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Effect of antenna configuration on power transfer efficiency for planar inductively coupled plasmas

Di Xiao-Lian Xin Yu Ning Zhao-Yuan

Citation:

Effect of antenna configuration on power transfer efficiency for planar inductively coupled plasmas

Di Xiao-Lian, Xin Yu, Ning Zhao-Yuan
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  • Abstract views:  8813
  • PDF Downloads:  1561
  • Cited By: 0
Publishing process
  • Received Date:  06 December 2005
  • Accepted Date:  24 January 2006
  • Published Online:  05 May 2006

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