基于石墨烯用于微弱能量获取的柔性微结构研究

娄利飞; 潘青彪; 吴志华

doi:10.7498/aps.63.158501

摘要

本文首次提出了一种基于石墨烯用于微弱能量获取的柔性基板/石墨烯/ZnO纳米线/石墨烯的柔性微结构. 首先，从理论上进行了该新结构的设计及其工作原理分析；其次，研究了该结构制备过程中的关键工艺，并设计了该结构的制备流程；最后，成功制备了该结构，并进行了相关测试. 最终测试结果表明该结构能够成功输出数百毫伏的电压. 这些理论和实验上的研究为自驱动微纳系统提供了研究基础，同时也对集成微纳系统的实用化发展具有一定的研究意义.

关键词:

Abstract

A novel microstructure of flexible substrate/graphene/ZnO nanowires/graphene multilayer film for harvesting weak energy is for the first time presented as far as we know in this paper. First, the design of this microstructure and its operational principle is discussed theoretically. Next, we study the key technology in the preparation process of this microstructure and carry out the whole preparation process. Finally, the microstructure is successfully achieved and tested. Results show that the output voltage of the microstructure can be up to several hundreds of millivolt. In a word, the theoretical and experimental research of this microstructure provides a basis for self-powered micro-nano systems, and is significant to the practical development of the integrated micro-nano systems.

Keywords:

作者及机构信息

1.
西安电子科技大学微电子学院, 西安 710071

基金项目: 中央高校基本科研业务费专项资金（批准号：K5051225011）和国家自然科学基金重点项目（批准号：61334003）资助的课题.

Authors and contacts

1.
School of Microelectronics, Xidian University, Xi'an 710071, China

Funds: Project supported by the Fundamental Research Funds for the Central Universities of Ministry of Education of China (Grant No.K5051225011), and the Key Program of the National Natural Science Foundation of China(Grant No. 61334003).

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施引文献

[1]
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[21]	Wu H Q, Linghu C Y, Lu H M, Qian H 2013 Chin. Phys. B 22 098106
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[23]	Xue S J, Fang L, LongX M, Lu Y, Wu F, Li W J, Zuo J Q, Zhang S F 2014 Chin. Phys. Lett. 31 028501
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