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Simulation of step response of silane low-temperature pasma(1)

Yang Jing Li Jing-Zhen Sun Xiu-Quan Gong Xiang-Dong

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Simulation of step response of silane low-temperature pasma(1)

Yang Jing, Li Jing-Zhen, Sun Xiu-Quan, Gong Xiang-Dong
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  • Abstract views:  8125
  • PDF Downloads:  485
  • Cited By: 0
Publishing process
  • Received Date:  31 May 2004
  • Accepted Date:  18 November 2004
  • Published Online:  07 July 2005

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