[1] |
Yan Shao-Qi, Gao Ji-Kun, Chen Yue, Ma Yao, Zhu Xiao-Dong. Low-density plasmas generated by electron beams passing through silicon nitride window. Acta Physica Sinica,
2024, 73(14): 144102.
doi: 10.7498/aps.73.20240302
|
[2] |
Zhang Song-Ran, He Dai-Hua, Tu Hua-Yao, Sun yan, Kang Ting-Ting, Dai Ning, Chu Jun-Hao, Yu Guo-Lin. Magnetotransport properties and stress control of HgCdTe thin film. Acta Physica Sinica,
2020, 69(5): 057301.
doi: 10.7498/aps.69.20191330
|
[3] |
Jiang Zhao, Chen Xue-Kang. Study on controlling the stress in flexible Al/PI film by interface alloying. Acta Physica Sinica,
2015, 64(21): 216802.
doi: 10.7498/aps.64.216802
|
[4] |
Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang. Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputtering. Acta Physica Sinica,
2012, 61(2): 028104.
doi: 10.7498/aps.61.028104
|
[5] |
Liu Li-Ying, Zhang Jia-Liang, Guo Qing-Chao, Wang De-Zhen. Diagnostics of the atmospheric pressure plasma jets for plasma enhanced chemical vapor deposition of polycrystalline silicon thin film. Acta Physica Sinica,
2010, 59(4): 2653-2660.
doi: 10.7498/aps.59.2653
|
[6] |
Xing Hai-Ying, Fan Guang-Han, Yang Xue-Lin, Zhang Guo-Yi. Optical properties of GaMnN films grown by metal-organic chemical vapor deposition. Acta Physica Sinica,
2010, 59(1): 504-507.
doi: 10.7498/aps.59.504
|
[7] |
Chen Li-Bao, Yu Hong-Chun, Xu Chun-Mei, Wang Tai-Hong. Investigation of Si film anode prepared by ion beam assisted deposition. Acta Physica Sinica,
2009, 58(7): 5029-5034.
doi: 10.7498/aps.58.5029
|
[8] |
Chen Wei-Lan, Gu Pei-Fu, Wang Ying, Zhang Yue-Guang, Liu Xu. Analysis of the thermal stress in infrared films. Acta Physica Sinica,
2008, 57(7): 4316-4321.
doi: 10.7498/aps.57.4316
|
[9] |
Wu Zhen-Yu, Yang Yin-Tang, Wang Jia-You. Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor deposition. Acta Physica Sinica,
2006, 55(5): 2572-2577.
doi: 10.7498/aps.55.2572
|
[10] |
Liu Yuan-Fu, Han Jian-Min, Zhang Gu-Ling, Wang Jiu-Li, Chen Guang-Liang, Li Xue-Ming, Feng Wen-Ran, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze. Study on the microstructure and properties of (Ti, Al)N film deposited by pulsed high energy density plasma. Acta Physica Sinica,
2005, 54(3): 1301-1305.
doi: 10.7498/aps.54.1301
|
[11] |
Qin Qi, Yu Nai-Sen, Guo Li-Wei, Wang Yang, Zhu Xue-Liang, Chen Hong, Zhou Jun-Ming. Residual stress in the GaN epitaxial film prepared by in situ SiNx deposition. Acta Physica Sinica,
2005, 54(11): 5450-5454.
doi: 10.7498/aps.54.5450
|
[12] |
Liu Yuan-Fu, Zhang Gu-Ling, Wang Jiu-Li, Liu Chi-Zi, Yang Si-Ze. Preparation of titanium nitride films by pulsed high-energy-density plasma and investigation of the tribological behavior of the film. Acta Physica Sinica,
2004, 53(2): 503-507.
doi: 10.7498/aps.53.503
|
[13] |
Hu Da-Zhi, Shen Ming- Rong. The effect of oxygen pressure on the dielectric properties of pulsed laser deposited La-doped PbTiO3 thin film*. Acta Physica Sinica,
2004, 53(12): 4405-4409.
doi: 10.7498/aps.53.4405
|
[14] |
Fang Zhi-Jun, Xia Yi-Ben, Wang Lin-Jun, Zhang Wei-Li, Ma Zhe-Guo, Zhang Ming-Long. Study of the stress observed in diamond films on carbon-implanted alumina surfaces. Acta Physica Sinica,
2003, 52(4): 1028-1033.
doi: 10.7498/aps.52.1028
|
[15] |
LIU YAN-WEI, ZHANG DAO-FAN, LI CHUN-LING, ZHOU YUE-LIANG, CUI DA-FU, ZHU YONG, CHEN ZHENG-HAO. DIELECTRIC AND FERROELECTRIC PROPERTIES OF BaTiO3 THIN FILMS PREPARED BY PULSED LASER DEPOSITION. Acta Physica Sinica,
1997, 46(3): 550-555.
doi: 10.7498/aps.46.550
|
[16] |
XU KE-WEI, GAO RUN-SHENG, YU LI-GEN, HE JIA-WEN. THIN FILM STRESS EVALUATION BY A GLANCING X-RAY BEAM. Acta Physica Sinica,
1994, 43(8): 1295-1300.
doi: 10.7498/aps.43.1295
|
[17] |
SONG WEN-DONG, AN CHENG-WU, LU DONG-SHENG, FAN YONG-CHANG, LI ZAI-GUANG, HUANG JING-QING, ZHONG HONG-HAI, ZHAO XING-RONG, MAI ZHI-HONG, ZHOU FANG-QIAO, GUO QING-WEI, LI YUE-NAN, HUA ZHI-QIANG. DEPOSITION OF LARGE AREA SUPERCONDUCTING FILMS BY EXCIMER LASER SCANNING ABLATION. Acta Physica Sinica,
1993, 42(10): 1674-1679.
doi: 10.7498/aps.42.1674
|
[18] |
. THE AGGREGATION EFFECT OF METAL IONS ON SILVER SOL AND THEIR RAMAN SPECTRA. Acta Physica Sinica,
1989, 38(8): 1259-1264.
doi: 10.7498/aps.38.1259
|
[19] |
YU FENG-QI, ZHANG CHUN-PING, ZHANG GUANG-YIN. THE AGGREGATION EFFECT OF METAL IONS ON SILVER SOL AND THE FRACTAL STRUCTURE FORMED. Acta Physica Sinica,
1987, 36(10): 1289-1304.
doi: 10.7498/aps.36.1289
|
[20] |
FU GUANG-SHENG, HAN LI, LI XIAO-WEI, ZHANG LIAN-SHUI, DONG LI-FANG, LU FU-RUN, XUE CHUN-YIN. SILICON FILM DEPOSITED BY LASER-PLASMA. Acta Physica Sinica,
1987, 36(3): 293-300.
doi: 10.7498/aps.36.293
|