He Yin-Zhu, Zhao Shi-Jie, Wei Hao-Yun, Li Yan. Traceable trans-scale heterodyne interferometer with subnanometer resolutionJ. Acta Physica Sinica, 2017, 66(6): 060601. DOI: 10.7498/aps.66.060601
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Citation:
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He Yin-Zhu, Zhao Shi-Jie, Wei Hao-Yun, Li Yan. Traceable trans-scale heterodyne interferometer with subnanometer resolutionJ. Acta Physica Sinica, 2017, 66(6): 060601. DOI: 10.7498/aps.66.060601
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He Yin-Zhu, Zhao Shi-Jie, Wei Hao-Yun, Li Yan. Traceable trans-scale heterodyne interferometer with subnanometer resolutionJ. Acta Physica Sinica, 2017, 66(6): 060601. DOI: 10.7498/aps.66.060601
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Citation:
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He Yin-Zhu, Zhao Shi-Jie, Wei Hao-Yun, Li Yan. Traceable trans-scale heterodyne interferometer with subnanometer resolutionJ. Acta Physica Sinica, 2017, 66(6): 060601. DOI: 10.7498/aps.66.060601
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