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Based on Monte-Carlo method, the characteristics and physical mechanisms for deposited-energy spectra in sensitive volume (SV), single event upset cross sections, and on-orbit error rates in 65-32 nm silicon-on-insulator static random access memory (SOI SRAM) devices induced by space energetic ions are investigated. Space ions on geostationary earth orbit exhibit a flux peak at an energy point of about 200 MeV/n. In consequence, the single event response of nanometric SOI SRAMs under 200 MeV/n heavy ions is studied in detail. The results show that 200 MeV/n space ions exhibit the large straggling of deposited-energy in the device SV with thickness ranging from 60 nm to 40 nm, which causes the single event upsets to occur in the sub-LETmth region. The device SV can only partially collect the electron-hole pairs in the single ion track with a wide distribution of secondary electrons. As a result, the maximum and average deposited-energy in the SV decrease by 25% and 33.3%, respectively. Further, the single event upset probability decreases and the on-orbit error rate decreases by about 80%. With the downscaling of feature size, the per-bit saturated cross sections and on-orbit error rates of nanometric SOI SRAM devices decrease dramatically. The phenomenon of constant-increasing single event upset cross section with higher ion linear energy transfer (LET) is not observed, owing to the fact that (a) the density of electron-hole pairs in the track of 200 MeV/n space ion is relatively low and (b) the SOI device has thin sensitive volume, which results in the fact that the secondary-electron effect cannot upset nearby sensitive cells. Besides, it is found that the direct-ionization process of trapped protons leads to an increase of on-orbit error rate of 65 nm SOI SRAM by one to two orders of magnitude.
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Keywords:
- silicon-on-insulator /
- single event upset /
- secondary electron /
- deposited energy straggling
[1] Dodd P E, Shaneyfelt M R, Schwank J R, Felix J A 2010 IEEE Trans. Nucl. Sci. 57 1747
[2] Weller R A, Mendenhall M H, Reed R A, Schrimpf R D, Warren K M, Sierawski B D, Massengill L W 2010 IEEE Trans. Nucl. Sci. 57 1726
[3] Reed R A, Weller R A, Schrimpf R D, Mendenhall M H, Warren K M, Massengill L W 2006 IEEE Trans. Nucl. Sci. 53 3356
[4] Warren K M, Weller R A, Mendenhall M H, Reed R A, Ball D R, Howe C L, Olson B D, Alles M L, Massengill L W, Schrimpf R D, Haddad N F, Doyle S E, McMorrow D, Melinger J S, Lotshaw W T 2005 IEEE Trans. Nucl. Sci. 52 2125
[5] Dodd P E, Schwank J R, Shaneyfelt M R, Ferlet-Cavrois V, Paillet P, Baggio J, Hash G L, Felix J A, Hirose K, Saito H 2007 IEEE Trans. Nucl. Sci. 54 889
[6] Dodd P E, Schwank J R, Shaneyfelt M R, Felix J A, Paillet P, Ferlet-Cavrois V, Baggio J, Reed R A, Warren K M, Weller R A, Schrimpf R D, Hash G L, Dalton S M, Hirose K, Saito H 2007 IEEE Trans. Nucl. Sci. 54 2303
[7] Ecoffet R, Duzellier S, Falguere D, Guibert L, Inguimbert C 1997 IEEE Trans. Nucl. Sci. 44 2230
[8] Koga R, Crain S H, Crain W R, Crawford K B, Hansel S J 1998 IEEE Trans. Nucl. Sci. 45 2475
[9] Liu M S, Liu H Y, Brewster N, Nelson D, Golke K W, Kirchner G, Hughes H L, Campbell A, Ziegler J F 2006 IEEE Trans. Nucl. Sci. 53 3487
[10] Xapsos M A 1992 IEEE Trans. Nucl. Sci. 39 1613
[11] Dodd P E, Musseau O, Shaneyfelt M R, Sexton F W, D'hose C, Hash G L, Martinez M, Loemker R A, Leray J L, Winokur P S 1998 IEEE Trans. Nucl. Sci. 45 2483
[12] Reed R A, Weller R A, Mendenhall M H, Lauenstein J M, Warren K M, Pellish J A, Schrimpf R D, Sierawski B D, Massengill L W, Dodd P E, Shaneyfelt M R, Felix J A, Schwank J R, Haddad N F, Lawrence R K, Bowman J H, Conde R 2007 IEEE Trans. Nucl. Sci. 54 2312
[13] Raine M, Gaillardin M, Sauvestre J E, Flament O, Bournel A, Aubry-Fortuna V 2010 IEEE Trans. Nucl. Sci. 57 1892
[14] Zhang Z G, Liu J, Hou M D, Sun Y M, Zhao F Z Liu G, Han Z S, Geng C, Liu J D, Xi K, Duan J L, Yao H J, Mo D, Luo J, Gu S, Liu T Q 2013 Chin. Phys. B 22 096103
[15] Raine M, Gaillardin M, Paillet P, Duhamel O, Girard S, Bournel A 2011 IEEE Trans. Nucl. Sci. 58 2664
[16] Zhang Z G, Lei Z F, En Y F, Liu J 2016 Radiation Effects on Components & Systems Conference (RADECS) Bremen, Germany, September 19-23, 2016 pp1-4
[17] Schwank J R, Ferlet-Cavrois V, Shaneyfelt M R, Paillet P, Dodd P E 2003 IEEE Trans. Nucl. Sci. 50 522
[18] Heidel D F, Marshall P W, LaBel K A, Schwank J R, Rodbell K P, Hakey M C, Berg M D, Dodd P E, Friendlich M R, Phan A D, Seidleck C M, Shaneyfelt M R, Xapsos M A 2008 IEEE Trans. Nucl. Sci. 55 3394
[19] Fenouillet-Beranger C, Perreau P, Pham-Nguyen L, Denorme S, Andrieu F, Tosti L, Brevard L, Weber O, Barnola S, Salvetat T, Garros X, Casse M, Cassé M, Leroux C, Noel J P, Thomas O, Le-Gratiet B, Baron F, Gatefait M, Campidelli Y, Abbate F, Perrot C, de-Buttet C, Beneyton R, Pinzelli L, Leverd F, Gouraud P, Gros-Jean M, Bajolet A, Mezzomo C, Leyris C, Haendler S, Noblet D, Pantel R, Margain A, Borowiak C, Josse E, Planes N, Delprat D, Boedt F, Bourdelle K, Nguyen B Y, Boeuf F, Faynot O, Skotnicki T 2009 IEEE International Electron Devices Meeting (IEDM) Baltimore, USA, December 7-9, 2009 p1
[20] Adams J H, Barghouty A F, Mendenhall M H, Reed R A, Sierawski B D, Warren K M, Watts J W, Weller R A 2012 IEEE Trans. Nucl. Sci. 59 3141
[21] Tylka A J, Adams J H, Boberg P R, Brownstein B, Dietrich W F, Flueckiger E O, Petersen E L, Shea M A, Smart D F, Smith E C 1997 IEEE Trans. Nucl. Sci. 44 2150
[22] Ziegler J F, Biersack J P, Littmark U 1985 The Stopping and Range of Ions in Solids (New York: Pergamon Press)
[23] Pavlovic M, Strasik I 2007 Nucl. Instrum. Meth. Phys. Res. B 257 601
[24] Raine M, Hubert G, Gaillardin M, Artola L, Paillet P, Girard S, Sauvestre J, Bournel A 2011 IEEE Trans. Nucl. Sci. 58 840
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[1] Dodd P E, Shaneyfelt M R, Schwank J R, Felix J A 2010 IEEE Trans. Nucl. Sci. 57 1747
[2] Weller R A, Mendenhall M H, Reed R A, Schrimpf R D, Warren K M, Sierawski B D, Massengill L W 2010 IEEE Trans. Nucl. Sci. 57 1726
[3] Reed R A, Weller R A, Schrimpf R D, Mendenhall M H, Warren K M, Massengill L W 2006 IEEE Trans. Nucl. Sci. 53 3356
[4] Warren K M, Weller R A, Mendenhall M H, Reed R A, Ball D R, Howe C L, Olson B D, Alles M L, Massengill L W, Schrimpf R D, Haddad N F, Doyle S E, McMorrow D, Melinger J S, Lotshaw W T 2005 IEEE Trans. Nucl. Sci. 52 2125
[5] Dodd P E, Schwank J R, Shaneyfelt M R, Ferlet-Cavrois V, Paillet P, Baggio J, Hash G L, Felix J A, Hirose K, Saito H 2007 IEEE Trans. Nucl. Sci. 54 889
[6] Dodd P E, Schwank J R, Shaneyfelt M R, Felix J A, Paillet P, Ferlet-Cavrois V, Baggio J, Reed R A, Warren K M, Weller R A, Schrimpf R D, Hash G L, Dalton S M, Hirose K, Saito H 2007 IEEE Trans. Nucl. Sci. 54 2303
[7] Ecoffet R, Duzellier S, Falguere D, Guibert L, Inguimbert C 1997 IEEE Trans. Nucl. Sci. 44 2230
[8] Koga R, Crain S H, Crain W R, Crawford K B, Hansel S J 1998 IEEE Trans. Nucl. Sci. 45 2475
[9] Liu M S, Liu H Y, Brewster N, Nelson D, Golke K W, Kirchner G, Hughes H L, Campbell A, Ziegler J F 2006 IEEE Trans. Nucl. Sci. 53 3487
[10] Xapsos M A 1992 IEEE Trans. Nucl. Sci. 39 1613
[11] Dodd P E, Musseau O, Shaneyfelt M R, Sexton F W, D'hose C, Hash G L, Martinez M, Loemker R A, Leray J L, Winokur P S 1998 IEEE Trans. Nucl. Sci. 45 2483
[12] Reed R A, Weller R A, Mendenhall M H, Lauenstein J M, Warren K M, Pellish J A, Schrimpf R D, Sierawski B D, Massengill L W, Dodd P E, Shaneyfelt M R, Felix J A, Schwank J R, Haddad N F, Lawrence R K, Bowman J H, Conde R 2007 IEEE Trans. Nucl. Sci. 54 2312
[13] Raine M, Gaillardin M, Sauvestre J E, Flament O, Bournel A, Aubry-Fortuna V 2010 IEEE Trans. Nucl. Sci. 57 1892
[14] Zhang Z G, Liu J, Hou M D, Sun Y M, Zhao F Z Liu G, Han Z S, Geng C, Liu J D, Xi K, Duan J L, Yao H J, Mo D, Luo J, Gu S, Liu T Q 2013 Chin. Phys. B 22 096103
[15] Raine M, Gaillardin M, Paillet P, Duhamel O, Girard S, Bournel A 2011 IEEE Trans. Nucl. Sci. 58 2664
[16] Zhang Z G, Lei Z F, En Y F, Liu J 2016 Radiation Effects on Components & Systems Conference (RADECS) Bremen, Germany, September 19-23, 2016 pp1-4
[17] Schwank J R, Ferlet-Cavrois V, Shaneyfelt M R, Paillet P, Dodd P E 2003 IEEE Trans. Nucl. Sci. 50 522
[18] Heidel D F, Marshall P W, LaBel K A, Schwank J R, Rodbell K P, Hakey M C, Berg M D, Dodd P E, Friendlich M R, Phan A D, Seidleck C M, Shaneyfelt M R, Xapsos M A 2008 IEEE Trans. Nucl. Sci. 55 3394
[19] Fenouillet-Beranger C, Perreau P, Pham-Nguyen L, Denorme S, Andrieu F, Tosti L, Brevard L, Weber O, Barnola S, Salvetat T, Garros X, Casse M, Cassé M, Leroux C, Noel J P, Thomas O, Le-Gratiet B, Baron F, Gatefait M, Campidelli Y, Abbate F, Perrot C, de-Buttet C, Beneyton R, Pinzelli L, Leverd F, Gouraud P, Gros-Jean M, Bajolet A, Mezzomo C, Leyris C, Haendler S, Noblet D, Pantel R, Margain A, Borowiak C, Josse E, Planes N, Delprat D, Boedt F, Bourdelle K, Nguyen B Y, Boeuf F, Faynot O, Skotnicki T 2009 IEEE International Electron Devices Meeting (IEDM) Baltimore, USA, December 7-9, 2009 p1
[20] Adams J H, Barghouty A F, Mendenhall M H, Reed R A, Sierawski B D, Warren K M, Watts J W, Weller R A 2012 IEEE Trans. Nucl. Sci. 59 3141
[21] Tylka A J, Adams J H, Boberg P R, Brownstein B, Dietrich W F, Flueckiger E O, Petersen E L, Shea M A, Smart D F, Smith E C 1997 IEEE Trans. Nucl. Sci. 44 2150
[22] Ziegler J F, Biersack J P, Littmark U 1985 The Stopping and Range of Ions in Solids (New York: Pergamon Press)
[23] Pavlovic M, Strasik I 2007 Nucl. Instrum. Meth. Phys. Res. B 257 601
[24] Raine M, Hubert G, Gaillardin M, Artola L, Paillet P, Girard S, Sauvestre J, Bournel A 2011 IEEE Trans. Nucl. Sci. 58 840
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