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(1)半导体超晶格国家重点实验室,中国科学院半导体研究所,北京100083; (2)国家光电子工艺中心,中国科学院半导体研究所北京100083; (3)集成光电子学联合实验室半导体研究所实验区,中国科学院半导体研究所,北京100083
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Publishing process
- Received Date:
07 June 1994
- Published Online:
05 April 1995
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