Fabrication and characterization of YBa2Cu3O7–<inline-formula><tex-math id="Z-20210129174424">\begin{document}$_{ \delta}$\end{document}</tex-math><alternatives><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="3-20201291_Z-20210129174424.jpg"/><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="3-20201291_Z-20210129174424.png"/></alternatives></inline-formula> step-edge Josephson junctions on MgO substrate for high-temperature superconducting quantum interference devices

Wang Hong-Zhang; Li Yu-Long; Xu Tie-Quan; Zhu Zi-Qing; Ma Ping; Wang Yue; Gan Zi-Zhao

doi:10.7498/aps.70.20201291

Abstract

The YBa₂Cu₃O_7–δ (YBCO) step-edge Josephson junction on MgO substrate has recently been shown to have important applications in making advanced high-transition temperature (high-T_C) superconducting devices such as high-sensitivity superconducting quantum interference device (SQUID), superconducting quantum interference filter, and THz detector. In this paper, we investigate the fabrication and transport properties of YBCO step-edge junction on MgO substrate. By optimizing the two-stage ion beam etching process, steps on MgO (100) substrates are prepared with an edge angle θ of about 34°. The YBCO step-edge junctions are then fabricated by growing the YBCO thin films with a pulsed laser deposition technique and subsequent traditional photolithography. The resistive transition of the junction shows typical foot structure which is well described by the Ambegaokar-Halperin theory of thermally-activated phase slippage for overdamped Josephson junctions. The voltage-current curves with temperature dropping down to 77 K exhibit resistively shunted junction behavior, and the Josephson critical current density J_C is shown to follow the $(T_{\rm C}-T)^2$ dependence. At 77 K, the J_C of the junction reaches 1.4 × 10⁵ A/cm², significantly higher than the range of 10³–10⁴ A/cm² as presented by other investigators for YBCO step-edge junctions on MgO substrate with comparable θ of 35°–45°. This indicates a rather strong Josephson coupling of the junction, and by invoking the results of YBCO bicrystal junctions showing similar values of J_C, it is tentatively proposed that the presently fabricated junction might be described as an S-s′-S junction with s′ denoting the superconducting region of depressed T_C in the vicinity of the step edge or as an S-N-S junction with N denoting a very thin non-superconducting layer. By incorporating the MgO-based YBCO step-edge junction, high-T_C radio frequency (RF) SQUID is made. The device shows decent voltage-flux curve and magnetic flux sensitivity of 250 $ \text{μ}\Phi_0/{\rm Hz}^{1/2} $ at 1 kHz and 77 K, comparable to the values reported in the literature. To further improve the RF SQUID performance, efforts could be devoted to optimizing the junction parameters such as the junction J_C. By using the YBCO step-edge junction on MgO substrate, high-T_C direct current SQUID could also be developed, as reported recently by other investigators, to demonstrate the potential of MgO-based step-edge junction in making such a kind of device with superior magnetic flux sensitivity.

Keywords:

YBa₂Cu₃O_7–δ /
step-edge junction /
superconducting quantum interference device

Authors and contacts

State Key Laboratory for Mesoscopic Physics, Applied Superconductivity Center, School of Physics, Peking University, Beijing 100871, China

Corresponding author: Wang Yue, yue.wang@pku.edu.cn

Funds: Project supported by the National Key Research and Development Program of China (Grant No. 2017YFC0601900) and the National Natural Science Foundation of China (Grant No. 61571019)

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References

[1]	Clarke J, Braginski A I 2004 The SQUID Handbook (Vol. 1) (Weinheim: Wiley-VCH) pp1−395
[2]	韩昊轩, 张国峰, 张雪, 梁恬恬, 应利良, 王永良, 彭炜, 王镇 2019 68 138501 Google Scholar Han H X, Zhang G F, Zhang X, Liang T T, Ying L L, Wang Y L, Peng W, Wang Z 2019 Acta Phys. Sin. 68 138501 Google Scholar
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[38]	Du J 2003 IEEE Trans. Appl. Supercond. 13 865 Google Scholar

Cited By

图 1 MgO (100)衬底上YBCO薄膜的表征　(a) SEM图; (b)电阻-温度(R-T)曲线, 插图为超导转变区域的放大; (c) 77 K时的伏安(V-I)特性曲线

Figure 1. Characterization of YBCO film on MgO (100) substrate: (a) SEM image; (b) R-T curve with the inset showing a magnified view of the superconducting transition; (c) V-I curve at 77 K.

DownLoad: Full-Size Img PowerPoint

图 2 MgO衬底上台阶的两步法离子束刻蚀制备　(a)第一步刻蚀示意图; (b)第二步刻蚀示意图; (c)第一步刻蚀后测得的台阶轮廓图; (d)第二步刻蚀后测得的台阶轮廓图

Figure 2. Fabrication of step on MgO substrate by using two-stage ion beam etching: (a) Schematic of the first ion beam etching; (b) schematic of the second ion beam etching; (c) step profile after the first etching measured by a stylus profiler; (d) step profile after the second ion beam etching.

DownLoad: Full-Size Img PowerPoint

图 3 台阶的SEM形貌图　(a)台阶断面图; (b)台阶斜视图; (c)刻蚀区域与台阶相对的另外一边衬底的断面图; (d)刻蚀区域与台阶相对的另外一边衬底的斜视图

Figure 3. SEM images of the step: (a) Cross section of the step; (b) oblique view of the step; (c) cross section of the substrate at the other side (opposite to the step) of the defined etching area; (d) oblique view of the substrate at the other side of the defined etching area.

DownLoad: Full-Size Img PowerPoint

图 4 YBCO台阶结的R-T曲线(插图为拖尾区的放大, 其中红线代表A-H理论拟合)

Figure 4. R-T curve of the YBCO step-edge junction on MgO substrate. The inset shows a magnified view of the foot-structure region with the red line being a fit to the A-H theory.

DownLoad: Full-Size Img PowerPoint

图 5 (a) YBCO台阶结的V-I特性曲线; (b)台阶结的J_C随温度的变化, 红线代表S-N-S型约瑟夫森结的理论拟合, 内插图为I_CR_n随温度的变化, 其中菱形所代表的数据取自文献[17]

Figure 5. (a) V-I curves of the YBCO step-edge junction on MgO substrate; (b) temperature dependence of J_C, with the red line being a fit to the $ {\left(1-T/{T}_{\rm{C}}\right)}^{2} $ dependence according to the theory of S-N-S Josephson junction. The inset shows I_CR_n, with data points in diamond taken from the Ref. [17].

DownLoad: Full-Size Img PowerPoint

图 6 YBCO RF SQUID器件的表征　(a)电压-磁通曲线; (b)噪声谱(频率1 kHz时磁通噪声250 $ \text{μ}\Phi_0/{\rm Hz}^{1/2} $, 对应的磁场噪声800 fT/Hz^1/2, 如蓝色虚线所示)

Figure 6. Characterization of the YBCO RF SQUID: (a) Voltage-flux curve; (b) noise spectra, with blue dashed line denoting 800 fT/Hz^1/2 at 1 kHz.

DownLoad: Full-Size Img PowerPoint

map

[1]	Clarke J, Braginski A I 2004 The SQUID Handbook (Vol. 1) (Weinheim: Wiley-VCH) pp1−395
[2]	韩昊轩, 张国峰, 张雪, 梁恬恬, 应利良, 王永良, 彭炜, 王镇 2019 68 138501 Google Scholar Han H X, Zhang G F, Zhang X, Liang T T, Ying L L, Wang Y L, Peng W, Wang Z 2019 Acta Phys. Sin. 68 138501 Google Scholar
[3]	Song C, Xu K, Li H K, Zhang Y R, Zhang X, Liu W X, Guo Q J, Wang Z, Ren W H, Hao J, Feng H, Fan H, Zheng D N, Wang D W, Wang H, Zhu S Y 2019 Science 365 574 Google Scholar
[4]	Xu K, Sun Z H, Liu W X, Zhang Y R, Li H K, Dong H, Ren W H, Zhang P F, Nori F, Zheng D N, Fan H, Wang H 2020 Sci. Adv. 6 eaba4935 Google Scholar
[5]	曹文会, 李劲劲, 钟青, 郭小玮, 贺青, 迟宗涛 2012 61 170304 Google Scholar Cao W H, Li J J, Zhong Q, Guo X W, He Q, Chi Z T 2012 Acta Phys. Sin. 61 170304 Google Scholar
[6]	Du J, Smart K, Li L, Leslie K E, Hanham S M, Wang D H C, Foley C P, Ji F, Li X D, Zeng D Z 2015 Supercond. Sci. Technol. 28 084001 Google Scholar
[7]	Pfeiffer C, Ruffieux S, Jönsson L, Chukharkin M L, Kalaboukhov A, Xie M S, Winkler D, Schneiderman J F 2020 IEEE Trans. Biomed. Eng. 67 1483 Google Scholar
[8]	Hilgenkamp H, Mannhart J 2002 Rev. Mod. Phys. 74 485 Google Scholar
[9]	Hua T, Yu M, Geng H F, Xu W W, Lu Y P, Shi J X, Shen W K, Wu J B, Wang H B, Chen J, Wu P H 2018 Supercond. Sci. Technol. 31 085009 Google Scholar
[10]	Kleiner R, Wang H B 2019 J. Appl. Phys. 126 171101 Google Scholar
[11]	Liu Z H, Wei Y K, Wang D, Zhang C, Ma P, Wang Y 2014 Chin. Phys. B 23 097401 Google Scholar
[12]	郑鹏, 刘政豪, 魏玉科, 张辰, 张炎, 王越, 马平 2014 63 198501 Google Scholar Zheng P, Liu Z H, Wei Y K, Zhang C, Zhang Y, Wang Y, Ma P 2014 Acta Phys. Sin. 63 198501 Google Scholar
[13]	Chambers S A 2000 Surf. Sci. Rep. 39 105 Google Scholar
[14]	Tanaka S, Kado H, Matsuura T, Itozaki H 1993 IEEE Trans. Appl. Supercond. 3 2365 Google Scholar
[15]	Foley C P, Mitchell E E, Lam S K H, Sankrithyan B, Wilson Y M, Tilbrook D L, Morris S J 1999 IEEE Trans. Appl. Supercond. 9 4281 Google Scholar
[16]	Mitchell E E, Foley C P 2010 Supercond. Sci. Technol. 23 065007 Google Scholar
[17]	Du J, Hellicar A D, Li L, Hanham S M, Macfarlane J C, Leslie K E, Nikolic N, Foley C P, Greene K J 2009 Supercond. Sci. Technol. 22 114001 Google Scholar
[18]	Kaczmarek L L, Ijsselsteijn R, Zakosarenko V, Chwala A, Meyer H G, Meyer M, Stolz R 2018 IEEE Trans. Appl. Supercond. 28 1601805 Google Scholar
[19]	Faley M I, Poppe U, Dunin-Borkowski R E, Schiek M, Boers F, Chocholacs H, Dammers J, Eich E, Shah N J, Ermakov A B, Slobodchikov V Y, Maslennikov Y V, Koshelets V P 2013 IEEE Trans. Appl. Supercond. 23 1600705 Google Scholar
[20]	Wang H Z, Li Y L, Wang Y, Gan Z Z 2020 Physica C 569 1353587 Google Scholar
[21]	高吉, 杨涛, 马平, 戴远东 2010 59 5044 Google Scholar Gao J, Yang T, Ma P, Dai Y D 2010 Acta Phys. Sin. 59 5044 Google Scholar
[22]	Proyer S, Stangl E, Borz M, Hellebrand B, Bäuerle D 1996 Physica C 257 1 Google Scholar
[23]	Ando Y, Segawa K 2002 Phys. Rev. Lett. 88 167005 Google Scholar
[24]	Faley M I, Slobodchikov V Y, Maslennikov Y V, Koshelets V P, Dunin-Borkowski R E 2016 IEEE Trans. Appl. Supercond. 26 1600404 Google Scholar
[25]	Mitsuzuka T, Yamaguchi K, Yoshikawa S, Hayashi K, Konishi M, Enomoto Y 1993 Physica C 218 229 Google Scholar
[26]	Foley C P, Lam S, Sankrithyan B, Wilson Y, Macfarlane J C, Hao L 1997 IEEE Trans. Appl. Supercond. 7 3185 Google Scholar
[27]	Yamaguchi K, Yoshikawa S, Takenaka T, Fujino S, Hayashi K, Mitsuzuka T, Suzuki K, Enomoto Y 1994 IEICE Trans. Electron. E77-C 1218
[28]	Gross R, Chaudhari P, Dimos D, Gupta A, Koren G 1990 Phys. Rev. Lett. 64 228 Google Scholar
[29]	张骏, 张辰, 张焱, 马平, 王越 2015 低温 37 423 Google Scholar Zhang J, Zhang C, Zhang Y, Ma P, Wang Y 2015 Chin. J. Low Temp. Phys. 37 423 Google Scholar
[30]	Ambegaokar V, Halperin B I 1969 Phys. Rev. Lett. 22 1364 Google Scholar
[31]	Barone A, Paterno G 1982 Physics and Applications of the Josephson Effect (New York: Wiley) pp121−197
[32]	Dimos D, Chaudhari P, Mannhart J 1990 Phys. Rev. B 41 4038 Google Scholar
[33]	Siegel M, Herrmann K, Copetti C, Jia C L, Kabius B, Schubert J, Zander W, Braginski A I, Seidel P 1993 IEEE Trans. Appl. Supercond. 3 2369 Google Scholar
[34]	Herrmann K, Kunkel G, Siegel M, Schubert J, Zander W, Braginski A I, Jia C L, Kabius B, Urban K 1995 J. Appl. Phys. 78 1131 Google Scholar
[35]	Redwing R D, Hinaus B M, Rzchowski M S, Heinig N F, Davidson B A, Nordman J E 1999 Appl. Phys. Lett. 75 3171 Google Scholar
[36]	Steel D G, Hettinger J D, Yuan F, Miller D J, Gray K E, Kang J H, Talvacchio J 1996 Appl. Phys. Lett. 68 120 Google Scholar
[37]	Kupriyanov M Yu, Likharev K K 1991 IEEE Trans. Magn. 27 2460 Google Scholar
[38]	Du J 2003 IEEE Trans. Appl. Supercond. 13 865 Google Scholar

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Fabrication and characterization of YBa₂Cu₃O_7–$_{ \delta}$ step-edge Josephson junctions on MgO substrate for high-temperature superconducting quantum interference devices

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Corresponding author: Wang Yue, yue.wang@pku.edu.cn

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Fabrication and characterization of YBa2Cu3O7–$_{ \delta}$ step-edge Josephson junctions on MgO substrate for high-temperature superconducting quantum interference devices

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Corresponding author: Wang Yue, yue.wang@pku.edu.cn

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Fabrication and characterization of YBa₂Cu₃O_7–$_{ \delta}$ step-edge Josephson junctions on MgO substrate for high-temperature superconducting quantum interference devices