Cui Sui-Han, Guo Yu-Xiang, Chen Qiu-Hao, Jin Zheng, Yang Chao, Wu Zhong-Can, Su Xiong-Yu, Ma Zheng-Yong, Tian Xiu-Bo, Wu Zhong-Zhen. Working principle and layout logic of closed magnetic field in sputteringJ. Acta Physica Sinica, 2022, 71(5): 055203. DOI: 10.7498/aps.71.20211781