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Normally, Strehl ratio, resolution, and focus depth, the parameters that are used to evaluate the performance of an optical imaging system, are always calculated by scalar diffraction method. Considering the vectorial properties of light, especially when the system numerical aperture (NA) is high, the accuracy of scalar method can no longer fulfill the requirement of analysis. The variations of properties of these parameters accompanied by using of vectorial method are discussed. In order to describe the effects of polarization clearly, assuming a system with identical polarization state within the entrance pupil, by formula deduction and numerical simulation, we conclude that due to the influence of the polarization, the maximum intensity of system diffraction spot decreases, the resolution between image plane and parallel polarized orientation of incident light drops down, then the diffraction spot loses its circular symmetry, the focus depth changes slightly, and these effects becomes more apparent with the increase of system NA. Finally, the method of calculating the off-axis images is discussed in the paper.
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Keywords:
- polarization /
- vectorial diffractive theory /
- imaging quality /
- numerical aperture
[1] Hopkins H H 1943 Proc. Phys. Soc. 55 116
[2] Flagello D G, Rosenbluth A E, Progler C, Armitage J 1992 Microelectronic Engineering. 17 105
[3] Ignatowski W S 1919 Trans. Opt. Inst. Petrograd. 1 36
[4] Richards B, Wolf E 1959 Proc. R. Soc. London A 253 358
[5] Kant R 1991 Tech. Rep. TR02. 1713.B 25
[6] Wang W J, Friberg A T, Wolf E 1997 J. Opt. Soc. Am. A 14 491
[7] Bowkamp C J 1954 Rep. Pro. Phys. 17 35
[8] Born M , Wolf E 2009 Principles of Optics. (7th Ed.) (Beijing: Publishing House of Electronics Industry Press) p383 (in Chinese) [马科斯·玻恩, 埃米尔·沃耳夫 2009 光学原理(第七版) (北京: 电子工业出版社) 第383页]
[9] Liu C, Cen Z F 2012 Acta Phys. Sin. 61 134201 (in Chinese) [刘超, 岑兆丰 2012 61 134201]
[10] Xu W C 2011 Ph. D. Dissertation (Changchun: The Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sicence) (in Chinese) [许伟才 2011 博士学位论文 (长春: 中国科学院长春光学精密机械与物理研究所)]
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[1] Hopkins H H 1943 Proc. Phys. Soc. 55 116
[2] Flagello D G, Rosenbluth A E, Progler C, Armitage J 1992 Microelectronic Engineering. 17 105
[3] Ignatowski W S 1919 Trans. Opt. Inst. Petrograd. 1 36
[4] Richards B, Wolf E 1959 Proc. R. Soc. London A 253 358
[5] Kant R 1991 Tech. Rep. TR02. 1713.B 25
[6] Wang W J, Friberg A T, Wolf E 1997 J. Opt. Soc. Am. A 14 491
[7] Bowkamp C J 1954 Rep. Pro. Phys. 17 35
[8] Born M , Wolf E 2009 Principles of Optics. (7th Ed.) (Beijing: Publishing House of Electronics Industry Press) p383 (in Chinese) [马科斯·玻恩, 埃米尔·沃耳夫 2009 光学原理(第七版) (北京: 电子工业出版社) 第383页]
[9] Liu C, Cen Z F 2012 Acta Phys. Sin. 61 134201 (in Chinese) [刘超, 岑兆丰 2012 61 134201]
[10] Xu W C 2011 Ph. D. Dissertation (Changchun: The Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sicence) (in Chinese) [许伟才 2011 博士学位论文 (长春: 中国科学院长春光学精密机械与物理研究所)]
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