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Study on the mechanism and measurement of stress of TiO2 and SiO2 thin-films

Gu Pei-Fu Zheng Zhen-Rong Zhao Yong-Jiang Liu Xu

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Study on the mechanism and measurement of stress of TiO2 and SiO2 thin-films

Gu Pei-Fu, Zheng Zhen-Rong, Zhao Yong-Jiang, Liu Xu
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  • Abstract views:  9918
  • PDF Downloads:  3508
  • Cited By: 0
Publishing process
  • Received Date:  16 March 2006
  • Accepted Date:  03 July 2006
  • Published Online:  05 June 2006

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