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The mixed SrF2-CaF2 thin films with the same thickness were deposited by the techniques of resistant evaporation and electron beam evaporation respectively. The physical and infrared optical properties of the thin films were investigated. The optical constants in the infrared region were determined quantitatively which fills the gap of these data. At the same time, we provided a method to obtain gradient index films. We also used the mixed SrF2-CaF2 with a proportion of 1∶1 as the lower index material to deposit multilayer coatings. A broadband antireflection coatings with high optical performance was developed.
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Keywords:
- mixed SrF2-CaF2 thin films /
- surface morphology /
- infrared optical properties /
- broadband antireflection coatings
[1] ［1］Pellicori S F 1984 Thin Solid Films 113 287
[2] ［2］James D T, Andrew R M 1990 Thin Solid Films 191 47
[3] ［3］Evgeny N K, Elena V K, Vadim N P 2004 Proc. SPIE 5506 75
[4] ［4］Gu P F, Zheng Z R, Zhao Y J, Liu Xu 2006 Acta Phy. Sin 55 6459 (in Chinese) ［顾培夫、郑臻荣、赵永江、刘旭 2006 55 6459］
[5] ［5］Chen W L, Gu P F, Wang Y, Zhang Y G, Liu X 2008 Acta Phy. Sin 57 4316 (in Chinese) ［陈为兰、顾培夫、王颖、章岳光、刘旭 2008 57 4316］
[6] ［6］Su W T, Li B, Liu D Q, Zhang F S 2006 Opti. Instrum. 28 150
[7] (in Chinese) ［苏伟涛、李斌、刘定权、张凤山 2006 光学仪器 28 150］
[8] ［7］Jung Y S 2004 Thin Solid Films 467 36
[9] ［8］Mistrik J 2005 Appl. Surf. Sci. 244 431
[10] ［9］Su W T, Li B, Liu D Q, Zhang F S 2007 Acta Phy. Sin. 56 2541 (in Chinese) ［苏伟涛、李斌、刘定权、张凤山 2007 56 2541］
[11] ］Yu T Y, Zhu F R, Liu D Q, Zhang F S 2005 Acta Opt. Sin. 25 171 (in Chinese) ［于天燕、朱福荣、刘定权、张凤山 2005 光学学报 25 171］
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[1] ［1］Pellicori S F 1984 Thin Solid Films 113 287
[2] ［2］James D T, Andrew R M 1990 Thin Solid Films 191 47
[3] ［3］Evgeny N K, Elena V K, Vadim N P 2004 Proc. SPIE 5506 75
[4] ［4］Gu P F, Zheng Z R, Zhao Y J, Liu Xu 2006 Acta Phy. Sin 55 6459 (in Chinese) ［顾培夫、郑臻荣、赵永江、刘旭 2006 55 6459］
[5] ［5］Chen W L, Gu P F, Wang Y, Zhang Y G, Liu X 2008 Acta Phy. Sin 57 4316 (in Chinese) ［陈为兰、顾培夫、王颖、章岳光、刘旭 2008 57 4316］
[6] ［6］Su W T, Li B, Liu D Q, Zhang F S 2006 Opti. Instrum. 28 150
[7] (in Chinese) ［苏伟涛、李斌、刘定权、张凤山 2006 光学仪器 28 150］
[8] ［7］Jung Y S 2004 Thin Solid Films 467 36
[9] ［8］Mistrik J 2005 Appl. Surf. Sci. 244 431
[10] ［9］Su W T, Li B, Liu D Q, Zhang F S 2007 Acta Phy. Sin. 56 2541 (in Chinese) ［苏伟涛、李斌、刘定权、张凤山 2007 56 2541］
[11] ］Yu T Y, Zhu F R, Liu D Q, Zhang F S 2005 Acta Opt. Sin. 25 171 (in Chinese) ［于天燕、朱福荣、刘定权、张凤山 2005 光学学报 25 171］
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