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B-doped Ti film is fabricated by direct current magnetron sputtering. The doping concentration, surface morphology, crystal structure, crystal grain diameter and stress are characterized by X-ray photoelectron spectroscopy, scanning electron microscopy and X-ray diffraction, respectively. It is found that, with the increase of B doping, the crystal grain diameter decreases monotonically and reaches a minimum of 1.3 nm at a B doping concentration of 5.50 at.%. The B-doped Ti film presents a compact columnar structure at that concentration. The stress of Ti film changes from compressive stress to tensile stress when B is doped.
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Keywords:
- Ti films /
- B doping /
- surface morphology /
- magnetron sputtering
[1] Alemander D J, Cooley J C, Cameron B J, Dauelsberg L B, Dickerson R M, Hackenberg R E, Mauro M E, Nobile Jr A, Papin P A, Rivera G 2006 Fusion Science and Technology 49 796
[2] Jankowski A F, Wall M A, van Buuren A W 2002 Acta Materialia 50 4791
[3] Xu H W, Alford C S, Cooley J C, Dixon L A, Hackenberg R E, Letts S A, Moreno K A, Nikroo A, Wall J R, Youngblood K P 2007 Fusion Science and Technology 51 547
[4] Nakamura T, Okimura K 2004 Vacuum 74 391
[5] Cheng B X, Wu W D, He Z B, Xu H, Tang Y J, Lu T C 2006 High Power Laser and Particle Beams 18 961 (in Chinese) [程丙勋, 吴卫东, 何智兵, 许华, 唐永健, 卢铁城 2006 强激光与粒子束 18 961]
[6] Duan L L, Wu W D, He Z B, Xu H, Tang Y J, Xu J C 2008 High Power Laser and Particle Beams 20 505 (in Chinese) [段玲珑, 吴卫东, 何智兵, 许华, 唐永建, 徐金城 2008 强激光与粒子束 20 505]
[7] Shi L Q, Jin Q H, Liu C Z, Xu S L, Zhou Z Y 2005 Nucl. Phys. Rev. 22 148 (in Chinese) [施立群, 金钦华, 刘超卓, 徐世林, 周筑颖 2005 原子核物理评论 22 148]
[8] Zhang Y, He Z B, Yan J C, Li P, Tang Y J 2011 Acta Phys. Sin. 60 6803 (in Chinese) [张颖, 何智兵, 闫建成, 李萍, 唐永建 2011 60 6803]
[9] Han H, Chen Y, Liu S F, Chen X, Lü C, Wang S L 2011 Mater. Rev. 25 81 (in Chinese) [韩辉, 陈阳, 刘生发, 陈欣, 吕程, 王硕黎 2011 材料导报 25 81]
[10] Zhao Z Y 2004 X-ray and Material Structure (Hefei: Anhui University Press) pp174-178 (in Chinese) [赵宗彦 2004 X射线与物质结构 (合肥: 安徽大学出版社) 第174-178页]
[11] Shao S Y, Fan Z X, Fan R Y, Shao J D 2005 Laser & Optoelectronics Progress 42 22 (in Chinese) [邵淑英, 范正修, 范瑞瑛, 邵建达 2005 激光与光电子学进展 42 22]
[12] Li L X, Jia R 2010 Physical Chemistry of Silicate (Tianjin: Tianjin University Press) p212-223 (in Chinese) [李丽霞, 贾茹 2010 硅酸盐物理化学 (天津: 天津大学出版社) 第212-223页]
[13] Wei J, Song X Y, Han Q C, Xu W W, Li L M 2010 Rare Metal Materials and Engineering 39 603 (in Chinese) [魏君, 宋晓艳, 韩清超, 徐文武, 李凌梅 2010 稀有金属材料与工程 39 603]
[14] Barna P B, Adamik M 1998 Thin Solid Films 317 27
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[1] Alemander D J, Cooley J C, Cameron B J, Dauelsberg L B, Dickerson R M, Hackenberg R E, Mauro M E, Nobile Jr A, Papin P A, Rivera G 2006 Fusion Science and Technology 49 796
[2] Jankowski A F, Wall M A, van Buuren A W 2002 Acta Materialia 50 4791
[3] Xu H W, Alford C S, Cooley J C, Dixon L A, Hackenberg R E, Letts S A, Moreno K A, Nikroo A, Wall J R, Youngblood K P 2007 Fusion Science and Technology 51 547
[4] Nakamura T, Okimura K 2004 Vacuum 74 391
[5] Cheng B X, Wu W D, He Z B, Xu H, Tang Y J, Lu T C 2006 High Power Laser and Particle Beams 18 961 (in Chinese) [程丙勋, 吴卫东, 何智兵, 许华, 唐永健, 卢铁城 2006 强激光与粒子束 18 961]
[6] Duan L L, Wu W D, He Z B, Xu H, Tang Y J, Xu J C 2008 High Power Laser and Particle Beams 20 505 (in Chinese) [段玲珑, 吴卫东, 何智兵, 许华, 唐永建, 徐金城 2008 强激光与粒子束 20 505]
[7] Shi L Q, Jin Q H, Liu C Z, Xu S L, Zhou Z Y 2005 Nucl. Phys. Rev. 22 148 (in Chinese) [施立群, 金钦华, 刘超卓, 徐世林, 周筑颖 2005 原子核物理评论 22 148]
[8] Zhang Y, He Z B, Yan J C, Li P, Tang Y J 2011 Acta Phys. Sin. 60 6803 (in Chinese) [张颖, 何智兵, 闫建成, 李萍, 唐永建 2011 60 6803]
[9] Han H, Chen Y, Liu S F, Chen X, Lü C, Wang S L 2011 Mater. Rev. 25 81 (in Chinese) [韩辉, 陈阳, 刘生发, 陈欣, 吕程, 王硕黎 2011 材料导报 25 81]
[10] Zhao Z Y 2004 X-ray and Material Structure (Hefei: Anhui University Press) pp174-178 (in Chinese) [赵宗彦 2004 X射线与物质结构 (合肥: 安徽大学出版社) 第174-178页]
[11] Shao S Y, Fan Z X, Fan R Y, Shao J D 2005 Laser & Optoelectronics Progress 42 22 (in Chinese) [邵淑英, 范正修, 范瑞瑛, 邵建达 2005 激光与光电子学进展 42 22]
[12] Li L X, Jia R 2010 Physical Chemistry of Silicate (Tianjin: Tianjin University Press) p212-223 (in Chinese) [李丽霞, 贾茹 2010 硅酸盐物理化学 (天津: 天津大学出版社) 第212-223页]
[13] Wei J, Song X Y, Han Q C, Xu W W, Li L M 2010 Rare Metal Materials and Engineering 39 603 (in Chinese) [魏君, 宋晓艳, 韩清超, 徐文武, 李凌梅 2010 稀有金属材料与工程 39 603]
[14] Barna P B, Adamik M 1998 Thin Solid Films 317 27
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