Review on stretchable and flexible inorganic electronics

Feng Xue; Lu Bing-Wei; Wu Jian; Lin Yuan; Song Ji-Zhou; Song Guo-Feng; Huang Yong-Gang

doi:10.7498/aps.63.014201

Abstract

In order to meet the further demand of the next-generation electronic devices in the transplantable, lightweight and portable performances, flexible and stretchable inorganic electronics attract much more attention in both industry and academia in recent years. Compared to organic electronics, stretchable and flexible inorganic electronics are fabricated with the integrated structures of inorganic components on complaint substrates, which own the stretchability and flexibility via mechanical design. Thus stretchable and flexible inorganic electronics have the high electron mobility and excellent conformability to non-planar environment subjected to large deformation. This paper reviews the recent progress on principle, design based on mechanics, integration based on transfer printing and the reliability analysis of stretchable and flexible inorganic electronics. Finally, the prospective is also described for future application in bioengineering and medicine.

Keywords:

Authors and contacts

1.
AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China;
2.
Center for Mechanics and Materials, Tsinghua University, Beijing 100084, China;
3.
State Key Laboratory of Electronic Thin films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054, China;
4.
Department of Mechanical and Aerospace Engineering, University of Miami, Miami, Florida 33146, USA;
5.
Institute of Semiconductor, Chineses Academy of Science, Beijing 100083, China;
6.
Department of Civil and Environmental Engineering and Department of Mechanical Engineering, Northwestern University, Evanston, IL 60208, USA
Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 11320101001, 10820101048, 11222220, 10902059, 11372272), and the National Laboratory of Information Science and Technology of Tsinghua University.

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Cited By

[1]	Briseno A L, Tseng R J, Ling M M, Falcao E H L, Yang Y, Wudl F, Bao Z 2006 Adv. Mater. 18 2320
[2]	Khang D Y, Jiang H Q, Huang Y, Rogers J A 2006 Science 311 208
[3]	Reuss R H, Chalamala B R, Moussessian A, Kane M G, Kumar A, Zhang D C, Rogers J A, Hatalis M, Temple D, Moddel G, Eliasson B J, Estes M J, Kunze J, Handy E S, Harmon E S, Salzman D B, Woodall J M, Ashraf Alan M, Murthy J Y, Jacobsen S C, Olivier M, Markus D, Campbell P M, Snow E 2005 IEEE 93 1239
[4]	Crone B, Dodabalapur A, Lin Y Y, Filas R W, Bao Z, LaDuca A, Sarpeshkar R, Katz H E, Li W 2000 Nature 403 521
[5]	Forrest S R 2004 Nature 428 911
[6]	McAlpine M C, Ahmad H, Wang D, Heath J R 2007 Nat. Mater. 6 379
[7]	Baca A J, Ahn J H, Sun Y G, Meitl M A, Menard E, Kim H S, Choi W M, Kim D H, Huang Y, Rogers J A 2008 Angew. Chem. Int. Ed. 47 5524
[8]	Sekitani T, Noguchi Y, Hata K, Fukushima T, Aida T, Someya T 2008 Science 321 1468
[9]	Sekitani T, Nakajima H, Maeda H, Fukushima T, Aida T, Hata K, Someya T 2009 Nat. Mater. 8 494
[10]	Guter W, Schone J, Philipps S P, Steiner M, Siefer G, Wekkeli A, Welser E, Oliva E, Bett A W, Dimroth F 2009 Appl. Phys. Lett. 94 223504
[11]	Nicholson P G, Castro F A 2010 Nanotechnology 21 492001
[12]	Park S, Xiong Y, Kim R H, Elvikis P, Meitl M, Kim D H, Wu J, Yoon J, Yu C J, Liu Z, Huang Y, Hwang K C, Ferreira P, Li X L, Choquette K, Rogers J A 2009 Science 325 977
[13]	Kim H S, Brueckner E, Song J, Li Y H, Kim S, Lu C F, Sulkin J, Choquette K, Huang Y H, Nuzzo R G, Rogers J A 2011 Proc. Natl. Acad. Sci. USA 108 10072
[14]	Chen G, Craven M, Kim A, Munkholm A, Watanabe S, Camras M, Götz W, Steranka F 2008 Phys. Status.Solidi. A 205 1086
[15]	Kim S O, Lee K H, Kim G Y, Seo J H, Kim Y K, Yoon S S 2010 Synth. Met. 160 1259
[16]	Kim D H, Ahn J H, Choi W M, Kim H S, Kim T H, Song J, HuangY, Liu Z, Lu C, Rogers J A 2008 Science 320 507
[17]	Ko H C, Stoykovich M P, Song J, Malyarchuk V, Choi W M, Yu C J, Geddes J B Ⅲ, Xiao J, Wang S, Huang Y, Rogers J A 2008 Nature 454 748
[18]	Kim D H, Viventi J, Amsden J J, Xiao J, Vigeland L, Kim Y S, Blanco J A, Panilaitis B, Frechette E S, Contreras D, Kaplan D L, Omenetto F G, Huang Y, Hwang K C, Zakin M R, Litt B, Rogers J A 2010 Nat. Mater. 9 511
[19]	Yeo W H, Kim Y S, Lee J, Ameen A, Shi L, Li M, Wang S, Ma R, Jin S H, Kang Z, Huang Y, Rogers J A 2013 Adv. Mater. 25 2773
[20]	Kim D H, Lu N, Ma R, Kim Y S, Kim R H, Wang S, Wu J, Won S M, Tao H, Islam A, Yu K J, Kim T, Chowdhury R, Ying M, Xu L Z, Li M, Chung H J, Keum H, McCormick M, Liu P, Zhang Y W, Omenetto F G, Huang Y, Coleman T, Rogers J A 2011 Science 333 838
[21]	Kim D H, Lu N, Ghaffari R, Kim Y S, Lee S P, Xu L Z, Wu J, Kim R H, Song J, Liu Z, Viventi J, Graff B D, Elolampi B, Mansour M, Slepian M J, Huang S, Moss J D, Won S M, Huang Y, Litt B, Rogers J A 2011 Nat. Mater. 10 316
[22]	Xu S, Zhang Y H, Cho J, Lee J, Huang X, Jia L, Fan J A, Su Y, Su J, Zhang H, Cheng H, Lu B, Yu C J, Chuang C, Kim T, Song T, Shigeta K, Kang S, Dagdeviren C, Petrov I, Braun P V, Huang Y, Paik U, Rogers J A 2013 Nat. Commun. 2553 1
[23]	Chen X, Hutchinson J W 2004 J. Appl. Mech. 71 597
[24]	Huang Z Y, Hong W, Suo Z 2005 J. Mech. Phys. Solids 532 101
[25]	Li C R, Cao Z X, Chen X 2008 Physics 37 215 (in Chinese) [李超荣, 曹则贤, 陈曦 2008 物理 37 215]
[26]	Zhang H W, Hong L, Wang J B 2007 Acta Phys. Sin. 56 1506 (in Chinese) [张洪武, 王磊, 王晋宝 2007 56 1506]
[27]	Liu P S 2010 Acta Phys. Sin. 59 (in Chinese) [刘培生 2010 59 8801]
[28]	Jiang H, Khang D Y, Song J, Sun Y, Huang Y, Rogers J A 2007 Proc. Natl. Acad. Sci. USA 104 15607
[29]	Jiang H, Sun Y, Rogers J A, Huang Y 2008 Int. J. Solids. Struct. 45 2014
[30]	Song J, Jiang H, Choi W M, Khang D Y, Huang Y, Rogers J A 2008 J. Appl. Phys. 103 014303
[31]	Song J, Jiang H, Liu Z, Khang D Y, Huang Y, Rogers J A, Lu C, Koh C G 2008 Int. J. Solids Struct. 45 3107
[32]	Song J, Jiang H, Huang Y, Rogers J A 2009 J. Vac. Sci. Technol. A 27 1109
[33]	Meitl M A, Zhu Z T, Kumar V, Lee K J, Feng X, Huang Y, Adesida I, Nuzzo R G, Rogers J A 2006 Nat. Mater. 5 33
[34]	Kim D H, Song J, Choi W M, Kim H S, Kim R H, Liu Z, Huang Y, Hwang K C, Zhang Y W, Rogers J A 2008 Proc. Natl. Acad. Sci. USA 105 18675
[35]	Yoon J, Baca A J, Park S, Paulius E, Geddes J B Ⅲ, Li L, Kim R H, Xiao J, Wang S, Kim T H, Motala M J, Ahn B Y, Duoss E B, Lewis J A, Nuzzo R G, Ferreira P M, Huang Y, Rockett A, Rogers J A 2008 Nat. Mater. 7 907
[36]	Kim D H, Kim Y S, Wu J, Liu Z, Song J, Kim H S, Huang Y, Hwang K C, Rogers J A 2009 Adv. Mater. 21 3703
[37]	Wagner S, Lacour S P, Hsu P H I, Sturm J C, Suo Z G 2003 61st Device Research Conf. Digest, IEEE 195
[38]	Lacour S P, Huang Z Y, Suo Z G, Wagner S 2003 Appl. Phys. Lett. 82 2404
[39]	Jones J, Lacour S P, Wagner S, Suo Z G 2004 J. Vac. Sci. Technol. A 22 1723
[40]	Lacour S P, Jones J, Wagner S, Li T, Suo Z G 2005 P. IEEE. 93 1459
[41]	Ko H C, Shin G, Wang S, Stoykovich M P, Lee J W, Kim D H, Ha J S, Huang Y, Hwang K C, Rogers J A 2009 Small 5 2703
[42]	Kim D H, Xiao J, Song J, Huang Y, Rogers J A 2010 Adv. Mater. 22 2108
[43]	Su Y, Wu J, Fan Z, Hwang K. C, Song J, Huang Y, Rogers J A 2012 J. Mech. Phys. Solids 60 487
[44]	Song J, Huang Y, Xiao J, Wang S, Hwang KC, Ko H C, Kim D H, Stoykovich M P, Rogers J A 2009 J. Appl. Phy. 105 123516
[45]	Lee J, Wu J, Shi M, Yoon J, Park S, Li M, Liu Z, Huang Y, Rogers J A 2011 Adv. Mater. 23 986
[46]	Lee J, Wu J, Ryu J H, Liu Z, Meitl M, Zhang Y W, Huang Y, Rogers J A 2012 Small 8 1851
[47]	Menard E, Lee K J, Khang D Y, Nuzzo R G, Rogers J A 2004 Appl. Phys. Lett. 84 5398
[48]	Ahn J H, Kim H S, Lee K J, Jeon S, Kang S J, Sun Y, Nuzzo R G, Rogers J A 2006 Science 314 1754
[49]	Baca A J, Ahn J H, Sun Y, Meitl M A, Menard E, Kim H S, Choi W M, Kim D H, Huang Y, Rogers J A 2008 Angew. Chem. Int. Ed. 47 5524
[50]	Hsia K J, Huang Y, Menard E, Park J U, Zhou W, Rogers J A, Fulton J M 2005 Appl. Phys. Lett. 86 154106
[51]	Huang Y Y, Zhou W X, Hsia K J, Menard E, Park J U, Rogers J A, Alleyne A G 2005 Langmuir 21 8058
[52]	Feng X, Meitl M A, Bowen A M, Huang Y, Nuzzo R G, Rogers J A 2007 Langmuir 23 12555
[53]	Spies G J 1953 Aircr. Eng. Aerosp. Technol. 25 64
[54]	Chang F S C 1960 Trans. Soc. Rheol. 4 75
[55]	Yurenka S 1962 J. Appl. Polym. Sci. 61 36
[56]	Nicholson D W 1977 Int. J. Fracture. 13 279
[57]	Saubesrre E B, Durney C J, Hajdu J, Bastenbeck E 1965 Plating 52 982
[58]	Kaeble D H 1960 Trans. Soc. Rheol. 4 45
[59]	Kaeble D H 1959 Trans. Soc. Rheol. 3 161
[60]	Gent A N, Hamed G R 1975 J. Adhes. 7 91
[61]	Gardon J L 1963 J. Appl. Polym. Sci. 7 643
[62]	Chang M D, Devries K L, WilliamsM L 1972 J. Adhes. 4 221
[63]	Chen W T, Flavin T F 1972 IBM J. Res. Dev. 16 203
[64]	Gent A N, Hamed G R 1977 J. Appl. Polym. Sci. 21 2817
[65]	Crocombe A D, Adams R D 1981 J. Adhes. 12 127
[66]	Crocombe A D, Adams R D 1982 J. Adhes. 132 41
[67]	Atkins A G, Mai Y W 1986 Int. J. Fracture. 30 203
[68]	Loukis M J, Aravas N 1991 J. Adhes. 35 7
[69]	Chen H, Feng X, Huang Y, Huang Y, Rogers J A 2013 J. Mech. Phys. Solids 61 1737
[70]	Kim T W, Bhushan B 2008 J. R. Soc. Interface. 5 319
[71]	Poulard C, Restagno F, Weil R, Leger L 2011 Soft Matter 7 2543
[72]	Persson B N J 2003 J. Chem. Phys. 118 7614
[73]	Persson B N J, Gorb S 2003 J. Chem. Phys. 119 11437
[74]	Ghatak A, Mahadevan L, Chung J Y, Chaudhury M K, Shenoy V 2004 P. Roy. Soc. A-Math. Phy. 460 2725
[75]	Lamblet M, Verneuil E, Vilmin T, Buguin A, Silberzan P, Leger L 2007 Langmuir 23 6966
[76]	Majumder A, Ghatak A, Sharma A 2007 Science 318 258
[77]	Vajpayee S, Jagota A, HuiC Y 2010 J. Adhes. 86 39
[78]	Arzt E, Gorb S, Spolenak R 2003 Proc. Natl. Acad. Sci. 100 10603
[79]	Kazayawoko M, Balatinecz J J, Matuana L M 1999 J. Mater. Sci. 34 6189
[80]	Gilbert M J, Awaja F, Kelly G L, Fox B L, Brynolf R, Pigram P J 2011 Surf. Interface Anal. 43 856
[81]	Park S, Ahn J H, Feng X, Wang S, Huang Y, Rogers J A 2008 Adv. Funct. Mater. 18 2673
[82]	Dai L C, Feng X, Liu B, Fang D N 2010 Appl. Phys. Lett. 97 221903
[83]	Huang Y, Feng X, Qu B R 2011 Rev. Sci. Instrum. 82 104704

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Vol. 63, Issue 1 - 2014-01-05

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