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AlN nanowire macro-arrays are successfully synthesized and characterized by the second template method. In the article we mainly research the process of preparing the AlN nanowire macro-arrays each with a certain orientation and uniform diameter by the chemical vapor deposition (CVD) method. Metal nanoparticles are prepared by CVD and self-assembled PS sphere templates, and then AlN nanowires macro arrays are compounded by the CVD on template and the metal nanoparticles on the template as a catalyst. The samples are observed by SEM and TEM, AlN nanowire macro-arrays have an area of about 0.3 mm×0.2 mm, they are well distributed, and have an average diameter of about 41 nm, an average length of about 1.8μm, distributed density and coverage of large macro-hexagonal AlN nanowire arrays. So a method to controllably prepare AIN macroscopic nanowire arrays is obtained.
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Keywords:
- AlN nanowires arrays /
- template /
- CVD /
- SEM
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[11] Liu Q L, Tanaka T, Hu J Q 2003 Appl. Phys. Lett. 83 4939
[12] Yoshitaka Taniyasu, Makoto Kasu, Toshiki Makimoto 2006 Nature 441 325
[13] Yoganand S N, Jagannadham K, Karoui A 2002 Vac. Sci.Technol. A 20 1974
[14] Tang Y B, Liu Y Q, Sun C H 2007 Mater. Res. 22 2711
[15] Shen C H, Yang T Z, Xiao C W 2008 Chin. Phys. B 17 2191
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[1] Zhang Y Q, Shi Y, Pu L, Zhang R, Zheng Y D 2008 Acta Phys. Sin. 57 5198 (in Chinese)[张轶群、施 毅、濮 林、张 荣、郑有炓 2008 57 5198]
[2] Yu L M, Fan X H, Liu J G 2004 Materials Review 18 112 (in Chinese) [于灵敏、范新会、刘建刚 2004 材料导报 18 112]
[3] Zuo J, Sun L, Lin C J 2003 Electronic Components & Materials 22 32(in Chinese) [左 鹃、孙 览、林昌健 2003 电子元件与材料 22 32]
[4] Yuan S J, Zhou S M, Lu M 2006 Acta Phys. Sin. 55 891 (in Chinese) [袁淑娟、周仕明、鹿 牧 2006 55 891]
[5] Hernandez-Velez M 2006 Thin Solid Films 495 51
[6] Viernow J, Petrovykh D Y, Men F K 1999 Appl. Phys. Lett. 74 2125
[7] Wang L C, Zhang X Z 2005 Chin. Electr. Microse. Soe. 24 252 (in Chinese) [王立晟、章晓中 2005 电子显微镜报 24 252]
[8] Morkoc S S 1992 Vac. Sci. Technol B 10 1237
[9] Rubio A, Coikill J L, Cohen M L 1993 Phys. Rev. B 48 11810
[10] Xu C K, Xue L, Yin C R 2003 Phys. Stat Sol. A 198 329
[11] Liu Q L, Tanaka T, Hu J Q 2003 Appl. Phys. Lett. 83 4939
[12] Yoshitaka Taniyasu, Makoto Kasu, Toshiki Makimoto 2006 Nature 441 325
[13] Yoganand S N, Jagannadham K, Karoui A 2002 Vac. Sci.Technol. A 20 1974
[14] Tang Y B, Liu Y Q, Sun C H 2007 Mater. Res. 22 2711
[15] Shen C H, Yang T Z, Xiao C W 2008 Chin. Phys. B 17 2191
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