射频功率对辉光聚合物薄膜结构与光学性质的影响

牛忠彩; 何智兵; 张颖; 韦建军; 廖国; 杜凯; 唐永建

doi:10.7498/aps.61.106804

摘要

采用三倍频射频辉光放电聚合技术,利用低压等离子聚合装置在不同功率条件下制备辉光放电聚合物(GDP)薄膜. 利用表面轮廓仪、Fourier变换红外光谱仪表征所制备薄膜在不同功率下的生长速率和化学结构, 讨论了功率变化对薄膜生长速度和化学结构的影响.利用元素分析仪和紫外可见光谱仪表征GDP薄膜中碳氢原子比和光学性质. 研究表明:薄膜的生长速率随射频功率的增大先增加后减少,功率为40 W时,生长速率可达到0.34 μm/h. 在波长大于500 nm的可见光区, GDP薄膜的光学透过率都在90%以上. GDP薄膜的光学间隙随射频功率的增大先减少后增加,射频功率为50 W时制备GDP薄膜的光学间隙最小.

关键词:

Abstract

Taking advantage of triple radio frequency, hydrocarbon polymer films are fabricated at different powers by the glow discharge polymerization technology. The deposition rates, the chemical structures, the atomic ratios and the optical properties are studied. The thicknesses of glow discharge polymer (GDP) films are measured by the surface profiler technology. The chemical compositions of GDP films are characterized by FT-IR spectra and element analysis. The optical properties of GDP films are investigated by UV-VIS spectra. With RF power increasing from 20 W to 60 W, the deposition rate of GDP films first increases 0.34 μ m/h, then decreases after the RF power reaches 40 W. In visible light area more than 500 nm, the optical transmittances of all GDP films are more than 90%.The optical band gaps of GDP films first decrease, then reaches the minimum at the RF power of 50 W, then increases when the RF power increases from 20 W to 60 W.

Keywords:

作者及机构信息

1.
四川大学原子与分子物理研究所, 成都 610065;

2.
中国工程物理研究院激光聚变研究中心, 绵阳 621900

Authors and contacts

1.
Institute of Atomic and Molecular Physics, Sichuan University, Chengdu 610065, China;

2.
The Centre of Laser Fusion Research, China Academy of Engineering Physics, Mianyang 621900, China

参考文献

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[9]	Chen K C, Cook R C, Huang H 2006 Fusion Science and Technology 49 750
[10]	Wu W D, Luo J S, Huang Y, Zhang Z W 2000 High Power Laser and Particle Beam 5 593 (in Chinese) [吴卫东, 罗江山, 黄勇, 张占文 2000 强激光与粒子束 12 593]
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[14]	Hirakuri K K, Minorikawa T, Friedbacher G 1997 Thin Solid Film 302 5
[15]	Wexler A S 1967 Appl. Spectros. Rev. 1 29
[16]	Easton C D, Jacob M V 2009 Thin Solid Film 517 4402
[17]	Czechowicz D G, Casillo E R, Nikroo A 2002 General Atomics Report GA-A23753
[18]	Ding W Y, Wang H L, Ju D Y, Cai W P 2011 Acta Phys. Sin. 60 028105 (in Chinese) [丁万昱, 王华林, 巨东英, 蔡卫平 2011 60 028105]
[19]	Zeng L G, Liu F M, Zhong F W, Ding P, Cai L G, Zhou C C 2011 Acta Phys. Sin. 60 038203 (in Chinese) [曾乐贵, 刘发民, 钟文武, 丁芃, 蔡鲁刚, 周船仓 2011 60 038203]
[20]	Choi S, Lee K R, Oh S G, Lee S 2001 Appl. Surf. Sci. 247 217
[21]	Liu X H, Wu W D, He Z B, Zhang B L, Wang H B, Cai C Z 2009 High Power Laser and Particle Beam 21 1853 (in Chinese) [刘兴华, 吴卫东, 何智兵, 张宝玲, 王洪斌, 蔡从中 2009 强激光与粒子束 21 1853]
[22]	Wang X, Harris H R, Bouldin K, Temkin H, Gangopadhyay S, Strathman M D, West M 2001 Appl. Phys. 87 621

施引文献

[1]	Zhang J, Chang T Q 2004 Fundaments of the Target Physics for Laser Fusion (Vol.1) (Beijing: Satate Defense Industry Press) pp1-5 (in Chinese) [张钧, 常铁强 2004 激光核聚变靶物理基础 (第一版) (北京:国防工业出版社) 第1-5页]
[2]	Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 4636 (in Chinese) [张宝玲, 何智兵, 吴卫东, 刘兴华, 杨向东 2009 58 6436]
[3]	Mcquillan B W, Nikroo A, Steinman D A, Elsner F H, Czechowicz D G, Hoppe M L, Sixtus M, Miller W J 1996 GA-A22494
[4]	Yan J C, He Z B, Yang Z L, Zhang Y, Tang Y J, Wei J J 2011 Acta Phys. Sin. 60 036501 (in Chinese) [闫建成, 何智兵, 阳志林, 张颖, 唐永建, 韦建军 2011 60 036501]
[5]	Bouquet N A, Cook R, McQuillan B W, Paguio R, Takagi M 2003 Generral Atomic Report GA-A24483
[6]	Alger E, Antipa N, Biesiada T, Bhandarkar S, Castro C, Chen K C, Choate C, Condor A, Dzenitis B, Fair J, Farrell M, Giraldez E, Hamza A, Horner J, Huang H, Johnson M, Kroll J, MorenoK, Montesanti R, Nikroo A, Parham T, Reynolds J, Stadermann M, Suratwala T, Taylor J, Wegner P 2010 Ignition Campaign Target Fabrication, Llnl-ar-459204
[7]	Nikroo A, Castillo E, Hilla D, Greenwood A L 2003 General Atomics Report GA-A24453
[8]	Biener J, Mirkarimi P B, Tringe J W, Baker S L, Wang Y M, Kucheyev S O, Teslich N E, Wu K J, Hamza A V, Wild C, Woerner E, Koidl P, Bruehne K, Fecht H J 2006 Fusion Science and Technology 49 737
[9]	Chen K C, Cook R C, Huang H 2006 Fusion Science and Technology 49 750
[10]	Wu W D, Luo J S, Huang Y, Zhang Z W 2000 High Power Laser and Particle Beam 5 593 (in Chinese) [吴卫东, 罗江山, 黄勇, 张占文 2000 强激光与粒子束 12 593]
[11]	Bauer M, Schwarz-Selinger T, Jacob W 2005 J. Appl. Phys. 98 073302-I
[12]	Jiang X, Beyer W, Reichelt K 1990 J. Appl. Phys. 68 1378
[13]	Li H X, Xu Z, Chen J M, Zhou H T, Liu H W 2005 Acta Phys. Sin. 54 1885 (in Chinese) [李红轩, 徐洮, 陈建敏, 周惠娣, 刘惠文 2005 54 1885]
[14]	Hirakuri K K, Minorikawa T, Friedbacher G 1997 Thin Solid Film 302 5
[15]	Wexler A S 1967 Appl. Spectros. Rev. 1 29
[16]	Easton C D, Jacob M V 2009 Thin Solid Film 517 4402
[17]	Czechowicz D G, Casillo E R, Nikroo A 2002 General Atomics Report GA-A23753
[18]	Ding W Y, Wang H L, Ju D Y, Cai W P 2011 Acta Phys. Sin. 60 028105 (in Chinese) [丁万昱, 王华林, 巨东英, 蔡卫平 2011 60 028105]
[19]	Zeng L G, Liu F M, Zhong F W, Ding P, Cai L G, Zhou C C 2011 Acta Phys. Sin. 60 038203 (in Chinese) [曾乐贵, 刘发民, 钟文武, 丁芃, 蔡鲁刚, 周船仓 2011 60 038203]
[20]	Choi S, Lee K R, Oh S G, Lee S 2001 Appl. Surf. Sci. 247 217
[21]	Liu X H, Wu W D, He Z B, Zhang B L, Wang H B, Cai C Z 2009 High Power Laser and Particle Beam 21 1853 (in Chinese) [刘兴华, 吴卫东, 何智兵, 张宝玲, 王洪斌, 蔡从中 2009 强激光与粒子束 21 1853]
[22]	Wang X, Harris H R, Bouldin K, Temkin H, Gangopadhyay S, Strathman M D, West M 2001 Appl. Phys. 87 621

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