基于石英增强光声光谱的气体传感技术研究进展

马欲飞

doi:10.7498/aps.70.20210685

摘要

基于石英增强光声光谱(quartz-enhanced photoacoustic spectroscopy, QEPAS)的气体传感技术具有系统体积小、成本低、环境适应性强等优点, 是目前一种重要的光谱式痕量气体检测方法. 探测灵敏度是传感器系统的重要指标, 关系到能否满足实际应用, 因此, 本文从提高QEPAS传感系统灵敏度的角度出发, 总结了常见的技术手段, 包括采用高功率激发光源增大激发强度、采用与分子基频/强吸收带相匹配的激光源来增大吸收强度、采用声波共振腔增大音叉处的声波强度、采用低共振频率石英音叉提高能量积累时间、采用多光程来增大光与气体的相互作用长度等方法, 并对其优缺点分别进行了阐述. 针对工程应用问题, 本文主要讨论了全光纤化和传感系统小型化, 并以载人航天领域的应用为例进行了例证. 最后, 对进一步提高QEPAS传感技术灵敏度的方法进行了展望.

关键词:

Abstract

Laser spectroscopy based techniques have the advantages of high sensitivities, high selectivities, non-invasiveness and in situ, real-time observations. They are widely used in numerous fields, such as environmental monitoring, life science, medical diagnostics, manned space flight, and planetary exploration. Owing to the merits of low cost, compact volume and strong environment adaptability, quartz-enhanced photoacoustic spectroscopy (QEPAS) based sensing is an important laser spectroscopy-based method of detecting the trace gas, which was invented in 2002. Detection sensitivity is a key parameter for gas sensors because it determines their real applications. In this paper, focusing on the detection sensitivity, the common methods for QEPAS are summarized. High power laser including amplified diode laser by erbium doped fiber amplifier (EDFA), and quantum cascade laser are used to improve the excitation intensity of acoustic wave. The absorption line of gas molecules located at the fundamental bands of mid-infrared region is adopted to increase the laser absorption strength. Micro-resonator is employed to enhance the generated acoustic pressure by forming a standing wave cavity. Quartz tuning forks (QTFs) with low resonant frequency are used to increase the accumulation time of acoustic energy in itself. Multi-pass strategy is utilized to amplify the action length between laser beam and target gas in the prongs of QTF. The advantages and disadvantages of the above methods are discussed respectively. For the issues in real applications, the all-fiber strucure in near-infared region and mid-infrared region and miniaturization using three-dimensional(3D) printing technique for QEPAS sensor are summarized. A QEPAS technique based multi-gas sensor is used to quantify the concentration of carbon monoxide (CO), carbon dioxide (CO₂), hydrogen cyanide (HCN), and hydrogen chloride (HCl) for post-fire cleanup aboard spacecraft, which is taken for example for the real application.Finally, the methods of further improving the sensitivity of QEPAS sensor are proposed.

Keywords:

trace gas detection /
quartz tuning fork /
detection sensitivity /
quartz-enhanced photoacoustic spectroscopy

作者及机构信息

马欲飞

哈尔滨工业大学, 可调谐激光技术国家级重点实验室, 哈尔滨　150001

通信作者: 马欲飞, mayufei@hit.edu.cn

作者简介:

马欲飞, 哈尔滨工业大学航天学院可调谐激光技术国家级重点实验室教授. 国家优秀青年基金获得者、黑龙江省首批优秀青年基金获得者、哈尔滨工业大学青年拔尖人才、哈尔滨工业大学青年科学家工作室学术带头人. 从事激光传感和激光技术研究, 作为负责人主持“国家载人航天”预研项目、国家自然基金等近20项. 担任Optics Express、Optical Engineering和Microwave and Optical Technology Letters副主编, 还担任Sensors、Applied Sciences、Frontiers in Physics编辑、Photoacoustics 等客座编辑. 以第一作者/通讯作者发表1区论文50余篇, ESI热点论文、ESI高被引论文、Focus Article、Feature Article、特邀论文等10余篇. 获“军队科技进步二等奖”、教育部“学术新人奖”、美国光学学会“Incubic/Milton Chang Travel Grant”等多项奖励

基金项目: 国家优秀青年科学基金(批准号: 62022032)、国家自然科学基金(批准号: 61875047, 61505041)、黑龙江省优秀青年科学基金(批准号: YQ2019F006)、黑龙江省博士后科研启动金(批准号: LBH-Q18052)、中央高校基本科研业务费专项资金资助的课题

Authors and contacts

Ma Yu-Fei

National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China

Corresponding author: Ma Yu-Fei, mayufei@hit.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 62022032, 61875047, 61505041), the Outstanding Youth Scientsit Fund of the Natural Science Foundation of Heilongjiang Province of China (Grant No. YQ2019F006), the Scientific Rearch Starting Funds for the Postdoctoral of Heilongjiang Province, China (Grant No. LBH-Q18052), the Fundamental Research Funds for the Central Universities

文章全文 : translate this paragraph

参考文献

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施引文献

图 1 QEPAS传感示意图　(a) QEPAS技术原理; (b) 声波产生及探测

Fig. 1. Schematic diagram of QEPAS sensing: (a) Principle of QEPAS; (b) generation and detection of acoustics wave.

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图 2 石英音叉弯曲振动模式　(a) 音叉模型; (b) 面外基频模态; (c) 面内基频模态; (d) 面内第一泛频模态

Fig. 2. Flexural mode of quartz tuning fork: (a) Mode of quartz tuning fork; (b) out-of-plane fundamental mode; (c) in-plane fundamental mode; (d) in-plane 1^st overtone mode

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图 3 EDFA光放大　(a) 种子光发射谱; (b) 放大后的发射谱^[38]

Fig. 3. Laser amplification by EDFA: (a) Emission spectrum for seed diode laser; (b) emission spectrum for amplified diode laser. Reproduced from Ref. [38], with the permission of AIP Publishing.

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图 4 内腔增强型QEPAS传感系统^[59]

Fig. 4. Intracavity enhanced QEPAS sensor system. Reproduced from Ref. [59], with the permission of AIP Publishing.

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图 5 基于THz激光源的QEPAS传感系统^[45]

Fig. 5. QEPAS sensing system based on THz laser. Reproduced from Ref. [45], with the permission of AIP Publishing.

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图 6 微共振腔对石英音叉QTF的增强效果示意图

Fig. 6. The configuration of micro-resonator and the enhanced effect of acoustic pressure.

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图 7 微共振腔结构　(a) “共轴”式; (b) “离轴”式; (c) 单管“共轴”式; (d) 嵌入“离轴”式

Fig. 7. The configuration of micro-resonator: (a) On-beam; (b) off-beam; (c) single-tube on-beam; (d) embedded off-beam.

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图 8 (a) 不同模式下石英音叉的最佳激发位置; (b) 基频振动模态; (c) 第一泛频振动模态; (d) 基频与第一泛频的复合振动模态^[62]

Fig. 8. (a) Optimal excitation position for different modes of quartz tuning fork; (b) fundamental mode; (c) 1^st overtone mode; (d) combined mode. Reproduced from Ref. [62], with the permission of AIP Publishing.

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图 9 双波腹激发下的QEPAS传感器^[56]

Fig. 9. Double antinode excited QEPAS sensor. Reproduced from Ref. [56], with the permission of AIP Publishing.

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图 10 基于多光程吸收的QEPAS传感器^[57]

Fig. 10. Multi-pass based QEPAS sensor. Reprinted with permission from Ref. [57] © The Optical Society.

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图 11 面内激光入射的QEPAS传感器^[58]

Fig. 11. In-plane QEPAS sensor. Reproduced from Ref. [58], with the permission of AIP Publishing.

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图 12 基于倏逝场激发的准分布式全光纤QEPAS传感器^[66]

Fig. 12. Quasi-distributed gas sensing based on fiber evanescent wave QEPAS sensor. Reproduced from Ref. [66], with the permission of AIP Publishing.

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图 13 基于机械加工方式所得到的光学及声波探测部分^[69]

Fig. 13. Optical and acoustic detection parts for QEPAS sensor based on mechanical processing^[69].

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图 14 基于3D打印方式所得到的光学及声波探测部分^[70]

Fig. 14. Optical and acoustic detection parts for QEPAS sensor based on 3D printing. Reprinted with permission from Ref. [70] © The Optical Society.

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图 15 多通道QEPAS传感器^[71]

Fig. 15. Multi-channel QEPAS sensor^[71].

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map

[1]	Khalil M A K, Rasmussen R A 1984 Science 224 54 Google Scholar
[2]	Logan J A, Prather M J, Wofsy S C, McElroy M B 1981 J. Geophys. Res. 86 7210 Google Scholar
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[4]	Milde T, Hoppe M, Tatenguem H, Mordmüller M, Ogorman J, Willer U, Schade W, Sacher J 2018 Appl. Opt. 57 C120 Google Scholar
[5]	Ma Y F, Qiao S D, He Y, Li Y, Zhang Z H, Yu X, Tittel F K 2019 Opt. Express 27 14163 Google Scholar
[6]	Spagnolo V, Dong L, Kosterev A A, Tittel F K 2012 Opt. Express 20 3401 Google Scholar
[7]	Krzempek K, Dudzik G, Abramski K 2018 Opt. Express 26 28861 Google Scholar
[8]	Qiao S D, Qu Y C, Ma Y F, He Y, Wang Y, Hu Y Q, Yu X, Zhang Z H, Tittel F K 2019 Sensors 19 4187 Google Scholar
[9]	Bradshaw J L, Bruno J D, Lascola K M, Leavitt R P, Pham J T, Towner F J, Sonnenfroh D M, Parameswaran K R 2011 Proc. SPIE 8032 80320D
[10]	Ma Y F, He Y, Tong Y, Yu X, Tittel F K 2018 Opt. Express 26 32103 Google Scholar
[11]	Bell A G 1880 Am. J. Sci. 20 305
[12]	Kosterev A A, Bakhirkin Y A, Curl R F, Tittel F K 2002 Opt. Lett. 27 1902 Google Scholar
[13]	Liu K, Li J, Wang L, Tan T, Zhang W, Gao X. M, Chen W D, Tittel F K 2009 Appl. Phys. B 94 527 Google Scholar
[14]	Ma Y F 2020 Front. Phys. 8 268 Google Scholar
[15]	Giglio M, Patimisco P, Sampaolo A, Zifarelli A, Blanchard R, Pfluegl C, Witinski M F, Vakhshoori D, Tittel F K, Spagnolo V 2018 Appl. Phys. Lett. 113 171101 Google Scholar
[16]	Dong L, Yu Y J, Li C G, So S, Tittel F K 2015 Opt. Express 23 19821 Google Scholar
[17]	Ma Y F, Yu G, Zhang J B, Yu X, Sun R, Tittel F K 2015 Sensors 15 7596 Google Scholar
[18]	Rousseau R, Loghmari Z, Bahriz M, Chamassi K, Teissier R, Baranov A N, Vicet A 2019 Opt. Express 27 7435 Google Scholar
[19]	Ma Y F, Yu X, Yu G, Li X D, Zhang J B, Chen D Y, Sun R, Tittel F K 2015 Appl. Phys. Lett. 107 021106 Google Scholar
[20]	Lassen M, Lamard L, Feng Y, Peremans A, Petersen J C 2016 Opt. Lett. 41 4118 Google Scholar
[21]	Ma Y F 2018 Appl. Sci. 8 1822 Google Scholar
[22]	Petra, N, Zweck J, Kosterev A A, Minkoff S E, Thomazy D 2009 Appl. Phys. B 94 673 Google Scholar
[23]	He Y, Ma Y F, Tong Y, Yu X, Tittel F K 2019 Opt. Lett. 44 1904 Google Scholar
[24]	Giessibl F J 1998 Appl. Phys. Lett. 73 3956 Google Scholar
[25]	Barbic M, Eliason L, Ranshaw J 2007 Sens. Actuators, A 136 564 Google Scholar
[26]	Babic B, Hsu M T L, Gray M B, Lu M Z, Herrmann J 2015 Sens. Actuators, A 223 167 Google Scholar
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[29]	Nguyen B T, Triki M, Desbrosses G, Vicet A 2015 Rev. Sci. Instrum. 86 023111 Google Scholar
[30]	Ma Y F, Tong Y, He Y, Long J H, Yu X 2018 Sensors 18 2047 Google Scholar
[31]	Patimisco P, Borri S, Sampaolo A, Beere H E, Ritchie D A, Vitiello M S, Scamarcio G, Spagnolo V 2014 Analyst 139 2079 Google Scholar
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[35]	Li Y, Wang R Z, Tittel F K, Ma Y F 2020 Opt. Lasers Eng. 132 106155 Google Scholar
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