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In this paper, the complex structure of CuInGaSe (CIGS), which is fabricated by a two-step progress (the deposition step and the salinization) or co-evaporation method, is analyzed in detail by several methods. Rutherford backscattering spectroscopy (RBS) shows unique advantage for investigating CIGS multi-layer. For the two-step CIGS thin films, both Ga and In atoms reveal a gradient distribution. Such a distribution that Ga atoms are more likely to be localized in a deeper layer of surface than in a shallow layer of surface, has no relation with the Mo layer. RBS and Auger electron spectroscopy (AES) prove that there appears diffusion in the interfaces of multi-layers, especially the interfaces of CdS and CIGS, Mo and CIGS. X-ray fluorescence (XRF) indicates that CIGS thin film presents the highest efficiency when the content ratio of In and Ga atoms is 0.7:0.3. Structural investigation by X-ray diffraction reveals the improved crystalline quality after annealing.
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Keywords:
- Cu (In,Ga)Se2 thin-film solar cells /
- RBS (Rutherford back scattering) /
- XRF (X-Ray Fluorescence) /
- diffusion
[1] Sun Y, Wang J Q, Du Z F, Shu B J, Yu G, Wen G Z, Zhou Z H, Sun J, Zhang C J, Zhang L Z 2001 Acta Energiae Sol. Sin. 22 192 (in Chinese)
[2] Xie D T, Zhao K, Wang L F, Zhu F, Quan S W, Meng T J, Zhang B C, Chen J E 2002 Acta Phys. Sin. 51 1377 (in Chinese)
[3] Repins I, Contreras M A, Egaas B, DeHart C, Scharf J, Perkins C L, To B, Noufi R 2008 Prog. Photovolt: Res. Appl. 16 235
[4] Hayashi T, Minemoto T, Zoppi G, Forbes I, Tanaka K, Yamada S, Araki T, Takakura H 2009 Sol. Energy Mater. Sol. Cells 93 922
[5] Shi C Y, Sun Y, He Q, Li F Y, Zhao J C 2009 Sol. Energy Mater. Sol. Cells 93 654
[6] Ding Z B, Wang Q, Wang K, Wang H, Chen T X, Zhang G Y, Yao S D 2007 Acta Phys. Sin. 56 2873 (in Chinese) [丁志博, 王琦, 王坤, 王欢, 陈田详, 张国义, 姚淑德 2007 56 2873]
[7] Doolittle L R 1985 Nucl. Instr. and Meth. In Phys. Res. B 9 344
[8] Wuerz R, Eicke A, Frankenfeld M, Kessler F, Powalla M, Rogin P 2009 Thin Solid Films. 517 2415
[9] Liu W, Sun Y, He Q, Li F Y, Qiao Z X, Liu F F, Li C J, Tian J G 2008 Proceeding of 10th China Solar Photovoltaic Conference [C] 550-553 (in Chinese) [刘玮, 孙云, 何青, 李风岩, 乔在祥, 刘芳芳, 李长健, 田建国 第十届中国太阳能光伏会议论文集. 中国, 常州, 2008年09月19日, 550—553]
[10] Scheer R Thin Solid Films. 2011, doi:10.1016/j.tsf.2011.01.092
[11] Han D L, Zhang G, Zhuang D M, Yuan J S, Song J 2007 Vacuum 44 30 (in Chinese) [韩东麟, 张弓, 庄大明, 元金石, 宋军, 2007 真空科学与技术学报 44 30]
[12] Marudachalam M, Birkmire R W, Hichri H, Schultz J M, Swartzlander A, Al-Jassim M M 1997 J. Appl. Phys. 82 2896
[13] Wada T, Kohara N, Nishiwaki S, Negami T 2001 Thin Solid Films 387 118
[14] Assmann L, Bernéde J C, Drici A, Amory C, Halgand E, Morsli M 2005 Appl. Surf. Sci. 246 159
[15] Wang H, Yao S D, Pan Y B, Zhang G Y 2007 Acta Phys. Sin. 56 3350 (in Chinese) [王欢, 姚淑德, 潘尧波, 张国义 2007 56 3350]
[16] Gossla M, Shafarman W N 2005 Thin Solid Films 480-481 33
[17] Jackson P, Würz R, Rau U, Mattheis J, Kurth M, Schlötzer T, Bilger G, Werner J H 2007 Prog. Photovolt. Res. Appl. 15 507
[18] Dittrich H, Prinz U, Szot J, Schock H W, 1989 Proceedings of the 9th European Communities Photovoltaic Solar Energy Conference Freiburg, Fed. Rep. of Germany 25-29 September 1989 p163
[19] Nakada T, Kunioka A 1999 Appl. Phys. Lett. 74 2444
[20] Liao D X, Rockett A 2003 J. Appl. Phys. 93 9380
[21] Zheng Q L, Zhuang D M, Zhang G, Li Q F 2006 Chin. J. Vac. Sci. Technol. 26 36 (in Chinese) [郑麒麟, 庄大明, 张弓, 李秋芳 2006 真空科学与技术学报 26 36]
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[1] Sun Y, Wang J Q, Du Z F, Shu B J, Yu G, Wen G Z, Zhou Z H, Sun J, Zhang C J, Zhang L Z 2001 Acta Energiae Sol. Sin. 22 192 (in Chinese)
[2] Xie D T, Zhao K, Wang L F, Zhu F, Quan S W, Meng T J, Zhang B C, Chen J E 2002 Acta Phys. Sin. 51 1377 (in Chinese)
[3] Repins I, Contreras M A, Egaas B, DeHart C, Scharf J, Perkins C L, To B, Noufi R 2008 Prog. Photovolt: Res. Appl. 16 235
[4] Hayashi T, Minemoto T, Zoppi G, Forbes I, Tanaka K, Yamada S, Araki T, Takakura H 2009 Sol. Energy Mater. Sol. Cells 93 922
[5] Shi C Y, Sun Y, He Q, Li F Y, Zhao J C 2009 Sol. Energy Mater. Sol. Cells 93 654
[6] Ding Z B, Wang Q, Wang K, Wang H, Chen T X, Zhang G Y, Yao S D 2007 Acta Phys. Sin. 56 2873 (in Chinese) [丁志博, 王琦, 王坤, 王欢, 陈田详, 张国义, 姚淑德 2007 56 2873]
[7] Doolittle L R 1985 Nucl. Instr. and Meth. In Phys. Res. B 9 344
[8] Wuerz R, Eicke A, Frankenfeld M, Kessler F, Powalla M, Rogin P 2009 Thin Solid Films. 517 2415
[9] Liu W, Sun Y, He Q, Li F Y, Qiao Z X, Liu F F, Li C J, Tian J G 2008 Proceeding of 10th China Solar Photovoltaic Conference [C] 550-553 (in Chinese) [刘玮, 孙云, 何青, 李风岩, 乔在祥, 刘芳芳, 李长健, 田建国 第十届中国太阳能光伏会议论文集. 中国, 常州, 2008年09月19日, 550—553]
[10] Scheer R Thin Solid Films. 2011, doi:10.1016/j.tsf.2011.01.092
[11] Han D L, Zhang G, Zhuang D M, Yuan J S, Song J 2007 Vacuum 44 30 (in Chinese) [韩东麟, 张弓, 庄大明, 元金石, 宋军, 2007 真空科学与技术学报 44 30]
[12] Marudachalam M, Birkmire R W, Hichri H, Schultz J M, Swartzlander A, Al-Jassim M M 1997 J. Appl. Phys. 82 2896
[13] Wada T, Kohara N, Nishiwaki S, Negami T 2001 Thin Solid Films 387 118
[14] Assmann L, Bernéde J C, Drici A, Amory C, Halgand E, Morsli M 2005 Appl. Surf. Sci. 246 159
[15] Wang H, Yao S D, Pan Y B, Zhang G Y 2007 Acta Phys. Sin. 56 3350 (in Chinese) [王欢, 姚淑德, 潘尧波, 张国义 2007 56 3350]
[16] Gossla M, Shafarman W N 2005 Thin Solid Films 480-481 33
[17] Jackson P, Würz R, Rau U, Mattheis J, Kurth M, Schlötzer T, Bilger G, Werner J H 2007 Prog. Photovolt. Res. Appl. 15 507
[18] Dittrich H, Prinz U, Szot J, Schock H W, 1989 Proceedings of the 9th European Communities Photovoltaic Solar Energy Conference Freiburg, Fed. Rep. of Germany 25-29 September 1989 p163
[19] Nakada T, Kunioka A 1999 Appl. Phys. Lett. 74 2444
[20] Liao D X, Rockett A 2003 J. Appl. Phys. 93 9380
[21] Zheng Q L, Zhuang D M, Zhang G, Li Q F 2006 Chin. J. Vac. Sci. Technol. 26 36 (in Chinese) [郑麒麟, 庄大明, 张弓, 李秋芳 2006 真空科学与技术学报 26 36]
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