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Plasma power and impedance measurement in silicon thin film deposition

Zhang Xiao-Dan Zhang Fa-Rong Elefterious Amanatides Dimitris Mataras Zhao Ying

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Plasma power and impedance measurement in silicon thin film deposition

Zhang Xiao-Dan, Zhang Fa-Rong, Elefterious Amanatides, Dimitris Mataras, Zhao Ying
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  • Abstract views:  8134
  • PDF Downloads:  881
  • Cited By: 0
Publishing process
  • Received Date:  14 September 2006
  • Accepted Date:  13 October 2006
  • Published Online:  20 September 2007

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