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Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film

Li Yang-Ping Liu Zheng-Tang

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Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film

Li Yang-Ping, Liu Zheng-Tang
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  • Abstract views:  7949
  • PDF Downloads:  892
  • Cited By: 0
Publishing process
  • Received Date:  15 October 2008
  • Accepted Date:  09 November 2008
  • Published Online:  20 July 2009

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