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Effect of substrate constraint on stress-induced cracking of sputtered tungsten thin film

Sun Hao-Liang Song Zhong-Xiao Xu Ke-Wei

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Effect of substrate constraint on stress-induced cracking of sputtered tungsten thin film

Sun Hao-Liang, Song Zhong-Xiao, Xu Ke-Wei
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  • Abstract views:  8218
  • PDF Downloads:  679
  • Cited By: 0
Publishing process
  • Received Date:  20 September 2007
  • Accepted Date:  05 May 2008
  • Published Online:  05 April 2008

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