Review on superconducting transition edge sensor based single photon detector

Zhang Qing-Ya; Dong Wen-Hui; He Gen-Fang; Li Tie-Fu; Liu Jian-She; Chen Wei

doi:10.7498/aps.63.200303

Abstract

Over the past decade, there have been increasing demand on and interest in high performance single photon detectors in many new applications in quantum information technology. Compared with conventional single photon detectors, superconducting transition edge sensor (TES) based single photon detectors have great advantages in the performance of detection efficiency, energy resolution, photon number resolving capability, dark count rate, etc. They have been successfully used in quantum optics experiments and quantum key distribution systems, and they will play a more important role in the research field of quantum information science and technology. In this paper we review the operating principle, fabrication process, performance, measurement system and the research progress on superconducting TES based single photon detectors.

Keywords:

Authors and contacts

1.
Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, China;
2.
Institute of Microelectronics, Department of Micro/Nanoelectronics, Tsinghua University, Beijing 100084, China
Funds: Project supported by the National Basic Research Program of China (Grant No. 2011CBA00304) and the Tsinghua University Initiative Scientific Research Program, China (Grant No. 20131089314).

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[62]
[63]
[64]	Zhang Q, He G, Dong W, Wang T, Chen J, Liu J, Li T, Zhou X, Chen W Proceeding of 10th International Workshop On Low Temperature Electronics Paris, France, October 14-17, 2013 p70
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[66]
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[68]	Zhang Q, Wang T, Liu J, Dong W, He G, Li T, Zhou X, Chen W 2014 Chin. Phys. B 23 118502
[69]
[70]	Wellstood F C, Urbina C, Clarke J 1994 Phys. Rev. B 49 5942
[71]
[72]	Calkins B, Lita A E, Fox A E, Nam S W 2011 Appl. Phys. Lett. 99 241114
[73]
[74]	Fukuda D, Damayanthi R M T, Yoshizawa A, Zen N, Takahashi H, Amemiya K, Ohkubo M 2007 IEEE Trans. Appl. Supercond. 17 259
[75]
[76]
[77]	Lita A E, Calkins B, Pellochoud L A, Miller A J, Nam S W 2009 AIP Conf. Proc. 1185 351
[78]	Rajteri M, Taralli E, Portesi C, Monticone E, Beyer J 2009 Metrologia 46 S283
[79]
[80]	Martinis J M, Hilton G C, Irwin K D, Wollman D A 2000 Nucl. Instr. Meth. A 444 23
[81]
[82]
[83]	Taralli E, Portesi C, Rocci R, Rajteri M, Monticone E 2009 IEEE Trans. Appl. Supercond. 19 493
[84]
[85]	Lita A E, Rosenberg D, Nam S, Miller A J, Balzar D, Kaatz L M, Schwall R E 2005 IEEE Trans. Appl. Supercond. 15 3528
[86]
[87]	Morooka T, Tanaka K, Chinone K 2002 IEEE Trans. Appl. Supercond. 12 1866
[88]
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[91]	Lolli L 2012 Ph. D. Dissertation (Torino: Istituto Nazionale di Ricerca Metrologica)
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[93]	Zhang Q Y 2014 Ph. D. Dissertation (Beijing: Tsinghua University) (in Chinese) [张青雅 2014 博士学位论文 (北京: 清华大学)]
[94]
[95]	Lolli L, Taralli E, Rajteri M, Numata T, Fukuda D 2013 IEEE Trans. Appl. Supercond. 23 2100904
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[97]	Fukuda D, Fujii G, Numata T, Yoshizawa A, Tsuchida H, Fujino H, Ishii H, Itatani T, Inoue S Zama T 2009 Metrologia 46 S288
[98]
[99]
[100]	Rosenberg D, Lita A E, Miller A J, Nam S, Schwall R E 2005 IEEE Trans. Appl. Supercond. 15 575
[101]	Rosenberg D, Nam S W, Miller A J, Salminen A, Grossman E, Schwall R E, Martinis J M 2004 Nucl. Instr. Meth. A 520 537
[102]
[103]
[104]	Rosenberg D, Lita A E, Miller A J, Nam S W 2005 Phys. Rev. A 71 061803
[105]
[106]	Lita A E, Calkins B, Pellouchoud L A, Miller A J, Nam S 2010 Proc. SPIE 7681 76810D
[107]
[108]	Damayanthi R M T, Fukuda D, Takahashi H, Ohkubo M, Ohno M 2008 J. Low. Temp. Phys. 151 46
[109]	Marsili F, Verma V B, Stern J A, Harrington S, Lita A E, Gerrits T, Vayshenker I, Baek B, Shaw M D, Mirin R P, Nam S W 2013 Nature Photon. 7 210
[110]
[111]
[112]	Fukuda D, Fujii G, Yoshizawa A, Tsuchida H, Damayanthi R M T, Takahashi H, Inoue S, Ohkubo M 2008 J. Low. Temp. Phys. 151 100
[113]	Lolli L, Taralli E, Portesi C, Alberto D, Rajteri M, Monticone E 2011 IEEE Trans. Appl. Supercond. 21 215
[114]

Cited By

[1]	Irwin K D, Hilton G C 2005 Topics Appl. Phys. 99 63
[2]	Irwin K D 1995 Appl. Phys. Lett. 66 1998
[3]
[4]	Lee A T, Richards P L, Nam S W, Cabrera B, Irwin K D 1996 Appl. Phys. Lett. 69 1801
[5]
[6]	Ali Z A, Drury O B, Cunningham M F, Chesser J M, Barbee T W, Friedrich S 2005 IEEE Trans. Appl. Supercond. 15 526
[7]
[8]
[9]	O'Brient R, Edwards J, Arnold K, Engargiola G, Holzapfel W, Lee A T, Myers M, Quealy E, Rebeiz G, Paul Richards, Spieler H, Tran H 2008 Proc.f SPIE 7020 70201H
[10]	Chervenak J A, Irwin K D, Grossman E N, Martinis J M, Reintsema C D, Huber M E 1999 Appl. Phys. Lett. 74 4043
[11]
[12]
[13]	Lanting T M, Cho H M, Clarke J, Holzapfel W L, Lee A T, Lueker M, Richards P L, Dobbs M A, Spieler H, Smith A 2005 Appl. Phys. Lett. 86 112511
[14]	Suzuki A, Arnold K, Edwards J, Engargiola G, Ghribi A, Holzapfel W, Lee A, Meng X, Myers M, O'Brient R, Quealy E, Rebeiz G, Richards P 2012 J. Low. Temp. Phys. 167 852
[15]
[16]	Bonetti J A, Turner A D, Kenyon M, LeDuc H G, Brevik J A, Orlando A, Trangsrud A, Sudiwala R, Nguyen H T, Day P K, Bock J J, Golwala S R, Kovac J M, Jones W C, Kuo C L 2011 IEEE Trans. Appl. Supercond. 21 219
[17]
[18]
[19]	Bennett D A, Horansky R D, Schmidt D R, Hoover A S, et al. 2012 Rev. Sci. Instrum. 83 093113
[20]
[21]	Cabrera B, Clarke R M, Colling P, Miller A J, Nam S, Romani R W 1998 Appl. Phys. Lett. 73 735
[22]
[23]
[24]	Lolli L, Taralli E, Rajteri M 2012 J. Low. Temp. Phys. 167 803
[25]	Chang J T, Wu L A 2003 Acta Phys. Sin. 52 1132 (in Chinese) [常君弢, 吴令安 2003 52 1132]
[26]
[27]
[28]	Wang J D, Wu Z H, Zhang B, Wei Z J, Liao C J, Liu S H 2008 Acta Phys. Sin. 57 5620 (in Chinese) [王金东, 吴祖恒, 张兵, 魏正军, 廖常俊, 刘颂豪 2008 57 5620]
[29]	Lolli L, Taralli E, Portesi C, Monticone E, Rajteri M 2013 Appl. Phys. Lett. 103 041107
[30]
[31]	Miller A J, Lita A E, Calkins B, Vayshenker I, Gruber S M, Nam S W 2011 Opt. Express 19 9102
[32]
[33]
[34]	Fukuda D, Gujii G, Numata T, Amemiya K, Yoshizawa A, Tsuchida H, Fujino H, Ishii H, Itatani T, Inoue S, Zama T 2011 Opt. Express 19 870
[35]	Fukuda D, Fujii G, Numata T, Amemiya K, Yoshizawa A, Tsuchida H, Fujino H, Ishii H, Itatani T, Inoue S, Zama T 2011 IEEE Trans. Appl. Supercond. 21 241
[36]
[37]	Miller A J, Nam S W, Martinis J M 2003 Appl. Phys. Lett. 83 791
[38]
[39]	Nam S, Miller A J, Rosenberg D 2004 Nucl. Instr. and Meth. A 520 523
[40]
[41]
[42]	Hadfield R H 2009 Nature Photon 3 696
[43]	Hiskett P A, Rosenberg D, Peterson C G, Hughes R J, Nam S, Lita A E, Miller A J, Nordholt J E 2006 New J. Phys. 8 193
[44]
[45]	Rosenberg D, Nam S W, Hiskett P A, Peterson C G, Hughes R J, Nordholt J E, Lita A E, Miller A J 2006 Appl. Phys. Lett. 88 021108
[46]
[47]	Namekata N, Takahashi Y, Fujii G, Fukuda D, Kurimura S, Inoue S 2010 Nature Photon. 4 655
[48]
[49]	Tsujino K, Fukuda D, Fujii G, Inoue S, Fujiwara M, Takeoka M, Sasaki M 2010 Opt. Express 18 8107
[50]
[51]	Jiang Y, Jin B B, Xu W W, Kang L, Chen J, Wu P H 2012 Sci. China Inf. Sci. 55 64
[52]
[53]
[54]	Shen X F, Yang X Y, You L X 2010 Chin. Phys. Lett. 27 087404
[55]
[56]	Zhang L B, Kang L, Chen J, Zhao Q Y, Jia T, Xu W W, Cao C H, Jin B B, Wu P H 2011 Acta Phys. Sin. 60 038501 (in Chinese) [张蜡宝, 康琳, 陈健, 赵清源, 郏涛, 许伟伟, 曹春海, 金飚兵, 吴培亨 2011 60 038501]
[57]	Zhou Y, Zhang L B, Jia T, Zhao Q Y, Gu M, Qiu J, Kang L, Chen J, Wu P H 2012 Acta Phys. Sin. 61 208501 (in Chinese) [周渝, 张蜡宝, 郏涛, 赵清源, 顾敏, 邱健, 康琳, 陈健, 吴培亨 2012 61 208501]
[58]
[59]
[60]	Zhou P J, Wang Y W, Wei L F 2014 Acta Phys. Sin. 63 070701 (in Chinese) [周品嘉, 王轶文, 韦联福 2014 63 070701]
[61]	Zhang Q, Dong W, Wang T, Chen J, Liu J, Li T, Zhou X, Chen W 2014 Chin. J. Low. Temp. Phys. 36 7
[62]
[63]
[64]	Zhang Q, He G, Dong W, Wang T, Chen J, Liu J, Li T, Zhou X, Chen W Proceeding of 10th International Workshop On Low Temperature Electronics Paris, France, October 14-17, 2013 p70
[65]	Zhang Q, Liu J, Dong W, Wang T, He G, Li T, Zhou X, Chen W 2014 Chin. Sci. Bull. 59 2292
[66]
[67]
[68]	Zhang Q, Wang T, Liu J, Dong W, He G, Li T, Zhou X, Chen W 2014 Chin. Phys. B 23 118502
[69]
[70]	Wellstood F C, Urbina C, Clarke J 1994 Phys. Rev. B 49 5942
[71]
[72]	Calkins B, Lita A E, Fox A E, Nam S W 2011 Appl. Phys. Lett. 99 241114
[73]
[74]	Fukuda D, Damayanthi R M T, Yoshizawa A, Zen N, Takahashi H, Amemiya K, Ohkubo M 2007 IEEE Trans. Appl. Supercond. 17 259
[75]
[76]
[77]	Lita A E, Calkins B, Pellochoud L A, Miller A J, Nam S W 2009 AIP Conf. Proc. 1185 351
[78]	Rajteri M, Taralli E, Portesi C, Monticone E, Beyer J 2009 Metrologia 46 S283
[79]
[80]	Martinis J M, Hilton G C, Irwin K D, Wollman D A 2000 Nucl. Instr. Meth. A 444 23
[81]
[82]
[83]	Taralli E, Portesi C, Rocci R, Rajteri M, Monticone E 2009 IEEE Trans. Appl. Supercond. 19 493
[84]
[85]	Lita A E, Rosenberg D, Nam S, Miller A J, Balzar D, Kaatz L M, Schwall R E 2005 IEEE Trans. Appl. Supercond. 15 3528
[86]
[87]	Morooka T, Tanaka K, Chinone K 2002 IEEE Trans. Appl. Supercond. 12 1866
[88]
[89]	Lamas-Linares A, Calkins B, Tomlin N A, Gerrits T, Lita A E, Beyer J, Mirin R P, Nam S W 2013 Appl. Phys. Lett. 102 231117
[90]
[91]	Lolli L 2012 Ph. D. Dissertation (Torino: Istituto Nazionale di Ricerca Metrologica)
[92]
[93]	Zhang Q Y 2014 Ph. D. Dissertation (Beijing: Tsinghua University) (in Chinese) [张青雅 2014 博士学位论文 (北京: 清华大学)]
[94]
[95]	Lolli L, Taralli E, Rajteri M, Numata T, Fukuda D 2013 IEEE Trans. Appl. Supercond. 23 2100904
[96]
[97]	Fukuda D, Fujii G, Numata T, Yoshizawa A, Tsuchida H, Fujino H, Ishii H, Itatani T, Inoue S Zama T 2009 Metrologia 46 S288
[98]
[99]
[100]	Rosenberg D, Lita A E, Miller A J, Nam S, Schwall R E 2005 IEEE Trans. Appl. Supercond. 15 575
[101]	Rosenberg D, Nam S W, Miller A J, Salminen A, Grossman E, Schwall R E, Martinis J M 2004 Nucl. Instr. Meth. A 520 537
[102]
[103]
[104]	Rosenberg D, Lita A E, Miller A J, Nam S W 2005 Phys. Rev. A 71 061803
[105]
[106]	Lita A E, Calkins B, Pellouchoud L A, Miller A J, Nam S 2010 Proc. SPIE 7681 76810D
[107]
[108]	Damayanthi R M T, Fukuda D, Takahashi H, Ohkubo M, Ohno M 2008 J. Low. Temp. Phys. 151 46
[109]	Marsili F, Verma V B, Stern J A, Harrington S, Lita A E, Gerrits T, Vayshenker I, Baek B, Shaw M D, Mirin R P, Nam S W 2013 Nature Photon. 7 210
[110]
[111]
[112]	Fukuda D, Fujii G, Yoshizawa A, Tsuchida H, Damayanthi R M T, Takahashi H, Inoue S, Ohkubo M 2008 J. Low. Temp. Phys. 151 100
[113]	Lolli L, Taralli E, Portesi C, Alberto D, Rajteri M, Monticone E 2011 IEEE Trans. Appl. Supercond. 21 215
[114]

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