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In order to prepare high-quantum-efficiency semiconductor Cs-Te photocathode which can produce a high-quality electron source, based on the INFN-LASA Cs-Te photocathode preparation method, the Cs-Te photocathode preparation method with Te intermittent, Cs continuous deposition is developed. The Cs-Te photocathode with quantum efficiency greater than 5% under 265 nm UV irradiation is successfully prepared in the photocathode preparation device of SINAP and SARI, and the fabrication success rate reaches 100%. As long as the preparation chamber vacuum degree is better than 10–8 Pa, the Cs-Te photocathode with high quantum efficiency can be prepared by this preparation method, which will not be different due to the changes of preparation equipment and operators.
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Keywords:
- photocathode /
- Te intermittent /
- Cs continuous deposition /
- quantum efficiency
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图 1 SINAP光阴极制备装置
Figure 1. SINAP photocathode preparation device.
图 2 SARI光阴极制备装置
Figure 2. SARI photocathode preparation device.
图 3 Ta蒸发舟
Figure 3. Ta evaporation boat.
图 4 Te, Cs顺序沉积制备Cs-Te光阴极的步骤及Mo基底上的Cs-Te光阴极
Figure 4. The Cs-Te photocathode preparation steps with Te, Cs sequential deposition and the Cs-Te photocathode on Mo substrate.
图 5 Te和Cs源的沉积厚度、反射率、量子效率和真空度随时间的变化
Figure 5. The variation of deposition thickness, reflectivity, quantum efficiency and vacuum degree of Te and Cs evaporation sources with time.
图 6 Cs-Te光阴极的热退火研究
Figure 6. Thermal annealing study of Cs-Te photocathode.
图 7 基底和非基底上的Cs-Te光阴极, 几次制备过程中电流(光电流+暗电流)变化
Figure 7. The Cs-Te photocathode on substrate and non-substrate, the current (photocurrent + dark current) variation during several preparation processes.
图 8 开缝的SS304管
Figure 8. The SS304 pipe with slit.
图 9 Te断续、Cs持续沉积制备Cs-Te光阴极过程
Figure 9. The Cs-Te photocathode preparation process with Te intermittent, Cs continuous deposition.
图 10 Te和Cs源的沉积厚度、反射率、量子效率和真空度随时间的变化
Figure 10. The variation of deposition thickness, reflectivity, quantum efficiency and vacuum degree of Te and Cs evaporation sources with time.
图 11 Te, Cs顺序沉积与Te断续、Cs持续沉积制备Cs-Te光阴极对比
Figure 11. The comparison of Cs-Te photocathode preparation between with Te, Cs sequential deposition and Te intermittent, Cs continuous deposition.
图 12 热退火Cs-Te光阴极时, 量子效率与温度的关系
Figure 12. The relationship between quantum efficiency and temperature during thermal annealing of Cs-Te photocathode.
图 13 制备过程中光电流收集电路及制备好的Cs-Te光阴极
Figure 13. Photocurrent collection circuit during the photocathode preparation process and Cs-Te photocathode.
图 14 Cs-Te光阴极制备过程中, 量子效率变化
Figure 14. The quantum efficiency changes during the Cs-Te photocathode preparation process.
图 15 光阴极制备过程中, 光电流收集电路及制备好的Cs-Te光阴极
Figure 15. Photocurrent collection circuit during the photocathode preparation process and Cs-Te photocathode.
图 16 基底在室温和100 ℃时, 光阴极制备过程中Cs-Te光阴极量子效率变化
Figure 16. The change of the quantum efficiency of Cs-Te photocathode during the preparation process at substrate room temperature and 100 ℃.
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[1] Michelato P 1997 Nucl. Instrum. Meth. A 393 455
Google Scholar
[2] Musumeci P, Navarro J G, Rosenzweig J B, Cultrera L, Bazarov I, Maxson J, Karkare S, Padmore H 2018 Nucl. Instrum. Meth. A 907 209
Google Scholar
[3] 向蓉, 全胜文, 林林, 丁原涛, 鲁向阳, 焦飞, 王桂梅, 赵夔 2004 高能物理与核物理 28 771
Google Scholar
Xiang R, Quan S W, Lin L, Ding Y T, Lu X Y, Jiao F, Wang G M, Zhao K 2004 High Energy Phys. Nuc. 28 771
Google Scholar
[4] Xiang R, Arnold A, Buettig H, Janssen D, Justus M, Lehnert U, Michel P, Murcek P, Schamlott A, Schneider Ch, Schurig R, Staufenbiel F, Teichert J 2010 Phys. Rev. Spec. Top-Ac. 13 043501
Google Scholar
[5] Bossert J, Ganter R, Schaer M, et al. 2014 Proceedings of the 36th International Free Electron Laser Conference Basel, Switzerland, August 25–29, 2014 THP046
[6] Aryshev A, Shevelev M, Honda Y, Terunuma N, Urakawa J. 2017 Appl. Phys. Lett. 111 033508
Google Scholar
[7] Panuganti H, Piot P 2017 Appl. Phys. Lett. 110 093505
Google Scholar
[8] Pierce C M, Bae J K, Galdi A, Cultrera L, Bazarov I, Maxson J 2021 Appl. Phys. Lett. 118 124101
Google Scholar
[9] Kong S H, Kinross-Wright J, Nguyen D C, Sheffield R L, Weber M E 1995 Nucl. Instrum. Meth. A 358 284
Google Scholar
[10] Schreiber S, Lederer S, Michelato P, et al. 2018 Proceedings of the 38 th International Free-Electron Laser Conference New Mexico, USA, August 20–25 2018 WEP003
[11] Huang P, Qian H, Chen Y, et al. 2019 Proceedings of the 39th International Free Electron Laser Conference Hamburg, Germany, August 26–30 2019 WEP062
[12] Loisch G, Chen Y, Koschitzki C, et al. 2022 Appl. Phys. Lett. 120 104102
Google Scholar
[13] Filippetto D, Qian H, Sannibale F 2015 Appl. Phys. Lett. 107 042104
Google Scholar
[14] Wisniewski E E, Velazquez D, Yusof Z, Spentzouris L, Terry J, Sarkar T J, Harkay K 2013 Nucl. Instrum. Meth. A 711 60
Google Scholar
[15] Wisniewski E, Antipov S, Conde M, et al. 2015 Proceedings of the 6th International Particle Accelerator Conference VA, USA, May 3–8 2015 WEPTY013
[16] Terunuma N, Murata A, Fukuda M, et al. 2010 Nucl. Instrum. Meth. A 613 1
Google Scholar
[17] Tamba T, Miyamatsu J, Sakaue K, et al. 2019 Proceedings of the 10th International Particle Accelerator Conference Melbourne, Australia, May 19–24 2019 TUPTS111
[18] Kong S H, Kinross-Wright J, Nguyen D C, Sheffield R L 1995 J. Appl. Phys. 77 6031
Google Scholar
[19] Michelato P, Di Bona A, Pagani C, et al. 1996 Proceedings of the 5th European Particle Accelerator Conference Barcelona, Spain, June 10–14 1996 p1475
[20] Dai J, Quan S W, Chang C, Liu K X, Zhao K 2012 Chin. Phys. C 36 475
Google Scholar
[21] Monaco L, Michelato P, Sertore D, et al. 2019 Proceedings of the 39th International Free Electron Laser Conference Hamburg, Germany, August 26–30 2019 WEA04
[22] Chevallay E, Divall Csatari M, Doebert S, et al. 2012 Proceedings of the 3rd International Particle Accelerator Conference LA, USA, May 20–25 2012 TUPPD066
[23] Gaowei M, Sinsheimer J, Strom D, et al. 2019 Phys. Rev. Accel. Beams. 22 073401
Google Scholar
[24] 牛军, 张益军, 常本康, 等 2011 60 044209
Google Scholar
Niu J, Zhang Y J, Chang B K, et al. 2011 Acta Phys. Sin. 60 044209
Google Scholar
[25] 郝广辉, 韩攀阳, 李兴辉, 等 2020 69 108501
Google Scholar
Hao G H, Han P Y, Li X H, et al. 2020 Acta Phys. Sin. 69 108501
Google Scholar
[26] 王国建, 刘燕文, 李芬, 等 2021 70 218503
Google Scholar
Wang J G, Liu Y W, Li F, et al. 2021 Acta Phys. Sin. 70 218503
Google Scholar
[27] Michelato P, Pagani C, Sertore D, di Bona A, Valeri S 1997 Nucl. Instrum. Meth. A 393 464
Google Scholar
[28] Sertore D, Michelato P, Monaco L, et al. 2014 J. Vac. Sci. Technol. A 32 031602
Google Scholar
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