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The two-dimensional numerical model used is based on solutions of fluid equations in the drift-diffusion approximation for the electron and ion transport coupled with Poisson’s equation for electric field to simulate microcavity discharge qualities. The computation results show the potential profile, electron density distribution, ion density distribution, and electron temperature spatial distribution at the argon pressure of 100 Torr. The potential contour shows that the radial component of the electric field becomes very important as the forming of the cathode sheath. The results indicate the peak electron density is 1020 m-3, and the electron temperature is on the order of several to tens of eV.
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Keywords:
- microcavity discharge(MCD) /
- plasma simulation /
- fluid model
[1] Kothnur P S, Yuan X, Raja L L 2003 Appl.Phys. Lett. 82 529
[2] Kothnur P S, Raja L L 2005 J. Appl. Phys. 97 043305
[3] Kushner M J 2004 J. Appl. Phys. 95 846
[4] Miclea M, Kunze K, Heitmann U, Florek S, Franzke J, Niemax K 2005 J. Phys. D: Appl. Phys. 38 1709
[5] Munoz-Serrano E, Hagelaar G, Callegari T, Boeuf J P, Pitchford L C 2006 Plasma Phys. Control. Fusion 48 391
[6] Deconinck T, Raja L L 2009 Plasma Process. Polym. 6 335
[7] Yao X L, Wang X B, Lai J J 2003 Acta Phys. Sin. 52 1450 (in Chinese)[姚细林、王新兵、赖建军 2003 52 1450]
[8] Zhou L N, Wang X B 2004 Acta Phys. Sin. 53 3440 (in Chinese)[周俐娜、王新兵 2004 53 3440]
[9] Boeuf J P, Pitchford L C 1995 Phys. Rev. E 51 1376
[10] Zhang H Y, Wang D Z, Wang X G 2007 Chin. Phys. 16 1089
[11] Li Y X, Ma Y, Shao X J, Zhang G J 2010 Acta Phys. Sin. 59 8747 (in Chinese)[李娅西、马 跃、邵先军、张冠军 2010 物 理学报 59 8747] 〖12] Ouyang J M, Shao F Q, Wang L, Fang T Z, Liu J Q 2006 Acta Phys. Sin. 55 4974 (in Chinese)[欧阳建明、邵福球、王 龙、房同珍、刘建全 2006 55 4974]
[12] Brown S C 1966 Basic Data of Plasma Physics (Massachusetts: Massachusetts Institute of Technology Press)p182
[13] Passchier J D P, Goedheer W J J 1993 J. Appl. Phys. 74 3744
[14] Zhao Y L 2008 MS Thesis(Dalian: Dalian University of Technology)(in Chinese) [赵永莉 2008 硕士学位论文 (大连:大连理工大学)]
[15] Barnes M S, Colter T J, Elta M E 1986 J. Appl. Phys. 61 81
[16] Qiu L, Meng Y D, Ren Z X 2006 Acta Phys. Sin. 55 5872 (in Chinese)[裘 亮、孟月东、任兆杏 2006 55 5872]
[17] Xia G Q, Sadeghi N 2009 29th International Conference on Phenomena in Ionized Gases, Cancún, México, July 12—17, 2009, p10
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[1] Kothnur P S, Yuan X, Raja L L 2003 Appl.Phys. Lett. 82 529
[2] Kothnur P S, Raja L L 2005 J. Appl. Phys. 97 043305
[3] Kushner M J 2004 J. Appl. Phys. 95 846
[4] Miclea M, Kunze K, Heitmann U, Florek S, Franzke J, Niemax K 2005 J. Phys. D: Appl. Phys. 38 1709
[5] Munoz-Serrano E, Hagelaar G, Callegari T, Boeuf J P, Pitchford L C 2006 Plasma Phys. Control. Fusion 48 391
[6] Deconinck T, Raja L L 2009 Plasma Process. Polym. 6 335
[7] Yao X L, Wang X B, Lai J J 2003 Acta Phys. Sin. 52 1450 (in Chinese)[姚细林、王新兵、赖建军 2003 52 1450]
[8] Zhou L N, Wang X B 2004 Acta Phys. Sin. 53 3440 (in Chinese)[周俐娜、王新兵 2004 53 3440]
[9] Boeuf J P, Pitchford L C 1995 Phys. Rev. E 51 1376
[10] Zhang H Y, Wang D Z, Wang X G 2007 Chin. Phys. 16 1089
[11] Li Y X, Ma Y, Shao X J, Zhang G J 2010 Acta Phys. Sin. 59 8747 (in Chinese)[李娅西、马 跃、邵先军、张冠军 2010 物 理学报 59 8747] 〖12] Ouyang J M, Shao F Q, Wang L, Fang T Z, Liu J Q 2006 Acta Phys. Sin. 55 4974 (in Chinese)[欧阳建明、邵福球、王 龙、房同珍、刘建全 2006 55 4974]
[12] Brown S C 1966 Basic Data of Plasma Physics (Massachusetts: Massachusetts Institute of Technology Press)p182
[13] Passchier J D P, Goedheer W J J 1993 J. Appl. Phys. 74 3744
[14] Zhao Y L 2008 MS Thesis(Dalian: Dalian University of Technology)(in Chinese) [赵永莉 2008 硕士学位论文 (大连:大连理工大学)]
[15] Barnes M S, Colter T J, Elta M E 1986 J. Appl. Phys. 61 81
[16] Qiu L, Meng Y D, Ren Z X 2006 Acta Phys. Sin. 55 5872 (in Chinese)[裘 亮、孟月东、任兆杏 2006 55 5872]
[17] Xia G Q, Sadeghi N 2009 29th International Conference on Phenomena in Ionized Gases, Cancún, México, July 12—17, 2009, p10
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