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在大功率压电超声换能器中设计合理的声子晶体缺陷结构, 可以实现对杂散振动模态的有效抑制. 但当换能器尺寸较大时, 声子晶体缺陷结构对换能器设备辐射面的位移振幅改善情况仍不理想. 如何既能有效抑制有害振动, 又能保证换能器的工作效率, 提高换能器辐射面的位移振幅, 一直都是功率超声领域亟待解决的难题. 研究发现, 声学表面结构可以实现能量的单向传输, 更好地降低能量损耗, 提高能量传输的效率. 基于此, 本文提出了表面与缺陷调控型大功率压电超声换能器的研究. 通过在换能器中设计合理的缺陷和声表面结构, 激发声波的强局域化效应, 实现声学反常透射, 大幅提高换能器纵向辐射声功率. 同时利用数据分析技术, 对声学表面结构和缺陷结构的材料成分、几何结构参数对换能器性能的影响进行分析, 建立大功率压电超声换能器的性能预测模型, 实现换能器的优化设计. 从定量研究的角度出发, 系统性地提出一种大功率压电超声换能器优化设计的新理论和新方法. 仿真和实验证明, 本研究可以提高大功率压电超声换能器的创新设计能力和设计的智能化水平, 使得换能器在大功率应用环境中振动模态更加单一, 大幅提高了辐射面的位移振幅和振幅分布均匀度.
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关键词:
- 声表面和缺陷调控 /
- 大功率压电超声换能器 /
- 局域化效应 /
- 性能预测
Researches have shown that a reasonably designed phononic crystal defect structure in high-power piezoelectric ultrasonic transducers can effectively suppress stray vibration modes. However, when the size of the transducer is large, the improvement of the displacement amplitude of the radiation surface of the transducer device by the phononic crystal defect structure is still not so ideal. How to effectively suppress harmful vibrations while ensuring the operational efficiency of transducers and enhancing the displacement amplitude of their radiating surfaces has always been a challenging problem in the field of power ultrasonics that needs to be solved urgently. Researches have found that acoustic surface structures can achieve unidirectional energy transmission, effectively reduce energy loss, and enhance the efficiency of energy transmission. Based on this, the high-power piezoelectric ultrasonic transducers with surface and defect regulation are investigated in this work. By designing reasonable defects and acoustic surface structures in the transducer, strong localization effects of sound waves can be excited to achieve acoustic anomalous transmission, significantly increasing the longitudinal radiated sound power of the transducer. At the same time, a data analysis technique is used to analyze the influence of material composition and geometric parameters of acoustic surface structure and defect structure on the performance of transducers, and a performance prediction model is established for high-power piezoelectric ultrasonic transducers, ultimately achieving optimized design of transducers. In this study. a new theory and method are systematically proposed for optimizing the design of high-power piezoelectric ultrasonic transducers quantitatively. Simulation and experimental results show that the innovative design capability and intelligent level of high-power piezoelectric ultrasonic transducers can be improved, making the vibration mode of the transducer more singular in high-power application environments, and thus significantly improving the displacement amplitude and amplitude distribution uniformity of the transducer radiation surface. -
Keywords:
- acoustic surface and defect control /
- high-power piezoelectric ultrasonic transducer /
- localization effect /
- performance prediction
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图 1 大功率压电超声换能器的结构和振型图 (a) 结构图; (b)振型图; (c) 辐射面位移分布图
Fig. 1. Structure and vibration mode diagram of high-power piezoelectric ultrasonic transducer: (a) Structural diagram; (b) vibration mode diagram; (c) displacement distribution diagram of radiation surface.
图 2 未优化换能器的辐射面位移振幅
Fig. 2. Radiation surface displacement amplitude of unoptimized transducer.
图 4 优化后的前盖板的结构示意图
Fig. 4. Structural schematic diagram of optimized front cover plate.
图 5 优化后的前盖板的结构示意图(俯视图)
Fig. 5. Structural schematic diagram of optimized front cover plate (top view).
图 6 优化后的前盖板的结构示意图(侧视图)
Fig. 6. Structural schematic diagram of optimized front cover plate (side view).
图 7 表面与缺陷调控型大功率压电超声换能器的结构模型图和振型图 (a) 换能器结构模型图; (b)振型图
Fig. 7. Structural model diagram and vibration mode diagram of surface and defect controlled high-power piezoelectric ultrasonic transducer: (a) Structural model diagram of transducer; (b) vibration mode diagram.
图 8 优化后的换能器和未优化的换能器的辐射面位移振幅对比图
Fig. 8. Comparison of displacement amplitude of radiation surface between optimized and unoptimized transducers.
图 9 三种换能器性能对比图 (a) 辐射面位移振幅和分布均匀度对比图; (b) 总辐射功率对比图
Fig. 9. Comparison chart of three types of transducer performance: (a) Comparison diagram of displacement amplitude and distribution uniformity of radiation surface; (b) comparison chart of total radiated power.
图 10 不同的属性参数对纵向谐振频率f的影响.
Fig. 10. Influences of different attributes parameters on the longitudinal resonance frequency f.
图 12 不同的属性参数对辐射面位移振幅分布Du的影响
Fig. 12. Influences of different attribute parameters on the amplitude distribution Du of radiation surface displacement.
图 13 纵向谐振频率f的仿真值和预测值的对比及相对误差
Fig. 13. Comparison and relative error between simulated and predicted values of longitudinal resonant frequency f.
图 15 辐射面位移振幅分布Du的仿真值和预测值的对比及相对误差
Fig. 15. Comparison and relative error between simulated and predicted values of Du.
图 11 不同的属性参数对辐射面位移振幅平均值Aave的影响
Fig. 11. Influences of different attribute parameters on the average displacement amplitude Aave of the radiation surface.
图 14 辐射面位移振幅平均值Aave的对比及相对误差
Fig. 14. Comparison and relative error of average amplitude Aave of radiation surface displacement.
图 18 输入电阻抗与谐振频率的测量 (a) 未优化的换能器的测量结果; (b) 表面与缺陷调控型换能器的测量结果; (c) 未优化的换能器的仿真导纳曲线图; (d)表面与缺陷调控型换能器的仿真导纳曲线图
Fig. 18. Measurement of input impedance and resonant frequency: (a) Measurement results of an unoptimized transducer; (b) measurement results of surface and defect controlled transducers; (c) simulation admittance curve of unoptimized transducer; (d) simulation admittance curve of surface and defect controlled transducers.
图 19 换能器辐射面位移振幅分布的实验测量 (a) 测量过程; (b) 测量得到的未优化换能器的表面数据; (c) 测量得到的优化后的换能器的表面数据
Fig. 19. Experimental measurement of displacement amplitude distribution of transducer radiation surface: (a) Measurement process; (b) surface data of unoptimized transducers obtained through measurement; (c) the surface data of the optimized transducer obtained through measurement.
表 1 压电超声换能器的材料和几何结构参数
Table 1. Materials and geometric structure parameters of piezoelectric ultrasonic transducer.
部件 材料属性 形状 半径/mm 半径/mm 高/mm 后盖板 AISI 4340 钢 等截面圆柱 31 31 30 压电陶瓷圆环(两片) PZT-4压电陶瓷 等截面圆环 7(内径) 30(外径) 8 前盖板 6063-T83铝 圆台 31(上底) 50(下底) 35 
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表 2 三种换能器性能对比表
Table 2. Performance comparison table of three transducers.
换能器 位移振幅Aave/mm 分布均匀度Du
/%总辐射功率
/mW缺陷结构 0.2180 × 10–3 87.73 0.04818 管柱结构 0.2109 × 10–3 90.56 0.04904 表面与缺陷结构 0.3015 × 10–3 93.56 0.1181 比值(表面与缺陷/缺陷) 1.384 1.066 2.450 比值(表面与缺陷/管柱) 1.430 1.033 2.407
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表 3 纵向谐振频率f的预测模型(单位Hz)
Table 3. Predictive model for longitudinal resonant frequency f of slot structures (Unit: Hz).
A B C D 后盖板表面凹槽厚度w/mm 19015.485 1.544 –0.09065 0.004986 楔形体孔的宽度w1 /mm 19003.333 13.94 –0.4575 –0.02117 正常散射体空气圆柱孔半径r8/mm 21299.902 –36.52 0.000 –50.71 空气圆柱孔的高度h4/mm 20530.792 –202.5 8.669 –0.1261 环状体槽的内半径r7/mm 19015.083 2.116 11.49 3.530
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表 4 辐射面位移振幅平均值Aave的预测模型
Table 4. Prediction model for the average displacement amplitude Aave of the radiation surface.
A B C D 后盖板表面凹槽厚度w/ mm 0.0002939 6.991×10–6 0.000 0.000 楔形体孔的宽度w1/mm 3.048×10–4 –2.717×10–6 3.576×10–7 0.000 正常散射体空气圆柱孔半径r8/mm 6.102×10–4 –1.155×10–4 0.000 2.187×10–6 空气圆柱孔的高度h4/mm 3.063×10–4 –2.397×10–6 1.375×10–7 1.373×10–10 环状体槽的内半径r7/mm 3.005×10–4 –4.852×10–6 2.407×10–5 –6.396×10–6
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表 5 辐射面位移振幅分布均匀度Du的预测模型
Table 5. Prediction model for the uniformity of displacement amplitude distribution Du on the radiation surface.
A B C D 后盖板表面凹槽厚度w/mm 0.9355 –0.0004441 3.130×10–5 4.060×10–7 楔形体孔的宽度w1/mm 0.9798 –0.04139 0.003935 –0.0003165 正常散射体空气圆柱孔半径r8/mm –0.3622 0.4834 0.000 –0.009487 空气圆柱孔的高度h4/mm 0.5726 –0.004406 0.003738 –0.0001257 环状体槽的内半径r7/mm 0.9600 –0.1010 0.05795 –0.01953
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