Lu Zi-Qing, Han Qin, Ye Han, Wang Shuai, Xiao Feng, Xiao Fan. Low dark current and high bandwidth evanescent wave coupled PIN photodetector array for 400 Gbit/s receiving systemJ. Acta Physica Sinica, 2021, 70(20): 208501. DOI: 10.7498/aps.70.20210781