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Different glow discharge polymer (GDP) thin-films are prepared at various working pressures and flux ratios of trans-2-butune (T2B) to H2 by using low-pressure plasma enhanced chemical vapor deposition technology. Hydrogen atomic content and network structure of GDP thin-film are characterized by element analysis and Fourier transform infrared spectrum. The hardness and modulus of GDP coating are measured by nanoindentation. It is found that when working pressure and flux ratio between T2B and H2 gradually decrease, hydrogen content and sp3 CH3 groups decrease, sp2 CH2 and sp3 CH1,2 groups increase and hardness H and Youngs modulus E of GDP coating and the cross-linking degree of carbon network inerease.
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Keywords:
- Fourier transform infrared spectrum /
- nanoindentation /
- Youngs modulus /
- hardness
[1] Aisenberg S, Chabot R 1971 J. Appl. Phys. 42 2953
[2] [3] Zhang Q, Yoon S F, Rusli, Yang H, Ahn J 1998 J. Appl. Phys. 83 1349
[4] Ju J H, Xia Y B, Zhang W L, Wang L J, Shi W M, Huang Z M, Li Z F, Zheng G Z, Tang D Y 2000 Acta Phys. Sin. 49 2311 (in Chinese) [居建华﹑夏义本﹑张伟丽﹑王林军﹑史为民﹑黄志明﹑李志锋﹑郑国珍﹑汤定元 2000 49 2311]
[5] [6] [7] Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 6436 (in Chinese) [张宝玲、 何智兵、 吴卫东、 刘兴华、 杨向东 2009 58 6436]
[8] Gram R Q, Immesoete C K, Kim H, Forsley L 1988 J. Vac. Sci. Technol. A 6 2998
[9] [10] Theobald M, Dumay B, Chicanne C, Barnouin J, Legaie O, Baclet P 2004 Fusion Sci. Technol. 45 176
[11] [12] Zhang B L, He Z B, Wu W D, Liu X H, Yang X D, Ma X J, Yang M S, Lin H P 2008 High Power Laser and Particle Beams 20 1109 (in Chinese)[张宝玲、 何智兵、 吴卫东、 刘兴华、 杨 向东、 马小军、 杨蒙生、 林华平 2008 强激光与离子束 20 1109]
[13] [14] Huang Y, Wu W D, Wei S, Luo J S, Zhang J C, Zhang Z W 2002 At. Ener. Sci. Techn. 36 343 (in Chinese) [黄 勇、 吴卫东、 魏 胜、 罗江山、 张继成、 张占文 2002 原子能科学技术 36 343]
[15] [16] [17] Nikroo A, Czechowicz D, Chenk C, Dicken M, Morris C, Rews R, Greenwood A L, Castillo E 2003 Mechanical Properties of Thin GDP Shells Used as Cryogenic Direct Drive Targets at OMEGA (San Diego: General Atomics) GA-A24457
[18] Zhang T H, Huan Y 2005 Compos. Sci. Technol. 65 1409
[19] [20] Oliver Z W C, Pharr G M 1992 J. Mater. Res. 7 1564
[21] [22] [23] Pastel P W, Varhue W J 1991 J. Vac. Sci. Technol. 9 1129
[24] Ristein J, Stief R T, Ley L 1998 J. Appl. Phys. 84 3836
[25] [26] [27] Bounouh Y, Thye M L, Dehbi-Alaoui A, Matthews A, Stoquert J P 1995 Phys. Rev. B 51 9597
[28] Shinohara M, Cho K, Shibata H, Nakatani T, Matsuda Y, Fujiyama H 2008 Thin Solid Films 516 4379
[29] [30] [31] Bubenzer A, Dischler B, Brandt G, Koidl P 1983 J. Appl. Phys. 54 4590
[32] [33] Frenklach A, Spear K 1988 J. Mater. Res. 3 133
[34] Czechowicz D G, Castillo E R, Nikroo A 2002 Fusion Sci. Technol. 41 188
[35] [36] Grill A, Pate1V 1992 Appl. Phys. Lett. 60 2089
[37] [38] Hayashi Y, Hagimoto K, Ebisu H, Kalaga M K, Soga T 2000 Jpn. J. Appl. Phys. 39 4088
[39] [40] [41] Piazza F, Golanski A 2003 Appl. Phys. Lett. 82 358
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[1] Aisenberg S, Chabot R 1971 J. Appl. Phys. 42 2953
[2] [3] Zhang Q, Yoon S F, Rusli, Yang H, Ahn J 1998 J. Appl. Phys. 83 1349
[4] Ju J H, Xia Y B, Zhang W L, Wang L J, Shi W M, Huang Z M, Li Z F, Zheng G Z, Tang D Y 2000 Acta Phys. Sin. 49 2311 (in Chinese) [居建华﹑夏义本﹑张伟丽﹑王林军﹑史为民﹑黄志明﹑李志锋﹑郑国珍﹑汤定元 2000 49 2311]
[5] [6] [7] Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 6436 (in Chinese) [张宝玲、 何智兵、 吴卫东、 刘兴华、 杨向东 2009 58 6436]
[8] Gram R Q, Immesoete C K, Kim H, Forsley L 1988 J. Vac. Sci. Technol. A 6 2998
[9] [10] Theobald M, Dumay B, Chicanne C, Barnouin J, Legaie O, Baclet P 2004 Fusion Sci. Technol. 45 176
[11] [12] Zhang B L, He Z B, Wu W D, Liu X H, Yang X D, Ma X J, Yang M S, Lin H P 2008 High Power Laser and Particle Beams 20 1109 (in Chinese)[张宝玲、 何智兵、 吴卫东、 刘兴华、 杨 向东、 马小军、 杨蒙生、 林华平 2008 强激光与离子束 20 1109]
[13] [14] Huang Y, Wu W D, Wei S, Luo J S, Zhang J C, Zhang Z W 2002 At. Ener. Sci. Techn. 36 343 (in Chinese) [黄 勇、 吴卫东、 魏 胜、 罗江山、 张继成、 张占文 2002 原子能科学技术 36 343]
[15] [16] [17] Nikroo A, Czechowicz D, Chenk C, Dicken M, Morris C, Rews R, Greenwood A L, Castillo E 2003 Mechanical Properties of Thin GDP Shells Used as Cryogenic Direct Drive Targets at OMEGA (San Diego: General Atomics) GA-A24457
[18] Zhang T H, Huan Y 2005 Compos. Sci. Technol. 65 1409
[19] [20] Oliver Z W C, Pharr G M 1992 J. Mater. Res. 7 1564
[21] [22] [23] Pastel P W, Varhue W J 1991 J. Vac. Sci. Technol. 9 1129
[24] Ristein J, Stief R T, Ley L 1998 J. Appl. Phys. 84 3836
[25] [26] [27] Bounouh Y, Thye M L, Dehbi-Alaoui A, Matthews A, Stoquert J P 1995 Phys. Rev. B 51 9597
[28] Shinohara M, Cho K, Shibata H, Nakatani T, Matsuda Y, Fujiyama H 2008 Thin Solid Films 516 4379
[29] [30] [31] Bubenzer A, Dischler B, Brandt G, Koidl P 1983 J. Appl. Phys. 54 4590
[32] [33] Frenklach A, Spear K 1988 J. Mater. Res. 3 133
[34] Czechowicz D G, Castillo E R, Nikroo A 2002 Fusion Sci. Technol. 41 188
[35] [36] Grill A, Pate1V 1992 Appl. Phys. Lett. 60 2089
[37] [38] Hayashi Y, Hagimoto K, Ebisu H, Kalaga M K, Soga T 2000 Jpn. J. Appl. Phys. 39 4088
[39] [40] [41] Piazza F, Golanski A 2003 Appl. Phys. Lett. 82 358
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