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Substrate temperature and B-doping effects on microstructure and electronic properties of p-type hydrogenated microcrystalline silicon films

Yang Shi-E Wen Li-Wei Chen Yong-Sheng Wang Chang-Zhou Gu Jin-Hua Gao Xiao-Yong Lu Jing-Xiao

Citation:

Substrate temperature and B-doping effects on microstructure and electronic properties of p-type hydrogenated microcrystalline silicon films

Yang Shi-E, Wen Li-Wei, Chen Yong-Sheng, Wang Chang-Zhou, Gu Jin-Hua, Gao Xiao-Yong, Lu Jing-Xiao
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  • Abstract views:  7883
  • PDF Downloads:  1019
  • Cited By: 0
Publishing process
  • Received Date:  23 August 2007
  • Accepted Date:  20 February 2008
  • Published Online:  05 April 2008

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