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A highly-efficient magnetoelectric heating not only improves ion temperature of electron cyclotron resonance (ECR) plasma, but also reforms the radial and axial distribution of ions, thereby promoting the application of ECR plasma to the etching of chemical vapor deposition diamond films. In this paper, a ring-electrode is replaced by a cylinder-electrode, and the effects of cylinder-electrode on the ion temperature and density are studied. The ion heating effects in the cases of cylinder-electrode and ring-electrode are compared. The results indicate that cylinder-electrode can produce higher ion temperature than ring-electrode at the same anode voltage. Ion temperature at each radial point changes a lot when the cylinder-electrode is used to heat ions. The ion temperature inside cylinder-electrode has a big radial variation while it has a good radial uniformity at downstream of cylinder-electrode. The effect of magnetoelectric heating on ion density is small. Using cylinder-electrode to heat ion is beneficial to the transport and axial uniformity of ions.
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Keywords:
- ECR plasma /
- magnetoelectric heating /
- ion temperature
[1] Tan B S, Ma Z B, Shen W L, Wu Z H 2010 High Power Laser and Particle Beams 22 1887 (in Chinese) [谭必松, 马志斌, 沈武林, 吴振辉 2010 强激光与粒子束 22 1887]
[2] Shuji K, Yukie Y, Katsumi M 1999 Nanotechnology 10 385
[3] Buchkremer-Hermanns H, Long C, Weiss H 1996 Diamond and Related Materials 5 845
[4] Roth J R, Gerdin G A, Richardson R W 1976 IEEE Trans. Plasma Sci. PS-4 166
[5] Roth J R 1973 Plasma Phys. 15 995
[6] Roth J R 1973 IEEE Trans. Plasma Sci. 1 34
[7] Shen W L, Ma Z B, Tan B S, Wu J, Wang J H 2011 Acta Phys. Sin. 60 105204 (in Chinese) [沈武林, 马志斌, 谭必松, 吴俊, 汪健华 2011 60 105204]
[8] Tan B S, Ma Z B, Shen W L 2011 Plasma Sci. Technol. 13 68
[9] Ezumi N, Masuzaki S, Ohno N 2003 J. Nucl. Mater. 313-316 696
[10] Sekine T, Saito T, Tatematsu Y 2004 Rev. Sci. Instrum. 75 4317
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[1] Tan B S, Ma Z B, Shen W L, Wu Z H 2010 High Power Laser and Particle Beams 22 1887 (in Chinese) [谭必松, 马志斌, 沈武林, 吴振辉 2010 强激光与粒子束 22 1887]
[2] Shuji K, Yukie Y, Katsumi M 1999 Nanotechnology 10 385
[3] Buchkremer-Hermanns H, Long C, Weiss H 1996 Diamond and Related Materials 5 845
[4] Roth J R, Gerdin G A, Richardson R W 1976 IEEE Trans. Plasma Sci. PS-4 166
[5] Roth J R 1973 Plasma Phys. 15 995
[6] Roth J R 1973 IEEE Trans. Plasma Sci. 1 34
[7] Shen W L, Ma Z B, Tan B S, Wu J, Wang J H 2011 Acta Phys. Sin. 60 105204 (in Chinese) [沈武林, 马志斌, 谭必松, 吴俊, 汪健华 2011 60 105204]
[8] Tan B S, Ma Z B, Shen W L 2011 Plasma Sci. Technol. 13 68
[9] Ezumi N, Masuzaki S, Ohno N 2003 J. Nucl. Mater. 313-316 696
[10] Sekine T, Saito T, Tatematsu Y 2004 Rev. Sci. Instrum. 75 4317
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