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In the fabrication of micrometer-sized structures from an epitaxial topological insulator thin film with photolithography, the film is usually deteriorated by the chemicals used in the process. By molecular beam epitaxy of (BixSb1-x)2Te3 topological insulator onto Hall bar-shaped plateaus pre-lithographed on SrTiO3 substrate, we have directly prepared Hall bar devices of epitaxial topological insulator thin film, avoiding the degradation of film quality in photolithography. Atomic force microscope and transport measurements have demonstrated that the Hall bar devices have the similar properties as that of (BixSb1-x)2Te3 films epitaxied on ordinary SrTiO3 substrates. The new microfabrication method can not only help to realize various novel quantum phenomena predicted in topological insulators but be applied to other epitaxial low-dimensional systems as well.
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Keywords:
- topological insulator /
- SrTiO3 /
- phtotolithography /
- Hall effect
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[1] Hasan M Z, Kane C L 2010 Rev. Mod. Phys. 82 3045
[2] Qi X L, Zhang S C 2011 Rev. Mod. Phys. 83 1057
[3] Zhang H J, Liu C X, Qi X L, Dai X, Fang Z, Zhang S C 2009 Nature Phys. 5 438
[4] Chen X, Ma X C, He K, Jia J F, Xue Q K 2011 Adv. Mater. 23 1162
[5] Zhang T, Cheng P, Chen X, Jia J F, Ma X C, He K, Wang L L, Zhang H J, Dai X, Fang Z, Xie X C, Xue Q K 2009 Phys. Rev. Lett. 103 266803
[6] Knig M, Wiedmann S, Brne C, Roth A, Buhmann H, Molenkamp L W, Qi X L, Zhang S C 2007 Science 318 766
[7] Chang C Z, Zhang J, Feng X, Shen J, Zhang Z C, Guo M H, Li K, Ou Y B, Wei P, Wang L L, Ji Z Q, Feng Y, Ji S H, Chen X, Jia J F, Dai X, Fang Z, Zhang S C, He K, Wang Y Y, Lu L, Ma X C, Xue Q K 2013 Science 340 167
[8] He K, Ma X C, Chen X, L L, Wang Y Y, Xue Q K 2013 Chin. Phys. B 22 067305
[9] Zhang J S, Chang C Z, Zhang Z C, Wen J, Feng X, Li K, Liu M H, He K, Wang L L, Chen X, Xue Q K, Ma X C, Wang Y Y 2011 Nat. Commun. 2 574
[10] Zhang G H, Qin H J, Chen J, He X Y, Li Y Q, Wu K H 2011 Adv. Funct. Mater. 21 2351
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[12] Shen J, Kirschner J 2002 Surf. Sci. 500 300
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[15] Ding Y, Shen J, Pang Y, Liu G T, Fan J, Ji Z Q, Yang C L, L L 2013 Acta Phys. Sin. 62 167401 (in Chinese) [丁玥, 沈洁, 庞远, 刘广同, 樊洁, 姬忠庆, 杨昌黎, 吕力 2013 62 167401]
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