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中国物理学会期刊
Zhang Ni1\2, Liu Ding1\2, Feng Xue-Liang. Effects of process parameters on melt-crystal interface in Czochralski silicon crystal growthJ. Acta Physica Sinica, 2018, 67(21): 218701. DOI: 10.7498/aps.67.20180305
Citation: Zhang Ni1\2, Liu Ding1\2, Feng Xue-Liang. Effects of process parameters on melt-crystal interface in Czochralski silicon crystal growthJ. Acta Physica Sinica, 2018, 67(21): 218701. DOI: 10.7498/aps.67.20180305

    Effects of process parameters on melt-crystal interface in Czochralski silicon crystal growth

    CSTR: 32037.14.aps.67.20180305
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