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Effect of N-doping on the microstructure and properties of amorphous SiC:H diffusion barrier films

Liu Bo Tang Wen-Jin Song Zhong-Xiao Chen Ya-Shao Xu Ke-Wei

Citation:

Effect of N-doping on the microstructure and properties of amorphous SiC:H diffusion barrier films

Liu Bo, Tang Wen-Jin, Song Zhong-Xiao, Chen Ya-Shao, Xu Ke-Wei
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  • Abstract views:  5735
  • PDF Downloads:  837
  • Cited By: 0
Publishing process
  • Received Date:  26 July 2007
  • Accepted Date:  18 September 2008
  • Published Online:  20 March 2009

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