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In Situ Analysis of High Energetic Ion RBS Combined with Low Energetic Ion Sputtering for Thin Films

Liu Bo Jiang Lei Zhou Zhu-ying He Mian-hong Zhao Guo-qing Zong Xiang-fu

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In Situ Analysis of High Energetic Ion RBS Combined with Low Energetic Ion Sputtering for Thin Films

Liu Bo, Jiang Lei, Zhou Zhu-ying, He Mian-hong, Zhao Guo-qing, Zong Xiang-fu
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  • Published Online:  20 January 2000

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