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Emission spectral diagnosis of argon-helium plasma produced by radio frequency capacitive discharge

Zhang Zhi-Fan Gao Jun Lei Peng Zhou Su-Su Wang Xin-Bing Zuo Du-Luo

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Emission spectral diagnosis of argon-helium plasma produced by radio frequency capacitive discharge

Zhang Zhi-Fan, Gao Jun, Lei Peng, Zhou Su-Su, Wang Xin-Bing, Zuo Du-Luo
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  • Optically pumped metastable rare-gas laser (OPRGL) have been proposed to overcome the shortcomings of diode-pumped alkali-vapor laser in the recent years. The OPRGL promises to realize high-scale output. But how to achieve enough particle density of metastable atoms is still an open problem. Usually, plasma produced by discharge serves as a gain medium of the OPRGL. Here in this paper, we are to reveal the effects of different discharge parameters on the plasma properties, such as particle density of metastable argon atoms. Gas discharge at a radio frequency of 13.56 MHz is adopted to excite argon atoms. Emission spectrum is employed to study argon and helium radio frequency discharge of optically pumped argon laser at high pressure, different powers of discharge and various content of argon. Gas temperature is obtained by analyzing rotational spectrum (A2∑+ → X2Π) of OH radical generated by residual water vapor and comparing simulated spectrum with the measured spectrum. The electronic excitation temperature relating to electron temperature is obtained by the method of Boltzmann's plot. Stark broadening of the spectrum is used to determine the electron density. The results show that gas temperature rises slightly with the increase of pressure and varies little with content and discharge power changing. The electronic excitation temperature increases with the decrease of pressure evidently and decreases slightly with the increase of content. The electron density is on the order of 1015 cm-3 under various conditions controlled by us. Long time discharge test reveals that residual water vapor can lead to the decrease of electron temperature, and thus reducing the yield of argon metastable state. In conclusion, considering that the higher gas temperature can improve the collision relaxation rate of helium and argon, and the higher electron temperature can improve the rate of production of argon metastable state. Thus a proposal is put forward that appropriately heating gas and reducing gas pressure can obtain higher particle density of metastable argon. Furthermore, It can be found from these results that heating and cleaning the gas during discharge may be candidate methods to obtain and sustain the higher particle density in the plasma.
      Corresponding author: Zuo Du-Luo, zuoduluo@hust.edu.cn
    • Funds: Project supported by the Foundation for Innovation of Wuhan National Laboratory for Optoelectronics, China (Grant No. 0214187070).
    [1]

    Demyanov A V, Kochetov I V, Mikheyev P A 2013 J. Phys. D 46 375202

    [2]

    Rawlins W T, Galbally-Kinney K L, Davis S J, Hoskinson A R, Hopwood J A, Heaven M C 2015 Opt. Express 23 4804

    [3]

    Han J, Heaven M C 2015 Opt. Lett. 40 1310

    [4]

    Yang Z N, Yu G Q, Wang H Y, Lu Q S, Xu X J 2015 Opt. Express 23 13823

    [5]

    Gao J, He Y Y, Sun P F, Zhang Z F, Wang X B, Zuo D L 2017 J. Opt. Soc. Am. B 34 814

    [6]

    Han J, Heaven M C, Moran P J, Pitz G A, Guild E M, Sanderson C R, Hokr B 2017 Opt. Lett. 42 4627

    [7]

    Gao J, Zhang Z F, Lei P, Wang X B, Zuo D L 2018 High Power Laser and Particle Beams 30 010102 (in Chinese) [高俊, 张秩凡, 雷鹏, 王新兵, 左都罗 2018 强激光与粒子束 30 010102]

    [8]

    Niermann B, Reuter R, Kuschel T, Benedikt J, Boke M, Winter J 2012 Plasma Sources Sci. Technol. 21 034002

    [9]

    Balcon N, Hagelaar G, Boeuf J P 2008 IEEE Trans. Plasma Sci. 36 2782

    [10]

    Eshel B, Perram G P 2018 J. Opt. Soc. Am. B 35 164

    [11]

    Wu Q 2010 M. S. Thesis (Dalian: Dalian University of Technology) (in Chinese) [武启 2010 硕士学位论文 (大连: 大连理工大学)]

    [12]

    Li S Z, Huang W T, Wang D Z 2009 Phys. Plasmas 16 093501

    [13]

    Wu R, Li Y, Zhu S G, Feng H Y, Zhang L, Wang J D 2008 Spectrosc. Spect. Anal. 28 731 (in Chinese) [武蓉, 李燕, 朱顺官, 冯红艳, 张琳, 王俊德 2008 光谱学与光谱分析 28 731]

    [14]

    Dong L F, Ran J X, Mao Z G 2005 Appl. Phys. Lett. 86 161501

    [15]

    Dong L F, Qi Y Y, Liu W Y, Fan W L 2009 J. Appl. Phys. 106 013301

    [16]

    Dong L F, Liu W Y, Yang Y J, Wang S, Ji Y F 2011 Acta Phys. Sin. 60 045202 (in Chinese) [董丽芳, 刘为远, 杨玉杰, 王帅, 嵇亚飞 2011 60 045202]

    [17]

    Niermann B, Boke M, Sadeghi N, Winter J 2010 Eur. Phys. J. D 60 489

    [18]

    Lieberman M A, Lichtenberg A J (translated by Pu Y K) 2011 Principles of Plasma Discharges and Materials Processing (Beijing: Science Press) pp325-326 (in Chinese) [迈克 A 力伯曼, 阿伦 J 里登伯格 著 (蒲以康 译) 2011 等离子体放电原理与材料处理 (北京: 科学出版社)第 325–326页]

    [19]

    Wust K 1992 Rev. Sci. Instrum. 63 2581

    [20]

    Zhai X D, Ding Y J, Peng Z M, Luo R 2012 Acta Phys. Sin. 61 123301 (in Chinese) [翟晓东, 丁艳军, 彭志敏, 罗锐 2012 61 123301]

    [21]

    Hibbert A, Biémont E, Godefroid M, Vaeck N 1991 J. Phys. B 24 3943

  • [1]

    Demyanov A V, Kochetov I V, Mikheyev P A 2013 J. Phys. D 46 375202

    [2]

    Rawlins W T, Galbally-Kinney K L, Davis S J, Hoskinson A R, Hopwood J A, Heaven M C 2015 Opt. Express 23 4804

    [3]

    Han J, Heaven M C 2015 Opt. Lett. 40 1310

    [4]

    Yang Z N, Yu G Q, Wang H Y, Lu Q S, Xu X J 2015 Opt. Express 23 13823

    [5]

    Gao J, He Y Y, Sun P F, Zhang Z F, Wang X B, Zuo D L 2017 J. Opt. Soc. Am. B 34 814

    [6]

    Han J, Heaven M C, Moran P J, Pitz G A, Guild E M, Sanderson C R, Hokr B 2017 Opt. Lett. 42 4627

    [7]

    Gao J, Zhang Z F, Lei P, Wang X B, Zuo D L 2018 High Power Laser and Particle Beams 30 010102 (in Chinese) [高俊, 张秩凡, 雷鹏, 王新兵, 左都罗 2018 强激光与粒子束 30 010102]

    [8]

    Niermann B, Reuter R, Kuschel T, Benedikt J, Boke M, Winter J 2012 Plasma Sources Sci. Technol. 21 034002

    [9]

    Balcon N, Hagelaar G, Boeuf J P 2008 IEEE Trans. Plasma Sci. 36 2782

    [10]

    Eshel B, Perram G P 2018 J. Opt. Soc. Am. B 35 164

    [11]

    Wu Q 2010 M. S. Thesis (Dalian: Dalian University of Technology) (in Chinese) [武启 2010 硕士学位论文 (大连: 大连理工大学)]

    [12]

    Li S Z, Huang W T, Wang D Z 2009 Phys. Plasmas 16 093501

    [13]

    Wu R, Li Y, Zhu S G, Feng H Y, Zhang L, Wang J D 2008 Spectrosc. Spect. Anal. 28 731 (in Chinese) [武蓉, 李燕, 朱顺官, 冯红艳, 张琳, 王俊德 2008 光谱学与光谱分析 28 731]

    [14]

    Dong L F, Ran J X, Mao Z G 2005 Appl. Phys. Lett. 86 161501

    [15]

    Dong L F, Qi Y Y, Liu W Y, Fan W L 2009 J. Appl. Phys. 106 013301

    [16]

    Dong L F, Liu W Y, Yang Y J, Wang S, Ji Y F 2011 Acta Phys. Sin. 60 045202 (in Chinese) [董丽芳, 刘为远, 杨玉杰, 王帅, 嵇亚飞 2011 60 045202]

    [17]

    Niermann B, Boke M, Sadeghi N, Winter J 2010 Eur. Phys. J. D 60 489

    [18]

    Lieberman M A, Lichtenberg A J (translated by Pu Y K) 2011 Principles of Plasma Discharges and Materials Processing (Beijing: Science Press) pp325-326 (in Chinese) [迈克 A 力伯曼, 阿伦 J 里登伯格 著 (蒲以康 译) 2011 等离子体放电原理与材料处理 (北京: 科学出版社)第 325–326页]

    [19]

    Wust K 1992 Rev. Sci. Instrum. 63 2581

    [20]

    Zhai X D, Ding Y J, Peng Z M, Luo R 2012 Acta Phys. Sin. 61 123301 (in Chinese) [翟晓东, 丁艳军, 彭志敏, 罗锐 2012 61 123301]

    [21]

    Hibbert A, Biémont E, Godefroid M, Vaeck N 1991 J. Phys. B 24 3943

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Publishing process
  • Received Date:  03 February 2018
  • Accepted Date:  18 April 2018
  • Published Online:  20 July 2019

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