搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

氧压对Ba0.6Sr0.4TiO3薄膜晶格常数的影响及BaTiO3/Ba0.6Sr0.4TiO3超晶格的制备

尚杰 张辉 曹明刚 张鹏翔

引用本文:
Citation:

氧压对Ba0.6Sr0.4TiO3薄膜晶格常数的影响及BaTiO3/Ba0.6Sr0.4TiO3超晶格的制备

尚杰, 张辉, 曹明刚, 张鹏翔

Influence of oxygen pressure on the lattice constants of Ba0.6Sr0.4TiO3 thin films and preparation of BaTiO3/Ba0.6Sr0.4TiO3 superlattices

Shang Jie, Zhang Hui, Cao Ming-Gang, Zhang Peng-Xiang
PDF
导出引用
  • 采用脉冲激光沉积(PLD)技术,经一系列的优化实验成功地制备了BaTiO3(BT)和Ba0.6Sr0.4TiO3(BST)单层膜.X射线衍射分析表明,在LaAlO3(001)单晶平衬底上生长的BT和BST薄膜都是沿[001]取向的近外延生长.且随着氧压在10-3—25 Pa范围内逐渐增大,BST薄膜的晶格常数与氧压之间近似满足Boltzmann函数关系.其次,在此优化条件下还
    Using pulsed laser deposition (PLD) technology, BaTiO3 (BT) and Ba0.6Sr0.4TiO3 (BST) single-layer films were successfully prepared through a series of optimization experiments. X-ray diffraction investigations indicated that BT and BST thin films were nearly (001)-epitaxially grown on LaAlO3 (001) substrates. And functional relation between the lattice constants of BST thin films and the oxygen pressure was close to Boltzmann function from 10-3 to 25 Pa. Then the high-quality BT/BST superlattices were also prepared under these optimal conditions. The surface topography measurement by atomic force microscopy (AFM) demonstrated that the root-mean-square (RMS) roughness of BT/BST superlattice was only 0.3048 nm. The surface smoothness has achieved the atomic scale. In addition, satellite peaks were clearly observed in the XRD spectrum. According to the position of satellite peaks that belong to (002) diffraction peak, the superperiod of superlattices was calculated and the deposition rates of BT and BST thin films were deduced. Finally, laser induced thermoelectric voltage (LITV) effect was measured for the first time in BT/BST superlattices grown on vicinal-cut single crystal substrates, which was not found in BT and BST single-layer films.
    [1]

    Cao W W, Lü T Q, Xie W G, Zhou J 2009 Chin. Phys. B 18 3054

    [2]

    Cui L, Lü T Q, Sun P N 2009 Chin. Phys. B 18 1658

    [3]

    Li J J, Yu J, Li J, Yang W M, Wu Y Y, Wang G B 2009 Acta Phys. Sin. 58 1246 (in Chinese) [李建军、于 军、李 佳、杨卫明、吴云翼、王耘波 2009 58 1246]

    [4]

    Wang L H, Yu J, Wang Y B, Cao J X, Zhao S L 2008 Acta Phys. Sin. 57 1207 (in Chinese) [王龙海、于 军、王耘波、高俊雄、赵素玲 2008 57 1207]

    [5]

    Aulika I, Pokorny J, Zauls V, Kundzins K, Rutkis M, Petzelt J 2008 Optical Materials 30 1017

    [6]

    Scarisoreanu N, Filipescu M, Ioachim A, Toacsan M I, Banciu M G, Nedelcu L, Dutu A, Buda M, Alexandru H V, Dinescu M 2007 Applied Surface Science 253 8254

    [7]

    Benoit G, Julie G, Emmanuel D, Pierre G, David W, Bernard A, Frédéric L, Roland P, Xavier G, Marc A 2007 Journal of the European Ceramic Society 27 3851

    [8]

    Scott J F, Annu 1998 Rev. Mater. Sci. 28 79

    [9]

    Takasu H 2000 J. Electroceram. 4 327

    [10]

    Cheng H F 1996 J. Appl. Phys. 79 7965

    [11]

    Lariviere G P, Frigerio J M, Rivory J, Abeles F 1992 Appl. Opt. 31 6509

    [12]

    Borgogno J P, Flory F, Roche P, Schmitt B, Albert G, Pelletier E, Macleod H A 1984 Appl. Opt. 23 3567

    [13]

    Ning Z Y, Jing M F, Xin Y, Ye C 2008 Thin Solid Film Materials and Preparation Technology (Beijing: Science Press) p108 (in Chinese) [宁兆元、江美福、辛 煜、叶 超 2008 固体薄膜材料与制备技术(北京:科学出版社) 第108页]

    [14]

    Wu H D, Barnes F S 1998 in: O. Auciello (Ed.), Integrated Ferroelectrics,Proceedings of the 10th International Symposium on Integrated Ferroelectrics,Monterey, U.S.A, March 1—4 22 291

    [15]

    Horwitz J S, Chang W, Carter A C, Pond J M, Kirchoefer S W, Chrisey D B, Levy J, Hubert C 1998 in: O. Auciello (Ed.), Integrated Ferroelectrics, Proceedings of the 10th International Symposium on Integrated Ferroelectrics, Monterey, U.S.A, March 1—4 22 279

    [16]

    Jain M, Majumder S B, Katiyar R S, Miranda F A, Van Keuls F W 2003 Appl. Phys. Lett. 82 1911

    [17]

    Joshi P C, Cole M W 2000 Appl. Phys. Lett. 77 289

    [18]

    Kim W J, Chang W, Qadri S B, Pond J M, Kirchoefer S W, Chrisey D B, Horwitz J S 2000 Appl. Phys. Lett. 76 1185

    [19]

    Hubert C, Levy J, Rivkin T V, Carlson C, Parilla P A, Perkins J D, Ginley D S 2001 Appl. Phys. Lett. 79 2058

    [20]

    Kim W J, Wu H D, Chang W, Qadri S B, Pond J M, Kirchoefer S W, Chrisey D B, Horwitz J S 2000 J. Appl. Phys. 88 5448

    [21]

    Navi N, Kim H, Horwitz J S, Wu H D, Qadri S B 2003 Appl. Phys. A 76 841

    [22]

    Ding Y P, Wu J S, Meng Z Y, Chan H L, Choy Z L 2002 Materials Chemistry and Physics 75 220

    [23]

    Park B H, Gim Y, Fan Y, Jia Q X, Lu P 2000 Appl.Phy.Lett. 77 2587

    [24]

    Carlson C M, Rivkin T V, Parilla P A, Perking J D, Ginley D B, Kozyerv A B, Oshadchy V N, Pavlov A S 2000 Appl.Phy.Lett. 76 1920

    [25]

    Lebedev O I, Hamet J F, Van Tendeloo G , Beaumont V , Raveau B 2001 J . Appl. Phys .90 5261

    [26]

    Schuller Y K 1980 Phys. Rev. B 24 1597

  • [1]

    Cao W W, Lü T Q, Xie W G, Zhou J 2009 Chin. Phys. B 18 3054

    [2]

    Cui L, Lü T Q, Sun P N 2009 Chin. Phys. B 18 1658

    [3]

    Li J J, Yu J, Li J, Yang W M, Wu Y Y, Wang G B 2009 Acta Phys. Sin. 58 1246 (in Chinese) [李建军、于 军、李 佳、杨卫明、吴云翼、王耘波 2009 58 1246]

    [4]

    Wang L H, Yu J, Wang Y B, Cao J X, Zhao S L 2008 Acta Phys. Sin. 57 1207 (in Chinese) [王龙海、于 军、王耘波、高俊雄、赵素玲 2008 57 1207]

    [5]

    Aulika I, Pokorny J, Zauls V, Kundzins K, Rutkis M, Petzelt J 2008 Optical Materials 30 1017

    [6]

    Scarisoreanu N, Filipescu M, Ioachim A, Toacsan M I, Banciu M G, Nedelcu L, Dutu A, Buda M, Alexandru H V, Dinescu M 2007 Applied Surface Science 253 8254

    [7]

    Benoit G, Julie G, Emmanuel D, Pierre G, David W, Bernard A, Frédéric L, Roland P, Xavier G, Marc A 2007 Journal of the European Ceramic Society 27 3851

    [8]

    Scott J F, Annu 1998 Rev. Mater. Sci. 28 79

    [9]

    Takasu H 2000 J. Electroceram. 4 327

    [10]

    Cheng H F 1996 J. Appl. Phys. 79 7965

    [11]

    Lariviere G P, Frigerio J M, Rivory J, Abeles F 1992 Appl. Opt. 31 6509

    [12]

    Borgogno J P, Flory F, Roche P, Schmitt B, Albert G, Pelletier E, Macleod H A 1984 Appl. Opt. 23 3567

    [13]

    Ning Z Y, Jing M F, Xin Y, Ye C 2008 Thin Solid Film Materials and Preparation Technology (Beijing: Science Press) p108 (in Chinese) [宁兆元、江美福、辛 煜、叶 超 2008 固体薄膜材料与制备技术(北京:科学出版社) 第108页]

    [14]

    Wu H D, Barnes F S 1998 in: O. Auciello (Ed.), Integrated Ferroelectrics,Proceedings of the 10th International Symposium on Integrated Ferroelectrics,Monterey, U.S.A, March 1—4 22 291

    [15]

    Horwitz J S, Chang W, Carter A C, Pond J M, Kirchoefer S W, Chrisey D B, Levy J, Hubert C 1998 in: O. Auciello (Ed.), Integrated Ferroelectrics, Proceedings of the 10th International Symposium on Integrated Ferroelectrics, Monterey, U.S.A, March 1—4 22 279

    [16]

    Jain M, Majumder S B, Katiyar R S, Miranda F A, Van Keuls F W 2003 Appl. Phys. Lett. 82 1911

    [17]

    Joshi P C, Cole M W 2000 Appl. Phys. Lett. 77 289

    [18]

    Kim W J, Chang W, Qadri S B, Pond J M, Kirchoefer S W, Chrisey D B, Horwitz J S 2000 Appl. Phys. Lett. 76 1185

    [19]

    Hubert C, Levy J, Rivkin T V, Carlson C, Parilla P A, Perkins J D, Ginley D S 2001 Appl. Phys. Lett. 79 2058

    [20]

    Kim W J, Wu H D, Chang W, Qadri S B, Pond J M, Kirchoefer S W, Chrisey D B, Horwitz J S 2000 J. Appl. Phys. 88 5448

    [21]

    Navi N, Kim H, Horwitz J S, Wu H D, Qadri S B 2003 Appl. Phys. A 76 841

    [22]

    Ding Y P, Wu J S, Meng Z Y, Chan H L, Choy Z L 2002 Materials Chemistry and Physics 75 220

    [23]

    Park B H, Gim Y, Fan Y, Jia Q X, Lu P 2000 Appl.Phy.Lett. 77 2587

    [24]

    Carlson C M, Rivkin T V, Parilla P A, Perking J D, Ginley D B, Kozyerv A B, Oshadchy V N, Pavlov A S 2000 Appl.Phy.Lett. 76 1920

    [25]

    Lebedev O I, Hamet J F, Van Tendeloo G , Beaumont V , Raveau B 2001 J . Appl. Phys .90 5261

    [26]

    Schuller Y K 1980 Phys. Rev. B 24 1597

  • [1] 齐海东, 王晶, 陈中军, 吴忠华, 宋西平. 温度对马氏体和铁素体晶格常数影响规律.  , 2022, 71(9): 098301. doi: 10.7498/aps.71.20211954
    [2] 刘英光, 郝将帅, 任国梁, 张静文. 不同周期结构硅锗超晶格导热性能研究.  , 2021, 70(7): 073101. doi: 10.7498/aps.70.20201789
    [3] 陆益敏, 黄国俊, 程勇, 王赛, 刘旭, 韦尚方, 米朝伟. 脉冲激光沉积无氢钨掺杂类金刚石膜的摩擦与机械性能.  , 2021, 70(4): 046801. doi: 10.7498/aps.70.20201505
    [4] 王伟, 唐佳伟, 王乐天, 陈小兵. 脉冲激光沉积法制备高温压电薄膜0.20 BiInO3-0.80PbTiO3(已撤稿).  , 2013, 62(23): 237701. doi: 10.7498/aps.62.237701
    [5] 徐韵, 李云鹏, 金璐, 马向阳, 杨德仁. 脉冲激光沉积法制备的ZnO薄膜的低阈值电抽运紫外随机激射.  , 2013, 62(8): 084207. doi: 10.7498/aps.62.084207
    [6] 冯现徉, 逯瑶, 蒋雷, 张国莲, 张昌文, 王培吉. In掺杂ZnO超晶格光学性质的研究.  , 2012, 61(5): 057101. doi: 10.7498/aps.61.057101
    [7] 郑树文, 范广涵, 章勇, 何苗, 李述体, 张涛. Be和Ca掺杂纤锌矿ZnO的晶格常数与能带特性研究.  , 2012, 61(22): 227101. doi: 10.7498/aps.61.227101
    [8] 苏少坚, 成步文, 薛春来, 张东亮, 张广泽, 王启明. GeSn合金的晶格常数对Vegard定律的偏离.  , 2012, 61(17): 176104. doi: 10.7498/aps.61.176104
    [9] 蒋雷, 王培吉, 张昌文, 冯现徉, 逯瑶, 张国莲. 超晶格SnO2掺Cr的电子结构和光学性质的研究.  , 2011, 60(9): 093101. doi: 10.7498/aps.60.093101
    [10] 李世帅, 冯秀鹏, 黄金昭, 刘春彦, 张仲, 陶冶微. Zn1-x-yNaxCoyO薄膜的脉冲激光沉积制备及表征.  , 2011, 60(5): 057105. doi: 10.7498/aps.60.057105
    [11] 穆武第, 程海峰, 陈朝辉, 唐耿平, 吴志桥. 粗糙界面对Bi2Te3/PbTe超晶格热电优值影响的理论分析.  , 2009, 58(2): 1212-1218. doi: 10.7498/aps.58.1212
    [12] 熊 飞, 张 辉, 李洪山, 张鹏翔, 蒋最敏. 退火氧压对YBa2Cu3O7-x薄膜中的激光感生热电电压效应的影响.  , 2008, 57(8): 5237-5243. doi: 10.7498/aps.57.5237
    [13] 刘 婷, 谈松林, 张 辉, 秦 毅, 张鹏翔. 氧压对SrTiO3和SrNb0.2Ti0.8O3薄膜晶格参数的影响及激光感生热电电压效应.  , 2008, 57(7): 4424-4427. doi: 10.7498/aps.57.4424
    [14] 李志华, 王文新, 刘林生, 蒋中伟, 高汉超, 周均铭. As保护下的生长中断时间对AlSb/InAs超晶格界面粗糙度的影响.  , 2007, 56(3): 1785-1789. doi: 10.7498/aps.56.1785
    [15] 魏智强, 夏天东, 王 君, 吴志国, 闫鹏勋. 纳米镍粉体的晶格膨胀.  , 2007, 56(2): 1004-1008. doi: 10.7498/aps.56.1004
    [16] 邓成良, 邵明珠, 罗诗裕. 带电粒子同超晶格的相互作用与系统的混沌行为.  , 2006, 55(5): 2422-2426. doi: 10.7498/aps.55.2422
    [17] 谈松林, 张 辉, 崔文东, 袁 圆, 张鹏翔. Ag掺杂的La0.67Pb0.33MnO3薄膜中激光感生热电电压效应.  , 2006, 55(8): 4226-4231. doi: 10.7498/aps.55.4226
    [18] 顾培夫, 陈海星, 秦小芸, 刘 旭. 基于薄膜光子晶体超晶格理论的偏振带通滤波器.  , 2005, 54(2): 773-776. doi: 10.7498/aps.54.773
    [19] 刘 震, 王淑芳, 赵嵩卿, 周岳亮. 利用脉冲激光沉积技术在双轴织构的Ni基带上外延CeO2薄膜.  , 2005, 54(12): 5820-5823. doi: 10.7498/aps.54.5820
    [20] 张端明, 关 丽, 李智华, 钟志成, 侯思普, 杨凤霞, 郑克玉. 脉冲激光制膜过程中等离子体演化规律的研究.  , 2003, 52(1): 242-246. doi: 10.7498/aps.52.242
计量
  • 文章访问数:  9141
  • PDF下载量:  905
  • 被引次数: 0
出版历程
  • 收稿日期:  2010-03-16
  • 修回日期:  2010-04-28
  • 刊出日期:  2011-01-15

/

返回文章
返回
Baidu
map