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针对玻璃缺陷在线无损检测的迫切需求，本文报道了一种基于线照明并行谱域光学相干层析成像系统的大视场检测系统. 该系统采用快速面阵CMOS相机，单次拍摄即可获取完整的横截面（B-scan）图像. 基于线照明面阵探测器的并行谱域光学相干层析成像系统，可以同时获取沿线照明方向各位置处的深度分辨信息，避免了横向扫描机构的应用. 研制系统的轴向分辨率为17.9 μm，并行方向上的横向分辨率55.7 μm，扫描方向上的横向分辨率为24.8 μm，轴向扫描速率为128 000 A-scan/s，横向视场为32 mm，空气中成像深度大于6 mm，成像灵敏度达到62 dB以上. 利用研制的线照明并行谱域光学相干层析成像系统，开展了不同类型玻璃表面及其内部缺陷的检测应用研究.For the needs of online nondestructive testing method in glass industry, we have presented a large-range line-field parallel spectral domain optical coherence tomography system. Based on fast area scan CMOS camera, the whole cross-sectional image can be acquired by a single shot. Depth-resolved image at different lateral positions can be acquired simultaneously, without the lateral scanning mechanism. The axial resolution is 17.9 μm, the lateral resolutions in parallel direction and scanning direction are 55.7 μm and 24.8 μm, respectively. The system measurement range is 32 mm in lateral direction and 6 mm in axial direction. At 1 mm axial position, the system sensitivity can reach 62 dB at a rate of 128 000 A-scan/s. By using the present system, application in glass defect inspection has been investigated.
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Keywords:
- optical coherence tomography /
- line-field /
- parallel detection /
- online testing
[1] Huang D, Swanson E A, Lin C P, Schuman J S, Stinson W G, Chang W, Hee M R, Flotte T, Gregory K, Puliafito C A, Fujimoto J G 1991 Science 254 1178
[2] Wojtkowski M, Bajraszewski T, Targowski P, Kowalczyk A 2003 Opt. Lett. 28 1745
[3] Wojtkowski M, Srinivasan V, Ko T, Fujimoto J, Kowalczyk A, Duker J 2004 Opt. Express 12 2404
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[6] Bao W, Ding Z H, Wang C, Mei S T 2013 Acta Phys. Sin. 62 114202(in Chinese) [鲍文, 丁志华, 王川, 梅胜涛 2013 62 114202]
[7] Yang Z Y, Ding Z H, Wang L, Shen Y 2013 Acta Phys. Sin. 62 164204(in Chinese) [颜扬治, 丁志华, 王玲, 沈毅 2013 62 164204]
[8] Jia Y Q, Liang Y M, Zhu X N 2007 Acta Phys. Sin. 56 3861
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[10] Nemeth A, Hannesschläger G, Leiss-Holzinger E, Wiesauer K, Leitner M 2013
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[12] Grajciar B, Pircher M, Fercher A, Leitgeb R 2005 Opt. Express 13 1131
[13] Endo T, Yasuno Y, Makita S, Itoh M, Yatagai T 2005 Opt. Express 13 695
[14] [14 Yasuno Y, Endo T, Makita S, Aoki G, Itoh M, Yatagai T 2006 J. Biomed. Opt. 11 014014
[15] Nakamura Y, Makita S, Yamanari M, Itoh M, Yatagai T, Yasuno Y 2007 Opt. Express 15 7103
[16] Luo Y, Arauz L J, Castillo J E, Barton J K, Kostuk R K 2007 Appl. Opt. 46 8291
[17] Kumar M, Islam M N, Terry F L, Aleksoff C C, Davidson D 2010 Opt. Express 18 22471
[18] Yaqoob Z, Choi W, Oh S, Lue N, Park Y, Fang-Yen C, Feld M S 2009 Opt. Express 17 10681
[19] Grajciar B, Lehareinger Y, Fercher A F, Leitgeb R A 2010 Opt. Express 18 21841
[20] Drexler W, Fujimoto J G 2008 Optical coherence tomography: technology and applications (Berlin: Springer) pp47-72
[21] Zhang K, Kang J U 2010 Opt. Express 18 11772
[22] Yao Z X, Zhong J W, Mao B N, Pan B L 2008 Chin. Phys. B 17 578
[23] Wang C, Tang Z, Fang C, Yu Y J, Mao Y X, Qi B 2011 Chin. Phys. B 20 114218
[24] Dhalla A H, Migacz J V, Izatt J A 2010 Opt. Lett. 35 2305
[25] Graf R N, Brown W J, Wax A 2008 Opt. Lett. 33 1285
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[1] Huang D, Swanson E A, Lin C P, Schuman J S, Stinson W G, Chang W, Hee M R, Flotte T, Gregory K, Puliafito C A, Fujimoto J G 1991 Science 254 1178
[2] Wojtkowski M, Bajraszewski T, Targowski P, Kowalczyk A 2003 Opt. Lett. 28 1745
[3] Wojtkowski M, Srinivasan V, Ko T, Fujimoto J, Kowalczyk A, Duker J 2004 Opt. Express 12 2404
[4] De Boer J F, Cense B, Park B H, Pierce M C, Tearney G J, Bouma B E 2003 Opt. Lett. 28 2067
[5] Wojtkowski M 2010 Appl. Opt. 49 30
[6] Bao W, Ding Z H, Wang C, Mei S T 2013 Acta Phys. Sin. 62 114202(in Chinese) [鲍文, 丁志华, 王川, 梅胜涛 2013 62 114202]
[7] Yang Z Y, Ding Z H, Wang L, Shen Y 2013 Acta Phys. Sin. 62 164204(in Chinese) [颜扬治, 丁志华, 王玲, 沈毅 2013 62 164204]
[8] Jia Y Q, Liang Y M, Zhu X N 2007 Acta Phys. Sin. 56 3861
[9] Stifter D 2007 Appl. Phys. B 88 337
[10] Nemeth A, Hannesschläger G, Leiss-Holzinger E, Wiesauer K, Leitner M 2013
[11] Zuluaga A F, Richards-Kortum R 1999 Opt. Lett. 24 519
[12] Grajciar B, Pircher M, Fercher A, Leitgeb R 2005 Opt. Express 13 1131
[13] Endo T, Yasuno Y, Makita S, Itoh M, Yatagai T 2005 Opt. Express 13 695
[14] [14 Yasuno Y, Endo T, Makita S, Aoki G, Itoh M, Yatagai T 2006 J. Biomed. Opt. 11 014014
[15] Nakamura Y, Makita S, Yamanari M, Itoh M, Yatagai T, Yasuno Y 2007 Opt. Express 15 7103
[16] Luo Y, Arauz L J, Castillo J E, Barton J K, Kostuk R K 2007 Appl. Opt. 46 8291
[17] Kumar M, Islam M N, Terry F L, Aleksoff C C, Davidson D 2010 Opt. Express 18 22471
[18] Yaqoob Z, Choi W, Oh S, Lue N, Park Y, Fang-Yen C, Feld M S 2009 Opt. Express 17 10681
[19] Grajciar B, Lehareinger Y, Fercher A F, Leitgeb R A 2010 Opt. Express 18 21841
[20] Drexler W, Fujimoto J G 2008 Optical coherence tomography: technology and applications (Berlin: Springer) pp47-72
[21] Zhang K, Kang J U 2010 Opt. Express 18 11772
[22] Yao Z X, Zhong J W, Mao B N, Pan B L 2008 Chin. Phys. B 17 578
[23] Wang C, Tang Z, Fang C, Yu Y J, Mao Y X, Qi B 2011 Chin. Phys. B 20 114218
[24] Dhalla A H, Migacz J V, Izatt J A 2010 Opt. Lett. 35 2305
[25] Graf R N, Brown W J, Wax A 2008 Opt. Lett. 33 1285
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