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Blue photoluminescence of aSiOxNy films prepared by ECR-CVD

Xu Sheng-Hua Xin Yu Ning Zhao-Yuan Cheng Shan-Hua Huang Song Lu Xin-Hua Xiang Su-Liu Chen Jun

Citation:

Blue photoluminescence of aSiOxNy films prepared by ECR-CVD

Xu Sheng-Hua, Xin Yu, Ning Zhao-Yuan, Cheng Shan-Hua, Huang Song, Lu Xin-Hua, Xiang Su-Liu, Chen Jun
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  • Abstract views:  7004
  • PDF Downloads:  806
  • Cited By: 0
Publishing process
  • Received Date:  14 July 2002
  • Accepted Date:  14 October 2002
  • Published Online:  20 May 2003

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