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The stucture of tunable vertical cavity surface emitting laser is obtained based on the micro-nano-mechanical technology. The DBR reflector with Al0.8Ga0.2As sacrificial layer consisted the micro-nano reflector systerm, which combines with the multi-well active region coupled structure. In addition, the structure of micro-nano-optical machine system is not only the DBR reflector, but also serves to tune the wavelength of lasing by the electrostatic force. Good laser characteristics are obtained with continuous tuning ranges over 18.8 nm near 968.8 to 950 nm for 0—7 V tuning bias.
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Keywords:
- vertical cavity surface emitting lasers /
- micro-nano-optical machine system /
- tunable wavelength
[1] Chang-Hasnain C J 2000 IEEE Journal of Selected Topics in Quantum Electronics 6 978
[2] Michael C, Zhou Y, Chang-Hasnain C J 2007 Nature Photonics 1 119
[3] Andrew A, Mario P 2007 Nature Photonics 1 153
[4] Iga K 2000 IEEE Journal of Selected Topics in Quantum Electronics 6 1201
[5] Zhang W L, Pan W, Luo B, Li X F, Zou X H, Wang M Y 2008 Chin. Phys. B 17 1821
[6] Maute G M, Lambkin V, Slattery J D, Justice S A, Hegarty J P, Huyet S P, Corbett G 2008 IEEE Lasers and Electro-Optics Society (LEOS) Annual Meeting 9 498
[7] Guan B L, Guo X, Deng J, Qu H W, Lian P, Dong L M, Chen M, Shen G D 2006 Chin. Phys. 15 2959
[8] Guo X, Shen G D 2008 Chin. Phys. B 17 307
[9] Guan B L, Guo X, Liang T, Gu X L, Deng J, Guo J, Yang H, Lin Q M, Shen G D 2006 Journal of Applied Physics 100 113508
[10] Kyungwon A, Michael S F 1995 Phys. Rev. A 52 1691
[11] Hunt N E J, Schubert E F, Logan R A, Zydzik G J 1992 Appl. Phys. Lett. 61 2287
[12] Kressel H, Lockwood H F, Nicoll F H, Ettenberg M 1973 IEEE Journal of Quantum Electronics 9 383
[13] Hayashi Y, Mukaihara T, Hatori N, Ohnoki N, Matsutani A, Koyama F, Iga K 1995 IEEE Photonics Technology Letters 7 1234
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[1] Chang-Hasnain C J 2000 IEEE Journal of Selected Topics in Quantum Electronics 6 978
[2] Michael C, Zhou Y, Chang-Hasnain C J 2007 Nature Photonics 1 119
[3] Andrew A, Mario P 2007 Nature Photonics 1 153
[4] Iga K 2000 IEEE Journal of Selected Topics in Quantum Electronics 6 1201
[5] Zhang W L, Pan W, Luo B, Li X F, Zou X H, Wang M Y 2008 Chin. Phys. B 17 1821
[6] Maute G M, Lambkin V, Slattery J D, Justice S A, Hegarty J P, Huyet S P, Corbett G 2008 IEEE Lasers and Electro-Optics Society (LEOS) Annual Meeting 9 498
[7] Guan B L, Guo X, Deng J, Qu H W, Lian P, Dong L M, Chen M, Shen G D 2006 Chin. Phys. 15 2959
[8] Guo X, Shen G D 2008 Chin. Phys. B 17 307
[9] Guan B L, Guo X, Liang T, Gu X L, Deng J, Guo J, Yang H, Lin Q M, Shen G D 2006 Journal of Applied Physics 100 113508
[10] Kyungwon A, Michael S F 1995 Phys. Rev. A 52 1691
[11] Hunt N E J, Schubert E F, Logan R A, Zydzik G J 1992 Appl. Phys. Lett. 61 2287
[12] Kressel H, Lockwood H F, Nicoll F H, Ettenberg M 1973 IEEE Journal of Quantum Electronics 9 383
[13] Hayashi Y, Mukaihara T, Hatori N, Ohnoki N, Matsutani A, Koyama F, Iga K 1995 IEEE Photonics Technology Letters 7 1234
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