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Fabrication of nanoimprint mold by multilayer film deposition technique

Zhang Yong-Jun Li Wei Meng Xiang-Dong Yang Jing-Hai Hua Zhong Xu Jun Huang Xin-Fan Chen Kun-Ji

Citation:

Fabrication of nanoimprint mold by multilayer film deposition technique

Zhang Yong-Jun, Li Wei, Meng Xiang-Dong, Yang Jing-Hai, Hua Zhong, Xu Jun, Huang Xin-Fan, Chen Kun-Ji,
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  • Abstract views:  7590
  • PDF Downloads:  1045
  • Cited By: 0
Publishing process
  • Received Date:  16 August 2005
  • Accepted Date:  16 November 2005
  • Published Online:  05 February 2006

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