[1] |
Wang Chen, Xu Yi-Hong, Li Cheng, Lin Hai-Jun. Fabrication and characteristics of high performance SOI-based Ge PIN waveguide photodetector. Acta Physica Sinica,
2017, 66(19): 198502.
doi: 10.7498/aps.66.198502
|
[2] |
Zhao Qi-Chen, Hao Rui-Ting, Liu Si-Jia, Liu Xin-Xing, Chang Fa-Ran, Yang Min, Lu Yi-Lei, Wang Shu-Rong. Fabrication of Cu2ZnSnS4 thin films by sputtering quaternary compound target and the research of in-situ annealing. Acta Physica Sinica,
2017, 66(22): 226801.
doi: 10.7498/aps.66.226801
|
[3] |
Ma Hai-Lin, Su Qing. Effect of oxygen pressure on structure and optical band gap of gallium oxide thin films prepared by sputtering. Acta Physica Sinica,
2014, 63(11): 116701.
doi: 10.7498/aps.63.116701
|
[4] |
Yuan Wen-Rui, Li Yi, Wang Xiao-Hua, Zheng Hong-Zhu, Chen Shao-Juan, Chen Jian-Kun, Sun Yao, Tang Jia-Yin, Liu Fei, Hao Ru-Long, Fang Bao-Ying, Xiao Han. Fabrication and optical-electrical properties of VO2/AZO composite films. Acta Physica Sinica,
2014, 63(21): 218101.
doi: 10.7498/aps.63.218101
|
[5] |
He Qiong, Xu Xiang-Dong, Wen Yue-Jiang, Jiang Ya-Dong, Ao Tian-Hong, Fan Tai-Jun, Huang Long, Ma Chun-Qian, Sun Zi-Qiang. Growth mechanism and optoelectronic properties of vanadium oxide films prepared by Sol-Gel. Acta Physica Sinica,
2013, 62(5): 056802.
doi: 10.7498/aps.62.056802
|
[6] |
Zhang Chi, Chen Xin-Liang, Wang Fei, Yan Cong-Bo, Huang Qian, Zhao Ying, Zhang Xiao-Dan, Geng Xin-Hua. Temperature-dependant growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputtering. Acta Physica Sinica,
2012, 61(23): 238101.
doi: 10.7498/aps.61.238101
|
[7] |
Yuan Wen-Jia, Zhang Yue-Guang, Shen Wei-Dong, Ma Qun, Liu Xu. Characteristics of Nb2O5 thin films deposited by ion beam sputtering. Acta Physica Sinica,
2011, 60(4): 047803.
doi: 10.7498/aps.60.047803
|
[8] |
Wang Pei-Jun, Jiang Mei-Fu, Du Ji-Long, Dai Yong-Feng. Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputtering. Acta Physica Sinica,
2010, 59(12): 8920-8926.
doi: 10.7498/aps.59.8920
|
[9] |
Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputtering. Acta Physica Sinica,
2009, 58(6): 4109-4116.
doi: 10.7498/aps.58.4109
|
[10] |
Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering. Acta Physica Sinica,
2008, 57(10): 6587-6592.
doi: 10.7498/aps.57.6587
|
[11] |
Pan Xiao-Jun, Zhang Zhen-Xing, Wang Tao, Li Hui, Xie Er-Qing. Room temperature visible photoluminescence from nanocrystalline GaN∶Er film prepared by sputtering. Acta Physica Sinica,
2008, 57(6): 3786-3790.
doi: 10.7498/aps.57.3786
|
[12] |
Wang Nan, Kong Chun-Yang, Zhu Ren-Jiang, Qin Guo-Ping, Dai Te-Li, Nan Mao, Ruan Hai-Bo. Preparation and characteristics research of p-type ZnO films. Acta Physica Sinica,
2007, 56(10): 5974-5978.
doi: 10.7498/aps.56.5974
|
[13] |
Lu Xiao, Wu Chuan-Gui, Zhang Wan-Li, Li Yan-Rong. Dielectric breakdown of BST thin films prepared by RF sputtering. Acta Physica Sinica,
2006, 55(5): 2513-2517.
doi: 10.7498/aps.55.2513
|
[14] |
Yang Wu-Bao, Fan Song-Hua, Zhang Gu-Ling, Ma Pei-Ning, Zhang Shou-Zhong, Du Jian. Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering. Acta Physica Sinica,
2005, 54(10): 4944-4948.
doi: 10.7498/aps.54.4944
|
[15] |
Wang Yu-Heng, Ma Jin, Ji Feng, Yu Xu-Hu, Zhang Xi-Jian, Ma Hong-Lei. Structural and photoluminescence characters of SnO22:Sb thin films pr epared by rf magnetron sputtering. Acta Physica Sinica,
2005, 54(4): 1731-1735.
doi: 10.7498/aps.54.1731
|
[16] |
Lin Hong-Feng, Xie Er-Qing, Ma Zi-Wei, Zhang Jun, Peng Ai-Hua, He De-Yan. Study of 3C-SiC and 4H-SiC films deposited using RF sputtering method. Acta Physica Sinica,
2004, 53(8): 2780-2785.
doi: 10.7498/aps.53.2780
|
[17] |
WU XIAN-CHENG, WANG YIN-YUE. PROPERTIES OF a-SiCxNy∶H FILMS PRODUCED BY REACTIVE-SPUTTERING. Acta Physica Sinica,
1999, 48(1): 134-139.
doi: 10.7498/aps.48.134
|
[18] |
CUI JING-ZHONG, DA DAO-AN, JIANG WAN-SHUN. STUDY OF STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF VO2 THERMOCHROMIC THIN FILMS. Acta Physica Sinica,
1998, 47(3): 454-460.
doi: 10.7498/aps.47.454
|
[19] |
WANG XIAO-PING, ZHAO TE-XIU, LIU HONG-TU, SHI YI-SHENG, WENG HUI-MIN, GUO XUE-ZHE. ELECTRICAL PROPERTIES OF WSix/Si(111)FILMS BY MULTILAYER SPUTTERING. Acta Physica Sinica,
1994, 43(5): 823-828.
doi: 10.7498/aps.43.823
|
[20] |
WANG YIN-YUE, ZHANG FANG-QING, CHEN GUANG-HUA. A STUDY ON THE METASTABLE THERMAL DEFECTS IN REACTIVELY SPUTTERED a-SiGe:H FILMS. Acta Physica Sinica,
1990, 39(10): 1661-1664.
doi: 10.7498/aps.39.1661
|