锆酸铅基反铁电薄膜研究现状与展望

张天富; 司洋洋; 黎意杰; 陈祖煌

doi:10.7498/aps.72.20230389

摘要

距离发现反铁电已有70多年的历史, 其独特的电场诱导相变行为使其在储能、换能器、驱动器、电卡制冷、负电容晶体管、热管理等领域显示出了巨大的应用价值. 随着薄膜生长技术的发展及器件小型化、集成化趋势的需求, 反铁电薄膜受到越来越多的关注. 大量研究表明, 反铁电从块体到薄膜显现出与块体不同的新奇物性, 同时也面临更多挑战, 如尺寸效应使得其反铁电特性在临界厚度下减弱甚至消失等. 在此基础上, 回顾了锆酸铅基反铁电研究的发展历史, 从反铁电的起源、结构、相变到应用等方面进行了讨论. 希望能够吸引更多的研究者关注反铁电薄膜的发展, 探索未知的奥秘, 共同开发更多的新材料和新应用.

关键词:

反铁电 /
锆酸铅 /
结构 /
应用

Abstract

It has been more than 70 years since the first anti-ferroelectric was discovered. Its unique electric-field-induced phase transition behavior shows great potential applications in the fields of energy storage, electrocaloric, negative capacitance, thermal switching, etc. With the development of advanced synthesis technology and the trend of miniaturization and integration of devices, high-quality functional oxide films have received more and more attention. A large number of studies have shown that anti-ferroelectric thin film exhibits more novel properties than bulk, but it also faces more challenges, such as the disappearance of antiferroelectricity under a critical thickness induced by size effect. In this paper, we review the development history of lead zirconate-based anti-ferroelectric thin films, and discuss their structures, phase transitions and applications. We hope that this paper can attract more researchers to pay attention to the development of anti-ferroelectric thin films, so as to develop more new materials and explore new applications.

Keywords:

作者及机构信息

哈尔滨工业大学(深圳)材料科学与工程学院, 深圳　518055

通信作者: 陈祖煌, zuhuang@hit.edu.cn

基金项目: 广东省基础与应用基础研究基金(批准号: 2020B1515020029)、深圳市科技创新项目(批准号: JCYJ20200109112829287)、中国博士后科学基金(批准号: 2022T150158)、广东省重大人才工程引进类(批准号: 2019QN01C202)和深圳市科技计划(批准号: KQTD20200820113045083)资助的课题.

Authors and contacts

School of Materials Science and Engineering, Harbin Institute of Technology, Shenzhen 518055, China

Corresponding author: Chen Zu-Huang, zuhuang@hit.edu.cn

Funds: Project supported by the Guangdong Basic and Applied Basic Research Foundation, China (Grant No. 2020B1515020029), the Shenzhen Science and Technology Innovation Project, China (Grant No. JCYJ20200109112829287), the China Postdoctoral Science Foundation (Grant No. 2022T150158), the Guangdong Major Talent Introduction Project, China (Grant No. 2019QN01C202), and the Shenzhen Science and Technology Program, China (Grant No. KQTD20200820113045083)

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参考文献

[1]	Acharya M, Banyas E, Ramesh M, Jiang Y, Fernandez A, Dasgupta A, Ling H, Hanrahan B, Persson K, Neaton J B, Martin L W 2022 Adv. Mater. 334 2105967 Google Scholar
[2]	Zhang S T, Kounga A B, Jo W, Jamin C, Seifert K, Granzow T, Rödel J, Damjanovic D 2009 Adv. Mater. 21 4716 Google Scholar
[3]	Geng W, Liu Y, Meng X, Bellaiche L, Scott J F, Dkhil B, Jiang A 2015 Adv. Mater. 27 3165 Google Scholar
[4]	Aryana K, Tomko J A, Gao R, et al. 2022 Nat. Commun. 13 1573 Google Scholar
[5]	Qiao L, Song C, Sun Y, Fayaz M U, Lu T, Yin S, Chen C, Xu H, Ren T L, Pan F 2021 Nat. Commun. 12 4215 Google Scholar
[6]	吴金根, 高翔宇, 陈建国, 王春明, 张树君, 董蜀湘 2018 67 207701 Google Scholar Wu J G, Gao X Y, Chen J G, Wang C M, Zhang S J, Dong S X 2018 Acta Phys. Sin. 67 207701 Google Scholar
[7]	Kittel C 1951 Phys. Rev. 82 729 Google Scholar
[8]	Shirane G, Sawaguchi E, Takagi Y 1951 Phys. Rev. 84 476 Google Scholar
[9]	He X, Chen C, Li C, Zeng H, Yi Z 2019 Adv. Funct. Mater. 29 1900918 Google Scholar
[10]	Li D, Zhou D, Wang D, Zhao W, Guo Y, Shi Z 2022 Adv. Funct. Mater. 32 2111776 Google Scholar
[11]	Yao Y, Naden A, Tian M, Lisenkov S, Beller Z, Kumar A, Kacher J, Ponomareva I, Bassiri-Gharb N 2023 Adv. Mater. 35 2206541 Google Scholar
[12]	Perez-Tomas A, Lira-Cantu M, Catalan G 2016 Adv. Mater. 28 9644 Google Scholar
[13]	Apachitei G, Peters J J P, Sanchez A M, Kim D J, Alexe M 2017 Adv. Electron. Mater. 3 1700126 Google Scholar
[14]	Huang X X, Zhang T F, Gao R Z, Huang H B, Ge P Z, Tang H, Tang X G 2021 ACS Appl. Mater. Inter. 13 21331 Google Scholar
[15]	Wei X K, Domingo N, Sun Y, Balke N, Dunin-Borkowski R E, Mayer J 2022 Adv. Energy Mater. 12 2201199 Google Scholar
[16]	Jaffe B, Roth R, Marzullo S 1954 J. Appl. Phys. 25 809 Google Scholar
[17]	Megaw H D 1946 Proc. Phys. Soc. 58 133 Google Scholar
[18]	Smepard R 1950 J. Am. Ceram. Soc. 33 63 Google Scholar
[19]	Shirane G, Sawaguchi E, Takeda A 1950 Phys. Rev. 80 485 Google Scholar
[20]	Corker D L, Glazer A M, Dec J, Roleder K, Whatmore R W 1997 Acta Crystallogr. Sect. B:Struct. Sci. 53 135 Google Scholar
[21]	Jona F, Shirane G, Mazzi F, Pepinsky R 1957 Phys. Rev. 105 849 Google Scholar
[22]	Glazer A, Roleder K, Dec J 1993 Acta Crystallogr. Sect. B:Struct. Sci. 49 846 Google Scholar
[23]	Fujishita H, Shiozaki Y, Sawaguchi E 1979 J. Phys. Soc. Jpn. 46 1391 Google Scholar
[24]	Tanaka M, Saito R, Tsuzuki K 1982 J. Phys. Soc. Jpn. 51 2635 Google Scholar
[25]	Dai X, Li J F, Viehland D 1995 Phys. Rev. B 51 2651 Google Scholar
[26]	Ayyub P, Chattopadhyay S, Pinto R, Multani M 1998 Phys. Rev. B 57 R5559 Google Scholar
[27]	Pintilie L, Boldyreva K, Alexe M, Hesse D 2008 J. Appl. Phys. 103 024101 Google Scholar
[28]	Wei X K, Tagantsev A K, Kvasov A, Roleder K, Jia C L, Setter N 2014 Nat. Commun. 5 3031 Google Scholar
[29]	Wei X K, Vaideeswaran K, Sandu C S, Jia C L, Setter N 2015 Adv. Mater. Inter. 2 1500349 Google Scholar
[30]	Aramberri H, Cazorla C, Stengel M, Íñiguez J 2021 npj Compt. Mater. 7 196 Google Scholar
[31]	Burkovsky R G, Lityagin G A, Ganzha A E, Vakulenko A F, Gao R, Dasgupta A, Xu B, Filimonov A V, Martin L W 2022 Phys. Rev. B 105 125409 Google Scholar
[32]	Fujishita H, Katano S 1997 J. Phys. Soc. Jpn. 66 3484 Google Scholar
[33]	Fujishita H, Shiozaki Y, Achiwa N, Sawaguchi E 1982 J. Phys. Soc. Jpn. 51 3583 Google Scholar
[34]	Samara G A 1970 Phys. Rev. B 1 3777 Google Scholar
[35]	Tagantsev A K, Vaideeswaran K, Vakhrushev S B, Filimonov A V, Burkovsky R G, Shaganov A, Andronikova D, Rudskoy A I, Baron A Q, Uchiyama H, Chernyshov D, Bosak A, Ujma Z, Roleder K, Majchrowski A, Ko J H, Setter N 2013 Nat. Commun. 4 2229 Google Scholar
[36]	Hlinka J, Ostapchuk T, Buixaderas E, Kadlec C, Kuzel P, Gregora I, Kroupa J, Savinov M, Klic A, Drahokoupil J 2014 Phys. Rev. Lett. 112 197601 Google Scholar
[37]	Bussmann-Holder A, Ko J H, Majchrowski A, Górny M, Roleder K 2013 J. Phys. :Condens. Matter 25 212202 Google Scholar
[38]	Ko J H, Górny M, Majchrowski A, Roleder K, Bussmann-Holder A 2013 Phys. Rev. B 87 184110 Google Scholar
[39]	Jaffe B 1961 Proc. IRE 49 1264 Google Scholar
[40]	Thacher P 1968 J. Appl. Phys. 39 1996 Google Scholar
[41]	Liu J, An K, Liu L, He J, Chou X, Xue C 2015 J. Mater. Sci. :Mater. Electron. 27 1758 Google Scholar
[42]	An K, Liu L, Zhang P, He J, Chou X, Xue C, Zhang W 2016 Microelectron. Eng. 162 45 Google Scholar
[43]	An K, Zhang H, Chou X, Xue C, Zhang W 2016 Micro Nano Lett. 11 803 Google Scholar
[44]	Uchino K 2016 Actuators 5 11 Google Scholar
[45]	Zhuo F, Damjanovic D, Li Q, Zhou Y, Ji Y, Yan Q, Zhang Y, Zhou Y, Chu X 2019 Mater. Horiz. 6 1699 Google Scholar
[46]	Cordero F 2015 Materials 8 8195 Google Scholar
[47]	Haertling G H, Land C E 1971 J. Am. Ceram. Soc. 54 1 Google Scholar
[48]	Pan W, Zhang Q, Bhalla A, Cross L E 1989 J. Am. Ceram. Soc. 72 571 Google Scholar
[49]	Xu Y, Yang Z, Xu K, Cao Y, Tian Y, Guo L, Tian J, Tian H, Liu X, Lin L, Wang G 2021 Chem. Eng. J. 426 131047 Google Scholar
[50]	Zhao L, Liu Q, Gao J, Zhang S, Li J F 2017 Adv. Mater. 29 1701824 Google Scholar
[51]	Randall C A, Fan Z, Reaney I, Chen L Q, Trolier-McKinstry S 2021 J. Am. Ceram. Soc. 104 3775 Google Scholar
[52]	Si Y, Zhang T, Chen Z, Zhang Q, Xu S, Lin T, Huang H, Zhou C, Chen S, Liu S, DongY, Liu C, Tang Y, Lu Y, Jin K, Guo E J, Lin X 2022 ACS Appl. Mater. Inter. 14 51096 Google Scholar
[53]	Zhang T F, Tang X G, Liu Q X, Jiang Y P, Huang X X 2015 J. Am. Ceram. Soc. 98 551 Google Scholar
[54]	Jiang R J, Cao Y, Geng W R, Zhu M X, Tang Y L, Zhu Y L, Wang Y, Gong F, Liu S Z, Chen Y T, Liu J, Liu N, Wang J H, Lv X D, Chen S J, Ma X L 2023 Nano Lett. 23 1522 Google Scholar
[55]	Pan H, Tian Z, Acharya M, Huang X, Kavle P, Zhang H, Wu L, Chen D, Carroll J, Scales R, Meyers C J G, Coleman K, Hanrahan B, Spanier J E, Martin L W 2023 Adv. Mater. 2300257 Google Scholar
[56]	Zhang T F, Tang X G, Ge P Z, Liu Q X, Jiang Y P 2017 Ceram. Int. 43 16300 Google Scholar
[57]	Zhang T F, Huang X X, Tang X G, Jiang Y P, Liu Q X, Lu B, Lu S G 2018 Sci. Rep. 8 396 Google Scholar
[58]	Zhang T F, Tang X G, Liu Q X, Jiang Y P, Huang X X, Zhou Q F 2016 J. Phys. D: Appl. Phys. 49 095302 Google Scholar
[59]	Hu Z, Ma B, Koritala R E, Balachandran U 2014 Appl. Phys. Lett. 104 263902 Google Scholar
[60]	Fesenko O E, Kolesova R V, Sindeyev Y G 1978 Ferroelectrics 20 177 Google Scholar
[61]	Ostapchuk T, Petzelt J, Zelezny V, Kamba S, Bovtun V, Porokhonskyy V, Pashkin A, Kuzel P, Glinchuk M, Bykov I 2001 J. Phys.: Condens. Matter 13 2677 Google Scholar
[62]	Íñiguez J, Stengel M, Prosandeev S, Bellaiche L 2014 Phys. Rev. B 90 220103 Google Scholar
[63]	Xu B, Hellman O, Bellaiche L 2019 Phys. Rev. B 100 020102 Google Scholar
[64]	Vales-Castro P, Roleder K, Zhao L, Li J F, Kajewski D, Catalan G 2018 Appl. Phys. Lett. 113 132903 Google Scholar
[65]	Lisenkov S, Yao Y, Bassiri-Gharb N, Ponomareva I 2020 Phys. Rev. B 102 104101 Google Scholar
[66]	Wei X K, Jia C L, Du H C, Roleder K, Mayer J, Dunin-Borkowski R E 2020 Adv. Mater. 32 1907208 Google Scholar
[67]	Wei X K, Jia C L, Roleder K, Dunin-Borkowski R E, Mayer J 2021 Adv. Funct. Mater. 31 2008609 Google Scholar
[68]	Bharadwaja S, Krupanidhi S 2001 J. Appl. Phys. 89 4541 Google Scholar
[69]	Si M, Lyu X, Shrestha P R, Sun X, Wang H, Cheung K P, Ye P D 2019 Appl. Phys. Lett. 115 072107 Google Scholar
[70]	Roleder K, Dee J 1989 J. Phys.: Condens. Matter 1 1503 Google Scholar
[71]	Mani B, Chang C M, Lisenkov S, Ponomareva I 2015 Phys. Rev. Lett. 115 097601 Google Scholar
[72]	Roy Chaudhuri A, Arredondo M, Hähnel A, Morelli A, Becker M, Alexe M, Vrejoiu I 2011 Phys. Rev. B 84 054112 Google Scholar
[73]	Boldyreva K, Pintilie L, Lotnyk A, Misirlioglu I B, Alexe M, Hesse D 2007 Appl. Phys. Lett. 91 122915 Google Scholar
[74]	Chen D, Nelson C T, Zhu X, Serrao C R, Clarkson J D, Wang Z, Gao Y, Hsu S L, Dedon L R, Chen Z, Yi D, Liu H J, Zeng D, Chu Y H, Liu J, Schlom D G, Ramesh R 2017 Nano Lett. 17 5823 Google Scholar
[75]	Reyes-Lillo S E, Rabe K M 2013 Phys. Rev. B 88 180102 Google Scholar
[76]	Lee H J, Lee M, Lee K, Jo J, Yang H, Kim Y, Chae S C, Waghmare U, Lee J H 2020 Science 369 1343 Google Scholar
[77]	Cheema S S, Shanker N, Hsu S L, Rho Y, Hsu C H, Stoica V A, Zhang Z, Freeland J W, Shafer P, Grigoropoulos C 2022 Science 376 648 Google Scholar
[78]	Hou C, Huang W, Zhao W, Zhang D, Yin Y, Li X 2017 ACS Appl. Mater. Inter. 9 20484 Google Scholar
[79]	Zhao P, Tang B, Fang Z, Si F, Yang C, Liu G, Zhang S 2021 J. Materiomics 7 195 Google Scholar
[80]	Kim J, Saremi S, Acharya M, Velarde G, Parsonnet E, Donahue P, Qualls A, Garcia D, Martin L W 2020 Science 369 81 Google Scholar
[81]	Li Y Z, Lin J L, Bai Y, Li Y, Zhang Z D, Wang Z J 2020 ACS Nano 14 6857 Google Scholar
[82]	Liu Z, Lu T, Xue F, Nie H, Wang G 2020 Sci. Adv. 6 eaba0367 Google Scholar
[83]	Li J, Li F, Xu Z, Zhang S 2018 Adv. Mater. 30 e1802155 Google Scholar
[84]	Zhu L F, Deng S, Zhao L, Li G, Wang Q, Li L, Yan Y, Qi H, Zhang B P, Chen J, Li J F 2023 Nat. Commun. 14 1166 Google Scholar
[85]	Luo Y, Wang C, Chen C, Gao Y, Sun F, Li C, Yin X, Luo C, Kentsch U, Cai X, Bai M, Fan Z, Qin M, Zeng M, Dai J, Zhou G, Lu X, Lou X, Zhou S, Gao X, Chen D, Liu J M 2023 Appl. Phys. Rev. 10 011403 Google Scholar
[86]	Li Z, Fu Z, Cai H, Hu T, Yu Z, Luo Y, Zhang L, Yao H, Chen X, Zhang S, Wang G, Dong X, Xu F 2022 Sci. Adv. 8 eabl9088 Google Scholar
[87]	Ge G, Shi C, Chen C, Shi Y, Yan F, Bai H, Yang J, Lin J, Shen B, Zhai J 2022 Adv. Mater. 34 2201333 Google Scholar
[88]	Nguyen M D, Birkhölzer Y A, Houwman E P, Koster G, Rijnders G 2022 Adv. Energy Mater. 12 2200517 Google Scholar
[89]	Luo N, Han K, Cabral M J, Liao X, Zhang S, Liao C, Zhang G, Chen X, Feng Q, Li J F, Wei Y 2020 Nat. Commun. 11 4824 Google Scholar
[90]	Qi H, Zuo R, Xie A, Tian A, Fu J, Zhang Y, Zhang S 2019 Adv. Funct. Mater. 29 1903877 Google Scholar
[91]	Wang M, Feng Q, Luo C, Lan Y, Yuan C, Luo N, Zhou C, Fujita T, Xu J, Chen G, Wei Y 2021 ACS Appl. Mater. Inter. 13 51218 Google Scholar
[92]	Chen L, Long F, Qi H, Liu H, Deng S, Chen J 2021 Adv. Funct. Mater. 32 2110478 Google Scholar
[93]	Owate I O, Freer R 1992 J. Appl. Phys. 72 2418 Google Scholar
[94]	Xie A, Qi H, Zuo R 2020 ACS Appl. Mater. Inter. 12 19467 Google Scholar
[95]	Jin Y, Wang J, Jiang L, Yao Y, Huang Y, Chen P, Chang W 2021 Ceram. Intl. 47 2869 Google Scholar
[96]	Chen G, Zhao J, Li S, Zhong L 2012 Appl. Phys. Lett. 100 222904 Google Scholar
[97]	Tong S 2021 J. Adv. Ceram. 10 181 Google Scholar
[98]	Bian F, Yan S, Xu C, Liu Z, Chen X, Mao C, Cao F, Bian J, Wang G, Dong X 2018 J. Eur. Ceram. Soc. 38 3170 Google Scholar
[99]	Ren P, Ren D, Sun L, Yan F, Yang S, Zhao G 2020 J. Eur. Ceram. Soc. 40 4495 Google Scholar
[100]	Zhang G, Chen Z, Fan B, Liu J, Chen M, Shen M, Liu P, Zeng Y, Jiang S, Wang Q 2016 APL Mater. 4 064103 Google Scholar
[101]	Pan H, Li F, Liu Y, Zhang Q H, Wang M, Lan S, Zheng Y P, Ma J, Gu L, Shen Y, Yu P, Zhang S J, Chen L Q, Lin Y H, Nan C W 2019 Science 365 578 Google Scholar
[102]	Han K, Luo N, Mao S, Zhuo F, Chen X, Liu L, Hu C, Zhou H, Wang X, Wei Y 2019 J. Materiomics 5 597 Google Scholar
[103]	Yang J, Zhao Y, Lou X, Wu J, Hao X 2020 J. Mater. Chem. C 8 4030 Google Scholar
[104]	Ma W, Zhu Y, Marwat M A, Fan P, Xie B, Salamon D, Ye Z G, Zhang H 2019 J. Mater. Chem. C 7 281 Google Scholar
[105]	Yuan Q, Yao F, Wang Y, Ma R, Wang H 2017 J. Mater. Chem. C 5 9552 Google Scholar
[106]	Wu Q, Zhao Y, Zhou Y, Chen X, Wu X, Zhao S 2021 J. Alloy. Compd. 881 160576 Google Scholar
[107]	Fan P, Zhang S T, Xu J, Zang J, Samart C, Zhang T, Tan H, Salamon D, Zhang H, Liu G 2020 J. Mater. Chem. C 8 5681 Google Scholar
[108]	Silva J P B, Silva J M B, Oliveira M J S, Weingärtner T, Sekhar K C, Pereira M, Gomes M J M 2018 Adv. Funct. Mater. 29 1807196 Google Scholar
[109]	Nguyen M D, Houwman E P, Do M T, Rijnders G 2020 Energy Storage Mater. 25 193 Google Scholar
[110]	Yan F, Bai H, Shi Y, Ge G, Zhou X, Lin J, Shen B, Zhai J 2021 Chem. Eng. J. 425 130669 Google Scholar
[111]	Mischenko A S, Zhang Q, Scott J F, Whatmore R W, Mathur N D 2006 Science 311 1270 Google Scholar
[112]	Kobeko P, Kurtschatov J 1930 Z. Phys. 66 192 Google Scholar
[113]	Granicher H 1956 Helv. Phys. Acta 29 210
[114]	Bai Y, Zheng G P, Shi S Q 2011 Mater. Res. Bull. 46 1866 Google Scholar
[115]	Allouche B, Hwang H J, Yoo T J, Lee B H 2020 Nanoscale 12 3894 Google Scholar
[116]	Guo M, Wu M, Gao W, Sun B, Lou X 2019 J. Mater. Chem. C 7 617 Google Scholar
[117]	Peng B, Fan H, Zhang Q 2013 Adv. Funct. Mater. 23 2987 Google Scholar
[118]	Wu M, Song D, Guo M, Bian J, Li J, Yang Y, Huang H, Pennycook S J, Lou X 2019 ACS Appl. Mater. Inter. 11 36863 Google Scholar
[119]	Vales-Castro P, Faye R, Vellvehi M, Nouchokgwe Y, Perpiñà X, Caicedo J M, Jordà X, Roleder K, Kajewski D, Perez-Tomas A, Defay E, Catalan G 2021 Phys. Rev. B 103 054112 Google Scholar
[120]	Damjanovic D 2005 J. Am. Ceram. Soc. 88 2663 Google Scholar
[121]	Jo W, Dittmer R, Acosta M, Zang J, Groh C, Sapper E, Wang K, Rödel J 2012 J. Electroceram. 29 71 Google Scholar
[122]	Li P, Zhai J, Shen B, Zhang S, Li X, Zhu F, Zhang X 2018 Adv. Mater. 30 1705171 Google Scholar
[123]	Park S E, Pan M J, Markowski K, Yoshikawa S, Cross L E 1997 J. Appl. Phys. 82 1798 Google Scholar
[124]	Zhuo F, Li Q, Zhou Y, Ji Y, Yan Q, Zhang Y, Xi X, Chu X, Cao W 2018 Acta Mater. 148 28 Google Scholar
[125]	Guo Y, Liu Y, Withers R L, Brink F, Chen H 2011 Chem. Mater. 23 219 Google Scholar
[126]	Berlincourt D A 1968 IEEE Trans. Sonic. Ultrason. 15 89 Google Scholar
[127]	Chou X, Guan X, Lv Y, Geng W, Liu J, Xue C, Zhang W 2013 IEEE Electron Dev. Lett. 34 1187 Google Scholar
[128]	Íñiguez J, Zubko P, Luk’yanchuk I, Cano A 2019 Nat. Rev. Mater. 4 243 Google Scholar
[129]	Landauer R 1976 Collect. Phenom. 2 167
[130]	Wong J C, Salahuddin S 2018 Proc. IEEE 107 49 Google Scholar
[131]	Appleby D J, Ponon N K, Kwa K S, Zou B, Petrov P K, Wang T, Alford N M, O’Neill A 2014 Nano Lett. 14 3864 Google Scholar
[132]	Hoffmann M, Wang Z, Tasneem N, et al. 2022 Nat. Commun. 13 1228 Google Scholar
[133]	Cheema S S, Shanker N, Wang L C, et al. 2022 Nature 604 65 Google Scholar
[134]	Sheikholeslami A, Gulak P G 2000 Proc. IEEE 88 667 Google Scholar
[135]	Vopson M M, Tan X 2016 IEEE Electron Dev. Lett. 37 1551 Google Scholar
[136]	Morris D H, Avci U E, Young I A 2019 EP Patent 3576092
[137]	Esaki L, Chang L 1970 Phys. Rev. Lett. 25 653 Google Scholar
[138]	Kohlstedt H, Pertsev N A, Rodríguez Contreras J, Waser R 2005 Phys. Rev. B 72 125341 Google Scholar
[139]	Guo M, Qian Y, Qi H, Bi K, Chen Y 2020 Carbon 157 185 Google Scholar
[140]	Lee S, Hippalgaonkar K, Yang F, Hong J, Ko C, Suh J, Liu K, Wang K, Urban J J, Zhang X 2017 Science 355 371 Google Scholar
[141]	Starkiewicz J, Sosnowski L, Simpson O 1946 Nature 158 28 Google Scholar
[142]	Goldstein B, Pensak L 1959 J. Appl. Phys. 30 155 Google Scholar
[143]	Yang S, Seidel J, Byrnes S, Shafer P, Yang C H, Rossell M, Yu P, Chu Y H, Scott J, Ager Iii J 2010 Nat. Nanotech. 5 143 Google Scholar
[144]	Junquera J, Ghosez P 2003 Nature 422 506 Google Scholar
[145]	Nataf G F, Guennou M, Gregg J M, Meier D, Hlinka J, Salje E K H, Kreisel J 2020 Nat. Rev. Phys. 2 634 Google Scholar
[146]	Yang B, Zhang Y, Pan H, Si W, Zhang Q, Shen Z, Yu Y, Lan S, Meng F, Liu Y, Huang H, He J, Gu L, Zhang S, Chen L Q, Zhu J, Nan C W, Lin Y H 2022 Nat. Mater. 21 1074 Google Scholar
[147]	Garcia-Castro A C, Ma Y, Romestan Z, Bousquet E, Cen C, Romero A H 2021 Adv. Funct. Mater. 32 2107135 Google Scholar
[148]	Phuoc N N, Ong C 2013 Adv. Mater. 25 980 Google Scholar
[149]	Catalan G, Noheda B, McAneney J, Sinnamon L, Gregg J 2005 Phys. Rev. B 72 020102 Google Scholar
[150]	Wang J, Wylie-van Eerd B, Sluka T, Sandu C, Cantoni M, Wei X K, Kvasov A, McGilly L J, Gemeiner P, Dkhil B 2015 Nat. Mater. 14 985 Google Scholar

施引文献

图 1 PbZrO₃基反铁电体的重要进展

Fig. 1. Important developments of PbZrO₃ based antiferroelectric.

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图 2 Pb(Zr, Ti)O₃^[46] (a)和(Pb, La)(Zr, Ti)O₃^[47] (b)的二元相图; Pb_0.99Nb_0.02(Zr, Sn, Ti)_0.98O₃^[48] (c)和(Pb_0.97La_0.02)(Zr, Sn, Ti)O₃ ^[48] (d)的三元相图

Fig. 2. Binary phase diagram for Pb(Zr, Ti)O₃^[46] (a) and (Pb, La)(Zr, Ti)O₃^[47] (b); ternary phase diagram for Pb_0.99Nb_0.02(Zr, Sn, Ti)_0.98O₃ ^[48] (c) and Pb_0.97La_0.02(Zr, Sn, Ti)O₃^[48] (d).

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图 3 (a) 改变电子束辐照时间同一区域PZO薄膜的相变行为^[54]; (b) 从(001)和(042)取向PZO薄膜中铅离子位移提取的极化构型^[11]; (c) 不同生长氧压 (120, 80和45 mTorr, 1 Torr = 133.32 Pa) PZO薄膜的极化行为^[55]

Fig. 3. (a) Phase-boundary-driven phase transition in PZO films under the irradiation of an electron beam^[54]; (b) polarization configurations extracted from Pb ions displacements in (001) and (042) oriented PZO films^[11]; (c) polarization-electric field loops of PZO grown at various oxygen pressures (120, 80 and 45 mTorr, 1 Torr = 133.32 Pa)^[55].

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图 4 (a) PZO块体的介电温谱图^[8]; (b) PZO基反铁电薄膜的C-V特性曲线^[59]; (c) PZO薄膜的P-E和I-E回线^[52]; (d) PZO薄膜在直流电场E_DC和交流电场E_AC作用下的电致应变和压电系数^[11]

Fig. 4. (a) Temperature dependent dielectric spectrum of PZO bulk materials, reproduced from^[8]; (b) C-V characteristics of PZO based AFE thin films^[59]; (c) P-E and I-E loops of PZO thin films^[52]; (d) electromechanical response as strain and effective longitudinal piezoelectric coefficient as a function of E_AC and E_DC, respectively^[11].

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图 5 (a) Kittel提出的双子晶格模型; (b) 不同组合多态软模的能量^[62]; (c) PZO中可能存在的调制结构及其能量^[31]; (d) AFE/FE能量与PZO薄膜厚度的关系^[71]

Fig. 5. (a) Antiferroelectric structure model proposed by Kittel; (b) energy difference for different combination of multisoft mode^[62]; (c) proposed modulation structure in PZO and the corresponding energy^[31]; (d) dependence of the AFE/FE energy on thickness of PZO thin film^[71].

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图 6 (a) 不同储能装置的对比示意图; (b) 储能电容器的部分应用场景; (c) 5种常见的电介质材料及其储能示意图

Fig. 6. (a) Ragone plot of different energy storage devices; (b) applications for energy storage capacitors; (c) five distinctive dielectric materials and their energy storage performance.

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图 7 (a) 异价元素Ta掺杂AgNbO₃前后Ag和Nb原子±$[1\overline 1 0]$方向位移波动^[84]; (b) 异价元素Ta掺杂AgNbO₃前后击穿电场、极化强度、储能密度、储能效率的对比^[84]; (c) 离子轰击PZO反铁电薄膜前后的击穿电场和储能对比^[85]

Fig. 7. (a) Ag and Nb atoms displacement fluctuations along ±$[1\overline 1 0]$ of pure AgNbO₃ and Ta doped AgNbO₃^[84]; (b) comparison of breakdown field, polarization, efficiency and energy storage density of pure AgNbO₃ and Ta doped AgNbO₃^[84]; (c) comparison of energy storage performance of PZO thin film before and after ion bombardment^[85].

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图 8 (a) 电卡效应制冷的卡诺循环; (b) PbZr_0.95Ti_0.05O₃薄膜中的电卡温度变化∆T^[111]; (c) 电场响应的PbZrO₃相图及∆T-∆S示意图^[119]

Fig. 8. (a) Carnot cycle of electrocaloric effect refrigeration; (b) temperature change ∆T in PbZr_0.95Ti_0.05O₃ thin film^[111]; (c) tentative phase diagram for PbZrO₃ as a function of electric field and schematic ∆T-∆S diagram^[119].

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图 9 (a) 电致应变的4个主要组成部分; (b) Pb_0.98La_0.02(Zr_0.66Ti_0.10Sn_0.24)_0.995O₃反铁电陶瓷相变过程中应变与电场的关系^[123]; PLZST单晶(c)极化和(d)应变在选定温度下对电场的响应^[45]

Fig. 9. (a) The four main components of electro-strain; (b) strain as a function of electric field during phase transition in Pb_0.98La_0.02(Zr_0.66Ti_0.10Sn_0.24)_0.995O₃ ceramic, reproduced from^[123]; (c) polarization and (d) strain loops of the PLZST single crystals at selected temperatures measured at 1 Hz^[45].

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图 10 (a) 反铁电双电滞回线, 其中BC和B'C'呈现出负电容行为^[132]; (b) 反铁电随机存取存储器的4个可选读出状态^[135]; (c) 反铁电隧道结的示意图^[13]; (d) PZO薄膜实时高低热导率转变^[4]; (e) PZO电容器的稳态光伏响应, 显示超过100 V的开路光电压^[12]

Fig. 10. (a) P-E loop of an antiferroelectric material, segments BC and B'C' represent the unstable negative capacitance (C < 0) regions^[132]; (b) four pseudo-remanent memory states marked on the loop in AFRAM^[135]; (c) schematic representations of expected behaviors of antiferroelectric tunnel junctions^[13]; (d) real-time switching of epitaxial PZO to low and high thermal conductivity^[4]; (e) steady-state photovoltaic response of PZO capacitor, showing an open-circuit photovoltage in excess of 100 V^[12].

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map

[1]	Acharya M, Banyas E, Ramesh M, Jiang Y, Fernandez A, Dasgupta A, Ling H, Hanrahan B, Persson K, Neaton J B, Martin L W 2022 Adv. Mater. 334 2105967 Google Scholar
[2]	Zhang S T, Kounga A B, Jo W, Jamin C, Seifert K, Granzow T, Rödel J, Damjanovic D 2009 Adv. Mater. 21 4716 Google Scholar
[3]	Geng W, Liu Y, Meng X, Bellaiche L, Scott J F, Dkhil B, Jiang A 2015 Adv. Mater. 27 3165 Google Scholar
[4]	Aryana K, Tomko J A, Gao R, et al. 2022 Nat. Commun. 13 1573 Google Scholar
[5]	Qiao L, Song C, Sun Y, Fayaz M U, Lu T, Yin S, Chen C, Xu H, Ren T L, Pan F 2021 Nat. Commun. 12 4215 Google Scholar
[6]	吴金根, 高翔宇, 陈建国, 王春明, 张树君, 董蜀湘 2018 67 207701 Google Scholar Wu J G, Gao X Y, Chen J G, Wang C M, Zhang S J, Dong S X 2018 Acta Phys. Sin. 67 207701 Google Scholar
[7]	Kittel C 1951 Phys. Rev. 82 729 Google Scholar
[8]	Shirane G, Sawaguchi E, Takagi Y 1951 Phys. Rev. 84 476 Google Scholar
[9]	He X, Chen C, Li C, Zeng H, Yi Z 2019 Adv. Funct. Mater. 29 1900918 Google Scholar
[10]	Li D, Zhou D, Wang D, Zhao W, Guo Y, Shi Z 2022 Adv. Funct. Mater. 32 2111776 Google Scholar
[11]	Yao Y, Naden A, Tian M, Lisenkov S, Beller Z, Kumar A, Kacher J, Ponomareva I, Bassiri-Gharb N 2023 Adv. Mater. 35 2206541 Google Scholar
[12]	Perez-Tomas A, Lira-Cantu M, Catalan G 2016 Adv. Mater. 28 9644 Google Scholar
[13]	Apachitei G, Peters J J P, Sanchez A M, Kim D J, Alexe M 2017 Adv. Electron. Mater. 3 1700126 Google Scholar
[14]	Huang X X, Zhang T F, Gao R Z, Huang H B, Ge P Z, Tang H, Tang X G 2021 ACS Appl. Mater. Inter. 13 21331 Google Scholar
[15]	Wei X K, Domingo N, Sun Y, Balke N, Dunin-Borkowski R E, Mayer J 2022 Adv. Energy Mater. 12 2201199 Google Scholar
[16]	Jaffe B, Roth R, Marzullo S 1954 J. Appl. Phys. 25 809 Google Scholar
[17]	Megaw H D 1946 Proc. Phys. Soc. 58 133 Google Scholar
[18]	Smepard R 1950 J. Am. Ceram. Soc. 33 63 Google Scholar
[19]	Shirane G, Sawaguchi E, Takeda A 1950 Phys. Rev. 80 485 Google Scholar
[20]	Corker D L, Glazer A M, Dec J, Roleder K, Whatmore R W 1997 Acta Crystallogr. Sect. B:Struct. Sci. 53 135 Google Scholar
[21]	Jona F, Shirane G, Mazzi F, Pepinsky R 1957 Phys. Rev. 105 849 Google Scholar
[22]	Glazer A, Roleder K, Dec J 1993 Acta Crystallogr. Sect. B:Struct. Sci. 49 846 Google Scholar
[23]	Fujishita H, Shiozaki Y, Sawaguchi E 1979 J. Phys. Soc. Jpn. 46 1391 Google Scholar
[24]	Tanaka M, Saito R, Tsuzuki K 1982 J. Phys. Soc. Jpn. 51 2635 Google Scholar
[25]	Dai X, Li J F, Viehland D 1995 Phys. Rev. B 51 2651 Google Scholar
[26]	Ayyub P, Chattopadhyay S, Pinto R, Multani M 1998 Phys. Rev. B 57 R5559 Google Scholar
[27]	Pintilie L, Boldyreva K, Alexe M, Hesse D 2008 J. Appl. Phys. 103 024101 Google Scholar
[28]	Wei X K, Tagantsev A K, Kvasov A, Roleder K, Jia C L, Setter N 2014 Nat. Commun. 5 3031 Google Scholar
[29]	Wei X K, Vaideeswaran K, Sandu C S, Jia C L, Setter N 2015 Adv. Mater. Inter. 2 1500349 Google Scholar
[30]	Aramberri H, Cazorla C, Stengel M, Íñiguez J 2021 npj Compt. Mater. 7 196 Google Scholar
[31]	Burkovsky R G, Lityagin G A, Ganzha A E, Vakulenko A F, Gao R, Dasgupta A, Xu B, Filimonov A V, Martin L W 2022 Phys. Rev. B 105 125409 Google Scholar
[32]	Fujishita H, Katano S 1997 J. Phys. Soc. Jpn. 66 3484 Google Scholar
[33]	Fujishita H, Shiozaki Y, Achiwa N, Sawaguchi E 1982 J. Phys. Soc. Jpn. 51 3583 Google Scholar
[34]	Samara G A 1970 Phys. Rev. B 1 3777 Google Scholar
[35]	Tagantsev A K, Vaideeswaran K, Vakhrushev S B, Filimonov A V, Burkovsky R G, Shaganov A, Andronikova D, Rudskoy A I, Baron A Q, Uchiyama H, Chernyshov D, Bosak A, Ujma Z, Roleder K, Majchrowski A, Ko J H, Setter N 2013 Nat. Commun. 4 2229 Google Scholar
[36]	Hlinka J, Ostapchuk T, Buixaderas E, Kadlec C, Kuzel P, Gregora I, Kroupa J, Savinov M, Klic A, Drahokoupil J 2014 Phys. Rev. Lett. 112 197601 Google Scholar
[37]	Bussmann-Holder A, Ko J H, Majchrowski A, Górny M, Roleder K 2013 J. Phys. :Condens. Matter 25 212202 Google Scholar
[38]	Ko J H, Górny M, Majchrowski A, Roleder K, Bussmann-Holder A 2013 Phys. Rev. B 87 184110 Google Scholar
[39]	Jaffe B 1961 Proc. IRE 49 1264 Google Scholar
[40]	Thacher P 1968 J. Appl. Phys. 39 1996 Google Scholar
[41]	Liu J, An K, Liu L, He J, Chou X, Xue C 2015 J. Mater. Sci. :Mater. Electron. 27 1758 Google Scholar
[42]	An K, Liu L, Zhang P, He J, Chou X, Xue C, Zhang W 2016 Microelectron. Eng. 162 45 Google Scholar
[43]	An K, Zhang H, Chou X, Xue C, Zhang W 2016 Micro Nano Lett. 11 803 Google Scholar
[44]	Uchino K 2016 Actuators 5 11 Google Scholar
[45]	Zhuo F, Damjanovic D, Li Q, Zhou Y, Ji Y, Yan Q, Zhang Y, Zhou Y, Chu X 2019 Mater. Horiz. 6 1699 Google Scholar
[46]	Cordero F 2015 Materials 8 8195 Google Scholar
[47]	Haertling G H, Land C E 1971 J. Am. Ceram. Soc. 54 1 Google Scholar
[48]	Pan W, Zhang Q, Bhalla A, Cross L E 1989 J. Am. Ceram. Soc. 72 571 Google Scholar
[49]	Xu Y, Yang Z, Xu K, Cao Y, Tian Y, Guo L, Tian J, Tian H, Liu X, Lin L, Wang G 2021 Chem. Eng. J. 426 131047 Google Scholar
[50]	Zhao L, Liu Q, Gao J, Zhang S, Li J F 2017 Adv. Mater. 29 1701824 Google Scholar
[51]	Randall C A, Fan Z, Reaney I, Chen L Q, Trolier-McKinstry S 2021 J. Am. Ceram. Soc. 104 3775 Google Scholar
[52]	Si Y, Zhang T, Chen Z, Zhang Q, Xu S, Lin T, Huang H, Zhou C, Chen S, Liu S, DongY, Liu C, Tang Y, Lu Y, Jin K, Guo E J, Lin X 2022 ACS Appl. Mater. Inter. 14 51096 Google Scholar
[53]	Zhang T F, Tang X G, Liu Q X, Jiang Y P, Huang X X 2015 J. Am. Ceram. Soc. 98 551 Google Scholar
[54]	Jiang R J, Cao Y, Geng W R, Zhu M X, Tang Y L, Zhu Y L, Wang Y, Gong F, Liu S Z, Chen Y T, Liu J, Liu N, Wang J H, Lv X D, Chen S J, Ma X L 2023 Nano Lett. 23 1522 Google Scholar
[55]	Pan H, Tian Z, Acharya M, Huang X, Kavle P, Zhang H, Wu L, Chen D, Carroll J, Scales R, Meyers C J G, Coleman K, Hanrahan B, Spanier J E, Martin L W 2023 Adv. Mater. 2300257 Google Scholar
[56]	Zhang T F, Tang X G, Ge P Z, Liu Q X, Jiang Y P 2017 Ceram. Int. 43 16300 Google Scholar
[57]	Zhang T F, Huang X X, Tang X G, Jiang Y P, Liu Q X, Lu B, Lu S G 2018 Sci. Rep. 8 396 Google Scholar
[58]	Zhang T F, Tang X G, Liu Q X, Jiang Y P, Huang X X, Zhou Q F 2016 J. Phys. D: Appl. Phys. 49 095302 Google Scholar
[59]	Hu Z, Ma B, Koritala R E, Balachandran U 2014 Appl. Phys. Lett. 104 263902 Google Scholar
[60]	Fesenko O E, Kolesova R V, Sindeyev Y G 1978 Ferroelectrics 20 177 Google Scholar
[61]	Ostapchuk T, Petzelt J, Zelezny V, Kamba S, Bovtun V, Porokhonskyy V, Pashkin A, Kuzel P, Glinchuk M, Bykov I 2001 J. Phys.: Condens. Matter 13 2677 Google Scholar
[62]	Íñiguez J, Stengel M, Prosandeev S, Bellaiche L 2014 Phys. Rev. B 90 220103 Google Scholar
[63]	Xu B, Hellman O, Bellaiche L 2019 Phys. Rev. B 100 020102 Google Scholar
[64]	Vales-Castro P, Roleder K, Zhao L, Li J F, Kajewski D, Catalan G 2018 Appl. Phys. Lett. 113 132903 Google Scholar
[65]	Lisenkov S, Yao Y, Bassiri-Gharb N, Ponomareva I 2020 Phys. Rev. B 102 104101 Google Scholar
[66]	Wei X K, Jia C L, Du H C, Roleder K, Mayer J, Dunin-Borkowski R E 2020 Adv. Mater. 32 1907208 Google Scholar
[67]	Wei X K, Jia C L, Roleder K, Dunin-Borkowski R E, Mayer J 2021 Adv. Funct. Mater. 31 2008609 Google Scholar
[68]	Bharadwaja S, Krupanidhi S 2001 J. Appl. Phys. 89 4541 Google Scholar
[69]	Si M, Lyu X, Shrestha P R, Sun X, Wang H, Cheung K P, Ye P D 2019 Appl. Phys. Lett. 115 072107 Google Scholar
[70]	Roleder K, Dee J 1989 J. Phys.: Condens. Matter 1 1503 Google Scholar
[71]	Mani B, Chang C M, Lisenkov S, Ponomareva I 2015 Phys. Rev. Lett. 115 097601 Google Scholar
[72]	Roy Chaudhuri A, Arredondo M, Hähnel A, Morelli A, Becker M, Alexe M, Vrejoiu I 2011 Phys. Rev. B 84 054112 Google Scholar
[73]	Boldyreva K, Pintilie L, Lotnyk A, Misirlioglu I B, Alexe M, Hesse D 2007 Appl. Phys. Lett. 91 122915 Google Scholar
[74]	Chen D, Nelson C T, Zhu X, Serrao C R, Clarkson J D, Wang Z, Gao Y, Hsu S L, Dedon L R, Chen Z, Yi D, Liu H J, Zeng D, Chu Y H, Liu J, Schlom D G, Ramesh R 2017 Nano Lett. 17 5823 Google Scholar
[75]	Reyes-Lillo S E, Rabe K M 2013 Phys. Rev. B 88 180102 Google Scholar
[76]	Lee H J, Lee M, Lee K, Jo J, Yang H, Kim Y, Chae S C, Waghmare U, Lee J H 2020 Science 369 1343 Google Scholar
[77]	Cheema S S, Shanker N, Hsu S L, Rho Y, Hsu C H, Stoica V A, Zhang Z, Freeland J W, Shafer P, Grigoropoulos C 2022 Science 376 648 Google Scholar
[78]	Hou C, Huang W, Zhao W, Zhang D, Yin Y, Li X 2017 ACS Appl. Mater. Inter. 9 20484 Google Scholar
[79]	Zhao P, Tang B, Fang Z, Si F, Yang C, Liu G, Zhang S 2021 J. Materiomics 7 195 Google Scholar
[80]	Kim J, Saremi S, Acharya M, Velarde G, Parsonnet E, Donahue P, Qualls A, Garcia D, Martin L W 2020 Science 369 81 Google Scholar
[81]	Li Y Z, Lin J L, Bai Y, Li Y, Zhang Z D, Wang Z J 2020 ACS Nano 14 6857 Google Scholar
[82]	Liu Z, Lu T, Xue F, Nie H, Wang G 2020 Sci. Adv. 6 eaba0367 Google Scholar
[83]	Li J, Li F, Xu Z, Zhang S 2018 Adv. Mater. 30 e1802155 Google Scholar
[84]	Zhu L F, Deng S, Zhao L, Li G, Wang Q, Li L, Yan Y, Qi H, Zhang B P, Chen J, Li J F 2023 Nat. Commun. 14 1166 Google Scholar
[85]	Luo Y, Wang C, Chen C, Gao Y, Sun F, Li C, Yin X, Luo C, Kentsch U, Cai X, Bai M, Fan Z, Qin M, Zeng M, Dai J, Zhou G, Lu X, Lou X, Zhou S, Gao X, Chen D, Liu J M 2023 Appl. Phys. Rev. 10 011403 Google Scholar
[86]	Li Z, Fu Z, Cai H, Hu T, Yu Z, Luo Y, Zhang L, Yao H, Chen X, Zhang S, Wang G, Dong X, Xu F 2022 Sci. Adv. 8 eabl9088 Google Scholar
[87]	Ge G, Shi C, Chen C, Shi Y, Yan F, Bai H, Yang J, Lin J, Shen B, Zhai J 2022 Adv. Mater. 34 2201333 Google Scholar
[88]	Nguyen M D, Birkhölzer Y A, Houwman E P, Koster G, Rijnders G 2022 Adv. Energy Mater. 12 2200517 Google Scholar
[89]	Luo N, Han K, Cabral M J, Liao X, Zhang S, Liao C, Zhang G, Chen X, Feng Q, Li J F, Wei Y 2020 Nat. Commun. 11 4824 Google Scholar
[90]	Qi H, Zuo R, Xie A, Tian A, Fu J, Zhang Y, Zhang S 2019 Adv. Funct. Mater. 29 1903877 Google Scholar
[91]	Wang M, Feng Q, Luo C, Lan Y, Yuan C, Luo N, Zhou C, Fujita T, Xu J, Chen G, Wei Y 2021 ACS Appl. Mater. Inter. 13 51218 Google Scholar
[92]	Chen L, Long F, Qi H, Liu H, Deng S, Chen J 2021 Adv. Funct. Mater. 32 2110478 Google Scholar
[93]	Owate I O, Freer R 1992 J. Appl. Phys. 72 2418 Google Scholar
[94]	Xie A, Qi H, Zuo R 2020 ACS Appl. Mater. Inter. 12 19467 Google Scholar
[95]	Jin Y, Wang J, Jiang L, Yao Y, Huang Y, Chen P, Chang W 2021 Ceram. Intl. 47 2869 Google Scholar
[96]	Chen G, Zhao J, Li S, Zhong L 2012 Appl. Phys. Lett. 100 222904 Google Scholar
[97]	Tong S 2021 J. Adv. Ceram. 10 181 Google Scholar
[98]	Bian F, Yan S, Xu C, Liu Z, Chen X, Mao C, Cao F, Bian J, Wang G, Dong X 2018 J. Eur. Ceram. Soc. 38 3170 Google Scholar
[99]	Ren P, Ren D, Sun L, Yan F, Yang S, Zhao G 2020 J. Eur. Ceram. Soc. 40 4495 Google Scholar
[100]	Zhang G, Chen Z, Fan B, Liu J, Chen M, Shen M, Liu P, Zeng Y, Jiang S, Wang Q 2016 APL Mater. 4 064103 Google Scholar
[101]	Pan H, Li F, Liu Y, Zhang Q H, Wang M, Lan S, Zheng Y P, Ma J, Gu L, Shen Y, Yu P, Zhang S J, Chen L Q, Lin Y H, Nan C W 2019 Science 365 578 Google Scholar
[102]	Han K, Luo N, Mao S, Zhuo F, Chen X, Liu L, Hu C, Zhou H, Wang X, Wei Y 2019 J. Materiomics 5 597 Google Scholar
[103]	Yang J, Zhao Y, Lou X, Wu J, Hao X 2020 J. Mater. Chem. C 8 4030 Google Scholar
[104]	Ma W, Zhu Y, Marwat M A, Fan P, Xie B, Salamon D, Ye Z G, Zhang H 2019 J. Mater. Chem. C 7 281 Google Scholar
[105]	Yuan Q, Yao F, Wang Y, Ma R, Wang H 2017 J. Mater. Chem. C 5 9552 Google Scholar
[106]	Wu Q, Zhao Y, Zhou Y, Chen X, Wu X, Zhao S 2021 J. Alloy. Compd. 881 160576 Google Scholar
[107]	Fan P, Zhang S T, Xu J, Zang J, Samart C, Zhang T, Tan H, Salamon D, Zhang H, Liu G 2020 J. Mater. Chem. C 8 5681 Google Scholar
[108]	Silva J P B, Silva J M B, Oliveira M J S, Weingärtner T, Sekhar K C, Pereira M, Gomes M J M 2018 Adv. Funct. Mater. 29 1807196 Google Scholar
[109]	Nguyen M D, Houwman E P, Do M T, Rijnders G 2020 Energy Storage Mater. 25 193 Google Scholar
[110]	Yan F, Bai H, Shi Y, Ge G, Zhou X, Lin J, Shen B, Zhai J 2021 Chem. Eng. J. 425 130669 Google Scholar
[111]	Mischenko A S, Zhang Q, Scott J F, Whatmore R W, Mathur N D 2006 Science 311 1270 Google Scholar
[112]	Kobeko P, Kurtschatov J 1930 Z. Phys. 66 192 Google Scholar
[113]	Granicher H 1956 Helv. Phys. Acta 29 210
[114]	Bai Y, Zheng G P, Shi S Q 2011 Mater. Res. Bull. 46 1866 Google Scholar
[115]	Allouche B, Hwang H J, Yoo T J, Lee B H 2020 Nanoscale 12 3894 Google Scholar
[116]	Guo M, Wu M, Gao W, Sun B, Lou X 2019 J. Mater. Chem. C 7 617 Google Scholar
[117]	Peng B, Fan H, Zhang Q 2013 Adv. Funct. Mater. 23 2987 Google Scholar
[118]	Wu M, Song D, Guo M, Bian J, Li J, Yang Y, Huang H, Pennycook S J, Lou X 2019 ACS Appl. Mater. Inter. 11 36863 Google Scholar
[119]	Vales-Castro P, Faye R, Vellvehi M, Nouchokgwe Y, Perpiñà X, Caicedo J M, Jordà X, Roleder K, Kajewski D, Perez-Tomas A, Defay E, Catalan G 2021 Phys. Rev. B 103 054112 Google Scholar
[120]	Damjanovic D 2005 J. Am. Ceram. Soc. 88 2663 Google Scholar
[121]	Jo W, Dittmer R, Acosta M, Zang J, Groh C, Sapper E, Wang K, Rödel J 2012 J. Electroceram. 29 71 Google Scholar
[122]	Li P, Zhai J, Shen B, Zhang S, Li X, Zhu F, Zhang X 2018 Adv. Mater. 30 1705171 Google Scholar
[123]	Park S E, Pan M J, Markowski K, Yoshikawa S, Cross L E 1997 J. Appl. Phys. 82 1798 Google Scholar
[124]	Zhuo F, Li Q, Zhou Y, Ji Y, Yan Q, Zhang Y, Xi X, Chu X, Cao W 2018 Acta Mater. 148 28 Google Scholar
[125]	Guo Y, Liu Y, Withers R L, Brink F, Chen H 2011 Chem. Mater. 23 219 Google Scholar
[126]	Berlincourt D A 1968 IEEE Trans. Sonic. Ultrason. 15 89 Google Scholar
[127]	Chou X, Guan X, Lv Y, Geng W, Liu J, Xue C, Zhang W 2013 IEEE Electron Dev. Lett. 34 1187 Google Scholar
[128]	Íñiguez J, Zubko P, Luk’yanchuk I, Cano A 2019 Nat. Rev. Mater. 4 243 Google Scholar
[129]	Landauer R 1976 Collect. Phenom. 2 167
[130]	Wong J C, Salahuddin S 2018 Proc. IEEE 107 49 Google Scholar
[131]	Appleby D J, Ponon N K, Kwa K S, Zou B, Petrov P K, Wang T, Alford N M, O’Neill A 2014 Nano Lett. 14 3864 Google Scholar
[132]	Hoffmann M, Wang Z, Tasneem N, et al. 2022 Nat. Commun. 13 1228 Google Scholar
[133]	Cheema S S, Shanker N, Wang L C, et al. 2022 Nature 604 65 Google Scholar
[134]	Sheikholeslami A, Gulak P G 2000 Proc. IEEE 88 667 Google Scholar
[135]	Vopson M M, Tan X 2016 IEEE Electron Dev. Lett. 37 1551 Google Scholar
[136]	Morris D H, Avci U E, Young I A 2019 EP Patent 3576092
[137]	Esaki L, Chang L 1970 Phys. Rev. Lett. 25 653 Google Scholar
[138]	Kohlstedt H, Pertsev N A, Rodríguez Contreras J, Waser R 2005 Phys. Rev. B 72 125341 Google Scholar
[139]	Guo M, Qian Y, Qi H, Bi K, Chen Y 2020 Carbon 157 185 Google Scholar
[140]	Lee S, Hippalgaonkar K, Yang F, Hong J, Ko C, Suh J, Liu K, Wang K, Urban J J, Zhang X 2017 Science 355 371 Google Scholar
[141]	Starkiewicz J, Sosnowski L, Simpson O 1946 Nature 158 28 Google Scholar
[142]	Goldstein B, Pensak L 1959 J. Appl. Phys. 30 155 Google Scholar
[143]	Yang S, Seidel J, Byrnes S, Shafer P, Yang C H, Rossell M, Yu P, Chu Y H, Scott J, Ager Iii J 2010 Nat. Nanotech. 5 143 Google Scholar
[144]	Junquera J, Ghosez P 2003 Nature 422 506 Google Scholar
[145]	Nataf G F, Guennou M, Gregg J M, Meier D, Hlinka J, Salje E K H, Kreisel J 2020 Nat. Rev. Phys. 2 634 Google Scholar
[146]	Yang B, Zhang Y, Pan H, Si W, Zhang Q, Shen Z, Yu Y, Lan S, Meng F, Liu Y, Huang H, He J, Gu L, Zhang S, Chen L Q, Zhu J, Nan C W, Lin Y H 2022 Nat. Mater. 21 1074 Google Scholar
[147]	Garcia-Castro A C, Ma Y, Romestan Z, Bousquet E, Cen C, Romero A H 2021 Adv. Funct. Mater. 32 2107135 Google Scholar
[148]	Phuoc N N, Ong C 2013 Adv. Mater. 25 980 Google Scholar
[149]	Catalan G, Noheda B, McAneney J, Sinnamon L, Gregg J 2005 Phys. Rev. B 72 020102 Google Scholar
[150]	Wang J, Wylie-van Eerd B, Sluka T, Sandu C, Cantoni M, Wei X K, Kvasov A, McGilly L J, Gemeiner P, Dkhil B 2015 Nat. Mater. 14 985 Google Scholar

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