Low voltage scanning transmission electron microscopy for two-dimensional materials

Li Dong-Dong; Zhou Wu

doi:10.7498/aps.66.217303

Abstract

Two-dimensional (2D) materials, such as graphene and transition-metal dichalcogenide monolayers, have unique properties that are distinctly different from those of their bulk counterparts, and hopefully possess a wide range of applications in 2D semiconductor device. Structural defects are known to have profound influences on the properties of crystalline materials; thus, correlating the defect structure with local properties in 2D material is of fundamental importance. However, electron microscopy studies of 2D materials on an atomic scale have become a challenge as most of these materials are susceptible to electron beam irradiation damage under high voltage and high dose experimental conditions. The development of low voltage aberration-corrected scanning transmission electron microscopy (STEM) has made it possible to study 2D materials at a single atom level without damaging their intrinsic structures. In addition, controllable structural modification by using electron beam becomes feasible by controlling the electron beam-sample interaction. New nanostructures can be created and novel 2D materials can be fabricated in-situ by using this approach. In this article, we review some of our recent studies of graphene and transition-metal dichalcogenides to showcase the applications of low voltage aberration corrected STEM in 2D material research.

Keywords:

two-dimensional materials /
scanning transmission electron microscopy /
low voltage /
defect engineering

Authors and contacts

Li Dong-Dong^1,2,
Zhou Wu^1,2

1.
School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China;
2.
CAS Key Laboratory of Vacuum Sciences, University of Chinese Academy of Sciences, Beijing 100049, China

Corresponding author: Zhou Wu, wuzhou@ucas.ac.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 51622211) and the CAS Pioneer Hundred Talents Program.

References

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Cited By

[1]	Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666
[2]	As thin as it gets 2017 Nat. Mater. 16 155
[3]	Bhimanapati G R, Lin Z, Meunier V, Jung Y, Cha J, Das S, Xiao D, Son Y, Strano M S, Cooper V R, Liang L, Louie S G, Ringe E, Zhou W, Kim S S, Naik R R, Sumpter B G, Terrones H, Xia F, Wang Y, Zhu J, Akinwande D, Alem N, Schuller J A, Schaak R E, Terrones M, Robinson J A 2015 ACS Nano 9 11509
[4]	Krivanek O L, Chisholm M F, Nicolosi V, Pennycook T J, Corbin G J, Dellby N, Murfitt M F, Own C S, Szilagyi Z S, Oxley M P, Pantelides S T, Pennycook S J 2010 Nature 464 571
[5]	Meyer J C, Eder F, Kurasch S, Skakalova V, Kotakoski J, Park H J, Roth S, Chuvilin A, Eyhusen S, Benner G, Krasheninnikov A V, Kaiser U 2012 Phys. Rev. Lett. 108 196102
[6]	Suenaga K, Iizumi Y, Okazaki T 2011 Europ. Phys. J. Appl. Phys. 54 33508
[7]	Krivanek O L, Zhou W, Chisholm M F, Idrobo J C, Lovejoy T C, Ramasse Q M, Dellby N 2012 Gentle STEM of Single Atoms: Low keV Imaging and Analysis at Ultimate Detection Limits (West Sussex: John Wiley Sons, Ltd.) p119
[8]	Krivanek O L, Lovejoy T C, Dellby N, Carpenter R W 2013 Microscopy 62 3
[9]	Zhou W, Oxley M P, Lupini A R, Krivanek O L, Pennycook S J, Idrobo J C 2012 Microsc. Microanal. 18 1342
[10]	Krivanek O L, Lovejoy T C, Dellby N, Aoki T, Carpenter R W, Rez P, Soignard E, Zhu J, Batson P E, Lagos M J, Egerton R F, Crozier P A 2014 Nature 514 209
[11]	Jones L, Yang H, Pennycook T J, Marshall M S J, Aert S V, Browning N D, Castell M R, Nellist P D 2015 Advanced Structural and Chemical Imaging 1 8
[12]	Sang X, LeBeau J M 2014 Ultramicroscopy 138 28
[13]	Urban K W 2008 Science 321 506
[14]	Urban K W 2009 Nat. Mater. 8 260
[15]	Yankovich A B, Berkels B, Dahmen W, Binev P, Sanchez S I, Bradley S A, Li A, Szlufarska I, Voyles P M 2014 Nat. Commun. 5 4155
[16]	Gong Y, Liu Z, Lupini A R, Shi G, Lin J, Najmaei S, Lin Z, Elas A L, Berkdemir A, You G, Terrones H, Terrones M, Vajtai R, Pantelides S T, Pennycook S J, Lou J, Zhou W, Ajayan P M 2014 Nano Lett. 14 442
[17]	Zhou W, Pennycook S J, Idrobo J C 2012 Ultramicroscopy 119 51
[18]	Kapetanakis M D, Zhou W, Oxley M P, Lee J, Prange M P, Pennycook S J, Idrobo J C, Pantelides S T 2015 Phys. Rev. B 92 125147
[19]	Zhou W, Kapetanakis M D, Prange M P, Pantelides S T, Pennycook S J, Idrobo J C 2012 Phys. Rev. Lett. 109 206803
[20]	Zhou W, Lee J, Nanda J, Pantelides S T, Pennycook S J, Idrobo J C 2012 Nat. Nanotechnol. 7 161
[21]	Lin J, Fang W, Zhou W, Lupini A R, Idrobo J C, Kong J, Pennycook S J, Pantelides S T 2013 Nano Lett. 13 3262
[22]	Brown L, Hovden R, Huang P, Wojcik M, Muller D A, Park J 2012 Nano Lett. 12 1609
[23]	Gong Y, Lin J, Wang X, Shi G, Lei S, Lin Z, Zou X, Ye G, Vajtai R, Yakobson B I, Terrones H, Terrones M, Tay B K, Lou J, Pantelides S T, Liu Z, Zhou W, Ajayan P M 2014 Nat. Mater. 13 1135
[24]	Zhou W, Zou X, Najmaei S, Liu Z, Shi Y, Kong J, Lou J, Ajayan P M, Yakobson B I, Idrobo J C 2013 Nano Lett. 13 2615
[25]	Hong J, Hu Z, Probert M, Li K, L D, Yang X, Gu L, Mao N, Feng Q, Xie L, Zhang J, Wu D, Zhang Z, Jin C, Ji W, Zhang X, Yuan J, Zhang Z 2015 Nat. Commun. 6 6293
[26]	Zou X, Liu Y, Yakobson B I 2013 Nano Lett. 13 253
[27]	Najmaei S, Liu Z, Zhou W, Zou X, Shi G, Lei S, Yakobson B I, Idrobo J C, Ajayan P M, Lou J 2013 Nat. Mater. 12 754
[28]	Lee J, Zhou W, Pennycook S J, Idrobo J C, Pantelides S T 2013 Nat. Commun. 4 1650
[29]	Susi T, Meyer J C, Kotakoski J 2017 Ultramicroscopy 180 163
[30]	Lin J, Pantelides S T, Zhou W 2015 ACS Nano 9 5189
[31]	Susi T, Kotakoski J, Kepaptsoglou D, Mangler C, Lovejoy T C, Krivanek O L, Zan R, Bangert U, Ayala P, Meyer J C, Ramasse Q 2014 Phys. Rev. Lett. 113 115501
[32]	Vierimaa V, Krasheninnikov A V, Komsa H P 2016 Nanoscale 8 7949
[33]	Komsa H P, Kotakoski J, Kurasch S, Lehtinen O, Kaiser U, Krasheninnikov A V 2012 Phys. Rev. Lett. 109 035503
[34]	Komsa H P, Kurasch S, Lehtinen O, Kaiser U, Krasheninnikov A V 2013 Phys. Rev. B 88 035301
[35]	Sutter E, Huang Y, Komsa H P, Ghorbani-Asl M, Krasheninnikov A V, Sutter P 2016 Nano Lett. 16 4410
[36]	Kotakoski J, Meyer J C, Kurasch S, Santos-Cottin D, Kaiser U, Krasheninnikov A V 2011 Phys. Rev. B 83 245420
[37]	Kotakoski J, Krasheninnikov A V, Kaiser U, Meyer J C 2011 Phys. Rev. Lett. 106 105505
[38]	Yin K, Zhang Y Y, Zhou Y, Sun L, Chisholm M F, Pantelides S T, Zhou W 2017 2D Mater. 4 011001
[39]	Zhao J, Deng Q, Bachmatiuk A, Sandeep G, Popov A, Eckert J, Rmmeli M H 2014 Science 343 1228
[40]	Lin J, Cretu O, Zhou W, Suenaga K, Prasai D, Bolotin K I, Cuong N T, Otani M, Okada S, Lupini A R, Idrobo J C, Caudel D, Burger A, Ghimire N J, Yan J, Mandrus D G, Pennycook S J, Pantelides S T 2014 Nat. Nanotechnol. 9 436
[41]	Lin J, Zhang Y, Zhou W, Pantelides S T 2016 ACS Nano 10 2782
[42]	Liu X, Xu T, Wu X, Zhang Z, Yu J, Qiu H, Hong J H, Jin C H, Li J X, Wang X R, Sun L T, Guo W 2013 Nat. Commun. 4 1776
[43]	Shi Y, Zhou W, Lu A Y, Fang W, Lee Y H, Hsu A L, Kim S M, Kim K K, Yang H Y, Li L J, Idrobo J C, Kong J 2012 Nano Lett. 12 2784
[44]	Liu Z, Ma L, Shi G, Zhou W, Gong Y, Lei S, Yang X, Zhang J, Yu J, Hackenberg K P, Babakhani A, Idrobo J C, Vajtai R, Lou J, Ajayan P M 2013 Nat. Nanotechnol. 8 119
[45]	Gong Y, Lei S, Ye G, Li B, He Y, Keyshar K, Zhang X, Wang Q, Lou J, Liu Z, Vajtai R, Zhou W, Ajayan P M 2015 Nano Lett. 15 6135
[46]	Jariwala D, Marks T J, Hersam M C 2017 Nat. Mater. 16 170

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