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Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong. Numerical investigation of SiO2 film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica,
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2018, 67(2): 027301.
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2011, 60(1): 016110.
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2010, 59(5): 3523-3530.
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2009, 58(2): 1364-1370.
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2008, 57(3): 1796-1801.
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2008, 57(10): 6631-6635.
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2007, 56(6): 3418-3427.
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2006, 55(8): 4238-4246.
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2005, 54(5): 2394-2398.
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