N, Lo B, Maaza M, Beye A C 2011 Appl. Surf. Sci. 257 6226
[19] Zhang H F, Liu H F, Lei C X, Yuan C K, Zhou A P 2010 Vacuum 85 184
[20] Zhang H F, Yang S G, Liu H F, Yuan C K 2011 Journal of Semiconductors 32 31
[21] Wu C G 2010 M. S. Dissertation (Shanghai: Fudan University) (in Chinese) [吴臣国 2010 硕士学位论文 (上海:复旦大学)]
[22] Chen X L, Geng X H, Xue J M, Zhang D K, Hou G F, Zhao Y 2006 J. Cryst. Growth 296 43
[23] Meier J, Spitznagel J, Faÿ S, Bucher C, Graf U, Kroll U, Dubail S, Shah A 2002 Proceedings of the 29th IEEE Photovoltaic Specialists Conference New Orleans, USA, 2002 p1118
[24] Li L N 2010 Ph. D. Dissertation (Tianjin: Nakai University) (in Chinese) [李林娜 2010 博士学位论文(天津:南开大学)]
[25] Kim K K, Song J H, Jung H J, Choi W K, Park S J, Song J H 2000 J. Appl. Phys. 87 3573
[26] Wang J Z, Li M C, Sallet V, Rego A, Martins R, Fortunato E 2011 Infrared and Laser Engineering 40 1490 (in Chinese) [王金忠, 李美成, Sallet V, Rego A, Martins R, Fortunato E 2011 红外与激光工程 40 1490]
[27] Kluth O, Schope G, Hupkes J, Agashe C, Müller J, Rech B 2003 Thin Solid Films 442 80
[28] Meng Y 2001 Ph. D. Dissertation (Shanghai: Fudan University) (in Chinese) [孟杨 2001 博士学位论文 (上海:复旦大学)]
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