Photoluminescences and structrue performances of Si-rich silicon nitride thin films containing Si quantum dots

Liao Wu-Gang; Zeng Xiang-Bin; Wen Guo-Zhi; Cao Chen-Chen; Ma Kun-Peng; Zheng Ya-Juan

doi:10.7498/aps.62.126801

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Liao Wu-Gang, Zeng Xiang-Bin, Wen Guo-Zhi, Cao Chen-Chen, Ma Kun-Peng, Zheng Ya-Juan. Photoluminescences and structrue performances of Si-rich silicon nitride thin films containing Si quantum dotsJ. Acta Physica Sinica, 2013, 62(12): 126801. DOI: 10.7498/aps.62.126801

Citation:

Liao Wu-Gang, Zeng Xiang-Bin, Wen Guo-Zhi, Cao Chen-Chen, Ma Kun-Peng, Zheng Ya-Juan. Photoluminescences and structrue performances of Si-rich silicon nitride thin films containing Si quantum dotsJ. Acta Physica Sinica, 2013, 62(12): 126801. DOI: 10.7498/aps.62.126801

Citation:

Liao Wu-Gang, Zeng Xiang-Bin, Wen Guo-Zhi, Cao Chen-Chen, Ma Kun-Peng, Zheng Ya-Juan. Photoluminescences and structrue performances of Si-rich silicon nitride thin films containing Si quantum dotsJ. Acta Physica Sinica, 2013, 62(12): 126801. DOI: 10.7498/aps.62.126801