搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

部分耗尽结构绝缘体上硅器件的低频噪声特性

王凯 刘远 陈海波 邓婉玲 恩云飞 张平

引用本文:
Citation:

部分耗尽结构绝缘体上硅器件的低频噪声特性

王凯, 刘远, 陈海波, 邓婉玲, 恩云飞, 张平

Low frequency noise behaviors in the partially depleted silicon-on-insulator device

Wang Kai, Liu Yuan, Chen Hai-Bo, Deng Wan-Ling, En Yun-Fei, Zhang Ping
PDF
导出引用
  • 针对部分耗尽结构绝缘体上硅(silicon-on-insulator, SOI)器件低频噪声特性展开实验与理论研究. 实验结果表明, 器件低频噪声主要来源于SiO2-Si界面附近缺陷态对载流子的俘获与释放过程; 基于此理论可提取前栅和背栅氧化层界面附近缺陷态密度分别为8×1017 eV-1·cm-3和2.76×1017 eV-1·cm-3. 基于电荷隧穿机理, 在考虑隧穿削弱因子、隧穿距离与时间常数之间关系的基础上, 提取了前、背栅氧化层内缺陷态密度随空间的分布情况. 此外, SOI器件沟道电流归一化噪声功率谱密度随沟道长度的增加而线性减小, 这表明器件低频噪声主要来源于沟道的闪烁噪声. 最后, 基于电荷耦合效应, 分析了背栅电压对前栅阈值电压、沟道电流以及沟道电流噪声功率谱密度的影响.
    Low frequency noise in the partially depleted silicon-on-insulator (SOI) NMOS device is investigated in this paper. The experimental results show low frequency noise behaviors are in good consistence with classical noise model. Based on McWhorter model, the low frequency noise in the SOI device results from the exchange of carriers between channel and oxide. The densities of trapped charges in the front gate oxide and buried oxide are extracted. Due to the difference between manufacture processes, the extracted density of trapped charges in the buried oxide (Nt=8×1017 eV-1·cm-3) is larger than that in the gate oxide (Nt=2.767×1017 eV-1·cm-3), and the result is in good agreement with testing result of transfer characteristics in part 2. Based on the charge tunneling mechanism, the spatial distribution of trapped charges in the gate oxide and buried oxide are extracted by using the tunneling attenuation coefficient (λ=0.1 nm for SiO2) and time constant (τ0=10-10 s), and the result also proves that the trap in buried oxide is larger than that in gate oxide. In addition, the influence of channel length on the low frequency noise in the SOI device is discussed. The variations of normalized channel current noise power spectral density with channel length are investigated at four frequencies(10 Hz, 25 Hz, 50 Hz, and 100 Hz). The experimental results show that the normalized noise power spectral density decreases linearly with the increase of channel length, which indicates the low frequency noise of SOI device is mainly caused by the flicker noise in the channel, and the contribution of source/drain contact and parasitic resistances could be ignored. Finally, the dependences of back gate voltage on the front gate threshold voltage, front channel current and front channel noise are discussed by considering the charge coupling effect. The experimental results show the measured channel current and channel noise with applying front gate voltage and back gate voltage simultaneously are larger than those with applying the front gate voltage and back gate voltage separately.
    • 基金项目: 国家自然科学基金(批准号: 61204112, 61204116)、中国博士后科学基金(批准号: 2012M521628)和SOI 研发中心基金(批准号: 62401110320)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61204112, 61204116), the China Postdoctoral Science Foundation (Grant No. 2012M521628), and the SOI Research Institute Foundation, China (Grant No. 62401110320).
    [1]

    Eggert D, Huebler P, Huerrich A, Kuerck H, Budde W, Vorwerk M 1997 IEEE Trans. Electron. Dev. 44 1981

    [2]

    Rozeau O, Jomaah J, Haendler S, Boussey J, Balestra F 2000 Analog Integr. Circ. Sign. Process. 25 93

    [3]

    Liu Y, Wu W J, Li B, En Y F, Wang L, Liu Y R 2014 Acta Phys. Sin. 63 098503 (in Chinese) [刘远, 吴为敬, 李斌, 恩云飞, 王磊, 刘玉荣 2014 63 098503]

    [4]

    Fung T C, Baek G, Kanicki J 2010 J. Appl. Phys. 108 074518

    [5]

    Alok K, Manoj K P, Sujata P, Gupta A K 2005 J. Semicond. Technol. Sci. 5 187

    [6]

    Akarvardar K, Dufrene B M, Cristoloveanu M, Gentil P, Blalock B J, Mojarradi M M 2006 IEEE Trans. Electron. Dev. 53 829

    [7]

    McWhorter A L 1957 Semiconductor Surface Physics (Philadelphia: University of Pennsylvania Press) pp207-228

    [8]

    Jomaah J, Balestra 2004 IEE Proc. Circ. Dev. Syst. 151 111

    [9]

    Ghibaudo G, Roux O, Nguyen-Duc C, Balestra F, Brini J 1991 Phys. Status Solidi A 124 571

    [10]

    Christensson S, Lundstrom I, Svensson C 1968 Solid State Electron. 11 797

    [11]

    Liu Y, Wu W J, En Y F, Wang L, Lei Z F, Wang X H 2014 IEEE Electron. Dev. Lett. 35 369

    [12]

    Jayarman R, Sodini C G 1989 IEEE Trans. Electron. Dev. 36 1773

    [13]

    Lukyanchikova N, Garbar N, Smoianka A 2004 IEEE Electron. Dev. Lett. 25 433

    [14]

    Ohata A, Pretet J, Cristoloveanu S, Zaslavsky A 2005 IEEE Trans. Electron. Dev. 52 124

  • [1]

    Eggert D, Huebler P, Huerrich A, Kuerck H, Budde W, Vorwerk M 1997 IEEE Trans. Electron. Dev. 44 1981

    [2]

    Rozeau O, Jomaah J, Haendler S, Boussey J, Balestra F 2000 Analog Integr. Circ. Sign. Process. 25 93

    [3]

    Liu Y, Wu W J, Li B, En Y F, Wang L, Liu Y R 2014 Acta Phys. Sin. 63 098503 (in Chinese) [刘远, 吴为敬, 李斌, 恩云飞, 王磊, 刘玉荣 2014 63 098503]

    [4]

    Fung T C, Baek G, Kanicki J 2010 J. Appl. Phys. 108 074518

    [5]

    Alok K, Manoj K P, Sujata P, Gupta A K 2005 J. Semicond. Technol. Sci. 5 187

    [6]

    Akarvardar K, Dufrene B M, Cristoloveanu M, Gentil P, Blalock B J, Mojarradi M M 2006 IEEE Trans. Electron. Dev. 53 829

    [7]

    McWhorter A L 1957 Semiconductor Surface Physics (Philadelphia: University of Pennsylvania Press) pp207-228

    [8]

    Jomaah J, Balestra 2004 IEE Proc. Circ. Dev. Syst. 151 111

    [9]

    Ghibaudo G, Roux O, Nguyen-Duc C, Balestra F, Brini J 1991 Phys. Status Solidi A 124 571

    [10]

    Christensson S, Lundstrom I, Svensson C 1968 Solid State Electron. 11 797

    [11]

    Liu Y, Wu W J, En Y F, Wang L, Lei Z F, Wang X H 2014 IEEE Electron. Dev. Lett. 35 369

    [12]

    Jayarman R, Sodini C G 1989 IEEE Trans. Electron. Dev. 36 1773

    [13]

    Lukyanchikova N, Garbar N, Smoianka A 2004 IEEE Electron. Dev. Lett. 25 433

    [14]

    Ohata A, Pretet J, Cristoloveanu S, Zaslavsky A 2005 IEEE Trans. Electron. Dev. 52 124

  • [1] 吕玲, 邢木涵, 薛博瑞, 曹艳荣, 胡培培, 郑雪峰, 马晓华, 郝跃. 重离子辐射对AlGaN/GaN高电子迁移率晶体管低频噪声特性的影响.  , 2024, 73(3): 036103. doi: 10.7498/aps.73.20221360
    [2] 刘海洋, 范晓跃, 范豪杰, 李阳阳, 唐天鸿, 王刚. 等离子体轰击单层WS2引入缺陷态对束缚激子光学性质的影响.  , 2024, 73(13): 137802. doi: 10.7498/aps.73.20240475
    [3] 朱宇博, 徐华, 李民, 徐苗, 彭俊彪. 镨掺杂铟镓氧化物薄膜晶体管的低频噪声特性分析.  , 2021, 70(16): 168501. doi: 10.7498/aps.70.20210368
    [4] 闫大为, 田葵葵, 闫晓红, 李伟然, 俞道欣, 李金晓, 曹艳荣, 顾晓峰. GaN肖特基二极管的正向电流输运和低频噪声行为.  , 2021, 70(8): 087201. doi: 10.7498/aps.70.20201467
    [5] 徐琦, 孙小伟, 宋婷, 温晓东, 刘禧萱, 王羿文, 刘子江. 不同缺陷态下具有高光力耦合率的新型一维光力晶体纳米梁.  , 2021, 70(22): 224210. doi: 10.7498/aps.70.20210925
    [6] 王党会, 许天旱. 蓝紫光发光二极管中的低频产生-复合噪声行为研究.  , 2019, 68(12): 128104. doi: 10.7498/aps.68.20190189
    [7] 刘远, 何红宇, 陈荣盛, 李斌, 恩云飞, 陈义强. 氢化非晶硅薄膜晶体管的低频噪声特性.  , 2017, 66(23): 237101. doi: 10.7498/aps.66.237101
    [8] 曹江伟, 王锐, 王颖, 白建民, 魏福林. 隧穿磁电阻效应磁场传感器中低频噪声的测量与研究.  , 2016, 65(5): 057501. doi: 10.7498/aps.65.057501
    [9] 王静, 刘远, 刘玉荣, 吴为敬, 罗心月, 刘凯, 李斌, 恩云飞. 铟锌氧化物薄膜晶体管局域态分布的提取方法.  , 2016, 65(12): 128501. doi: 10.7498/aps.65.128501
    [10] 王党会, 许天旱, 王荣, 雒设计, 姚婷珍. InGaN/GaN多量子阱结构发光二极管发光机理转变的低频电流噪声表征.  , 2015, 64(5): 050701. doi: 10.7498/aps.64.050701
    [11] 刘远, 陈海波, 何玉娟, 王信, 岳龙, 恩云飞, 刘默寒. 电离辐射对部分耗尽绝缘体上硅器件低频噪声特性的影响.  , 2015, 64(7): 078501. doi: 10.7498/aps.64.078501
    [12] 刘远, 吴为敬, 李斌, 恩云飞, 王磊, 刘玉荣. 非晶铟锌氧化物薄膜晶体管的低频噪声特性与分析.  , 2014, 63(9): 098503. doi: 10.7498/aps.63.098503
    [13] 王爱迪, 刘紫玉, 张培健, 孟洋, 李栋, 赵宏武. Au/SrTiO3/Au界面电阻翻转效应的低频噪声分析.  , 2013, 62(19): 197201. doi: 10.7498/aps.62.197201
    [14] 刘玉栋, 杜磊, 孙鹏, 陈文豪. 静电放电对功率肖特基二极管I-V及低频噪声特性的影响.  , 2012, 61(13): 137203. doi: 10.7498/aps.61.137203
    [15] 岳蕾蕾, 陈雨, 樊光辉, 何娇, 赵德荀, 刘应开. 缺陷态对4340钢-环氧树脂二维声子晶体带隙的影响.  , 2011, 60(10): 106103. doi: 10.7498/aps.60.106103
    [16] 王鑫华, 庞磊, 陈晓娟, 袁婷婷, 罗卫军, 郑英奎, 魏珂, 刘新宇. GaN HEMT栅边缘电容用于缺陷的研究.  , 2011, 60(9): 097101. doi: 10.7498/aps.60.097101
    [17] 赵岩, 施伟华, 姜跃进. 中心外缺陷对带隙型光子晶体光纤色散特性的影响.  , 2010, 59(9): 6279-6283. doi: 10.7498/aps.59.6279
    [18] 于思瑶, 郭树旭, 郜峰利. 半导体激光器低频噪声的Lyapunov指数计算和混沌状态判定.  , 2009, 58(8): 5214-5217. doi: 10.7498/aps.58.5214
    [19] 赵 芳, 苑立波. 二维声子晶体同质位错结缺陷态特性.  , 2006, 55(2): 517-520. doi: 10.7498/aps.55.517
    [20] 黄杨程, 刘大福, 梁晋穗, 龚海梅. 短波碲镉汞光伏器件的低频噪声研究.  , 2005, 54(5): 2261-2266. doi: 10.7498/aps.54.2261
计量
  • 文章访问数:  6046
  • PDF下载量:  398
  • 被引次数: 0
出版历程
  • 收稿日期:  2014-10-09
  • 修回日期:  2014-12-02
  • 刊出日期:  2015-05-05

/

返回文章
返回
Baidu
map