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DNA sequencing technology has markedly advanced the development of biological and medicinal sciences. High-throughput pyrosequencing instruments that combine the pyrosequencing with microfabricated high-density picoliter reactors have been proved to be suitable for de novo sequencing and metagenome sequencing. In the present work, we report on an alternative sequencing chip consisting of hundreds of thousands of picoliter sized honeycombed SU8 reaction vessels on a fiber-optic slide by lithography technique for high-throughput pyrosequencing instruments. Highly reproducible fabrication process of SU8 sequencing chip is achieved through the improvement on SU8 film thickness uniformity and relaxation of SU8 residual stress during fabrication. To achieve the optical isolation required for SU8 reaction wells, metal film is selectively deposited on the side walls of the reaction vessels by reformating vacuum coating. With the metal coating, the average value of optical cross talking between SU8 reaction vessels is reduced from 25% to 1%. The SU8 sequencing chip demonstrates an excellent light transmission characteristic and meets the need of pyrosequencing application.
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Keywords:
- DNA sequencing /
- SU8 /
- picoliter well /
- fiber optic plates
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[25] Nguyen T T N, Nguyen Q L, Zyss J 2013 Appl. Phys. A DOI:10.1007/ s00339-012-7537-7
[26] Tung K K, Wong W H, Pun E Y B 2005 Appl. Phys. A 80 621
[27] Gunde M K, Hauptman N, Macek M, Kunaver M 2009 Appl. Phys. A 95 673
[28] Dai W, Lian K, Wang W J 2005 Microsyst. Technol. 11 526
[29] Macleod H A 1974 Thin-Film Optical Filter (London: Institute of Physics Publishing) p158
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[1] Sanger F, Nicklen S, Coulson A R 1977 Proc. Natl. Acad. Sci. USA 74 5463
[2] Ronaghi M, Karamohamed S, Pettersson B, Uhlen M, Nyren P 1996 Anal. Biochem. 242 84
[3] Eid J, Fehr A, Gray J, Gray J, Luong K, Lyle J, Otto G, Peluso P, Rank D, Baybayan P, Bettman B, Bibillo A, Bjornson K, Chaudhuri B, Christians F, Cicero R, Clark S, Dalal R, Winter A, Dixon J, Foquet M, Gaertner A, Hardenbol P, Heiner C, Hester K, Holden D, Kearns G, Kong X X, Kuse R, Lacroix Y, Lin S, Lundquist P, Ma X X, Marks P, Maxham M, Murphy M, Park I, Pham T, Phillips M, Roy J, Sebra R, Shen G, Sorenson J, Tomaney A, Travers K, Trulson M, Vieceli J, Wegener J, Wu D, Yang A, Zaccarin D, Zhao P, Zhong F, Korlach J, Turner S 2009 Science 323 133
[4] Branton D, Dreamer D W, Marziali A, Bayley H, Benner S A, Butler T, Ventra M D, Garaj S, Hibbs A, Huang X H, Jovanovich S B, KrsticP S, Lindsay S, Ling X S, Mastrangelo C H, Meller A, Oliver J S, Pershin Y V, Ramsey J M, Riehn R, Soni1 G V, Tabard C V, Wanunu M, Wiggin M, Schloss J A 2008 Nat. Biotechnol. 26 1146
[5] Jiang S C, Zhang L X, Xia A G, Chen H P 2010 Acta Phys. Sin. 59 4337 (in Chinese) [江绍钏, 章林溪, 夏阿根, 陈宏平 2010 59 4337]
[6] Zhou X G, Ren L F, Li Y T, Zhang M, Yu Y D, Yu J 2010 Sci. China Life Sci. 53 44
[7] Leamon J H, Rothberg J M 2007 Chem. Rev. 107 3367
[8] Margulies M, Egholm M, Altman W E, Attiya1 S, Bader J S, Bemben L A, Berka J, Braverman M S, Chen Y J, Chen J T, Dewell S B, Du L, Fierro J M, Gomes X V, Godwin B C, He W, Helgesen S, Ho C H, Irzyk G P, Jando S C, Alenquer M L I, Jarvie T P, Jirage K B, Kim J B, Knight J R, Lanza J R, Leamon J H, Lefkowitz S M, Lei M, Li J, Lohman K L, Lu H, Makhijani V B, McDade K E, McKenna M P, Myers E W, Nickerson E, Nobile J R, Plant R, Puc B P, Ronan M T, Roth G T, Sarkis G J, Simons J F, Simpson J W, Srinivasan M, Tartaro K R, Tomasz A, Vogt K A, Volkmer G A, Wang S H, Wang Y, Weiner M P, Yu P G, Begley R F, Rothberg J M 2005 Nature 437 376
[9] Yuan L N, Ren L F, Li Y T, Han W J, Yu Y, Chu Y N, Liu G M, Yu D, Teng M J, Wang L, Wang X M, Zhou X G, Yu Y D, Yu J 2011 Sci. China Life Sci. 54 835
[10] Leamon J H, Lee W L, Tatrtaro K R, Lanza J R, Sarlis G J, de Winter A D, Berka J, Lohman K L 2003 Electrophoresis 24 3769
[11] Pantano P, Walt D R 1995 Anal. Chem. 65 481A
[12] Walt D R 2010 Chem. Soc. Rev. 39 38
[13] Epstein J R, Leung P K, Lee K H, Walt D R 2003 Biosens. Bioelectron. 18 541
[14] Wang J M, Kong D P, Wang L L 2012 Acta Phys. Sin. 61 054216 (in Chinese) [王金猛, 孔德鹏, 王丽莉 2012 61 054216]
[15] Ransley J H T, Watari M, Sukumaran D, McKendry R A, Seshia A A 2006 Microelectron. Eng. 83 1621
[16] El-Ali J, Nielsen I R, Poulsen C R, Bang D D, Telleman P, Wolffa A 2004 Sens. Actuators. A: Phys. 110 3
[17] Sanzaa F J, Lagunaa M F, Casquela R, Holgadoa M, Barriosb C A, Ortegac F J, Romerob D L, Ballesterosa J J, Banulsc M J, Maquieirac A, Puchadesc R 2011 Appl. Surf. Sci. 257 5403
[18] Wang Y L, Sims C E, Marc P, Bachman M, Li G P, Allbritton N L 2006 Langmuir 22 8257
[19] Mackay R E, Le H R, Keatch R P 2011 J. Micro-Nano Mech. 6 13
[20] Verdoy D, Barrenetxeaa Z, Berganzoa J, Agirregabiriab M, Ruano-Lópezb J M, Marimónc J M, Olabarríaa G 2012 Biosens. Bioelectron. 32 259
[21] Shaw M, Nawrocki D, Hurditch R, Johnoson D 2003 Microsyst. Technol. 10 1
[22] Liu G, Tian Y, Kan Y 2005 Microsyst. Technol. 11 343
[23] Hammacher J, Fuelle A, Flaemig J, Saupe J, Loechel B, Grimm J 2008 Microsyst. Technol. 14 1515
[24] Feng R, Farris J 2002 J. Mater. Sci. 37 4793
[25] Nguyen T T N, Nguyen Q L, Zyss J 2013 Appl. Phys. A DOI:10.1007/ s00339-012-7537-7
[26] Tung K K, Wong W H, Pun E Y B 2005 Appl. Phys. A 80 621
[27] Gunde M K, Hauptman N, Macek M, Kunaver M 2009 Appl. Phys. A 95 673
[28] Dai W, Lian K, Wang W J 2005 Microsyst. Technol. 11 526
[29] Macleod H A 1974 Thin-Film Optical Filter (London: Institute of Physics Publishing) p158
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