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Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

Ma Xiao-Tao Zheng Wan-Hua Ren Gang Fan Zhong-Chao Chen Liang-Hui

Citation:

Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

Ma Xiao-Tao, Zheng Wan-Hua, Ren Gang, Fan Zhong-Chao, Chen Liang-Hui
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  • Abstract views:  9736
  • PDF Downloads:  2057
  • Cited By: 0
Publishing process
  • Received Date:  31 May 2006
  • Accepted Date:  04 July 2006
  • Published Online:  05 January 2007

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