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蓝宝石具有超强硬度及耐腐蚀、耐高温、在紫外-红外波段具有良好的透光性等优点，在军工业以及医疗器械方面具有广泛的应用前景.然而这些优点又对蓝宝石的机械加工或化学腐蚀加工带来困难.飞秒激光脉冲具有热损伤小、加工分辨率高、材料选择广等特点，被广泛应用于固体材料改性和高精度三维微纳器件加工.本文提出了利用飞秒激光多光子吸收特性在蓝宝石表面实现超越光学衍射极限的精细加工.利用聚焦后的波长为343 nm的飞秒激光，配合高精密三维压电位移台，实现激光焦点和蓝宝石晶体的相对三维移动，在蓝宝石晶体衬底上进行精确扫描，得到了线宽约61 nm的纳米线，纳米线间的最小间距达到142 nm左右.利用等离子体模型解释了加工得到的纳米条纹的产生原因，研究了激光功率、扫描速度对加工分辨率的影响.最终本工作实现了超越光学衍射极限的加工精度，为实现利用飞秒激光对高硬度材料的微纳结构制备提供了参考.Sapphire has shown broad application prospects in military and medical fields, due to its high hardness, excellent corrosion resistance and high transmission in the infrared band. However, these characteristics have also brought about lots of difficulties in machining or chemical etching the material. Femtosecond laser processing with excellent characteristics including small heat-affected zones and high processing resolution ratio, has become an emerging field. Therefore, it has important application prospects and has found increasingly wide applications in the fields of material modification and high-quality fabrication of three-dimensional micro-nano structures and devices. In this paper, we propose a method in which femtosecond laser processing based on multi-photon absorption is used to process sapphire beyond the optical diffraction limit. In this work, femtosecond laser with a central wavelength of 343 nm is focused on the sapphire and the surface of sapphire is scanned with the high-precision piezoelectric positioning stages. Nano structures each with a width of about 61 nm are obtained, and the minimum space between the nano structures could be as short as about 142 nm. Further, the influences on the processing resolution from laser power and scanning speed are investigated and the generation mechanism for the nano-ripple structure is discussed. Finally, femtosecond laser processing on the sapphire with a resolution beyond the optical diffraction limit is achieved. This work provides a reference for processing the hard and brittle materials by femtosecond laser.
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Keywords:
- femtosecond laser processing /
- optical diffraction limit /
- sapphire /
- micro-nano structures
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[32] Emmony D C, Howson R P, Willis L J 1973 Appl. Phys. Lett. 23 598
[33] Young J F, Sipe J E, Vandriel H M 1984 Phys. Rev. B 30 2001
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[35] Varlamova O, Reif J, Varlamov S 2010 E-MRS Symposium R on Laser Processing and Diagnostics for Micro and Nano Applications Strasbourg, France, Jun 7-11, 2010 p5465
[36] Reif J, Varlamova O, Varlamov S Bestehorn M 2011 Appl. Phys. A: Mater. Sci. Pro. 104 969
[37] Young J F, Sipe J E, Vandriel H M 1983 Opt. Lett. 8 431
[38] Hnatovsky C, Taylor R S, Simova E, Rajeev P P, Rayner D M, Bhardwaj V R, Corkum P B 2006 Appl. Phys. A: Mater. Sci. Pro. 84 47
[39] Wang L 2015 Ph. D. Dissertation (Changchun: Jilin University) (in Chinese) [王磊 2015 博士学位论文 (长春：吉林大学)]
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[1] Wu D 2010 Ph. D. Dissertation (Changchun: Jilin University) (in Chinese) [吴东 2010 博士学位论文(长春: 吉林大学)]
[2] Shrawan S, Sreenivasan S V 2016 Microelectron. Eng. 164 139
[3] Ravi B, Hartley K, John G 2016 J. Vac. Sci. Technol. B 34 06K606
[4] Fang R R, Anatoliy V, Guo C L 2017 Light: Sci. Appl. 6 e16256
[5] Zhang Y L, Guo L, Wei S, He Y Y, Xia H, Chen Q D, Sun H B, Xiao F S 2010 Nano Today 5 15
[6] Wang L, Zhu S J, Wang H Y, Qu S N, Zhang Y L, Zhang J H, Chen Q D, Xu H L, Han W, Yang B 2014 ACS Nano 8 2541
[7] Sun Y L, Dong W F, Niu L G, Jiang T, Liu D X, Zhang L, Wang Y S, Chen Q D, Kim D P, Sun H B 2014 Light: Sci. Appl. 3 e129
[8] Gao B R, Wang H Y, Hao Y W, Fu L M, Fang H H, Jiang Y, Wang L, Chen Q D, Xia H, Pan L Y 2010 J. Phys. Chem. B 114 128
[9] Zhang Y L, Chen Q D, Xia H, Sun H B 2010 Nano Today 5 435
[10] Zhang Y L, Xia H, Kim E, Sun H B 2012 Soft Matter 8 11217
[11] Xia H, Wang J, Tian Y, Chen Q D, Du X B, Zhang Y L, He Y, Sun H B 2010 Adv. Mater. 22 3204
[12] Guo L, Jiang H B, Shao R Q, Zhang Y L, Xie S Y, Wang J N, Li X B, Jiang F, Chen Q D, Zhang T 2012 Carbon 50 1667
[13] Wu D, Chen Q D, Niu L G, Wang J N, Wang J, Wang R, Xia H, Sun H B 2009 Lab On A Chip 9 2391
[14] Wu D, Wang J N, Wu S Z, Chen Q D, Zhao S, Zhang H, Sun H B, Jiang L 2011 Adv. Funct. Mater. 21 2927
[15] Kawata S, Sun H B, Tanaka T 2001 Nature 412 697
[16] Tan D F, Li Y, Qi F J, Yang H, Gong Q H, Dong X Z, Duan X M 2007 Appl. Phys. Lett. 90 071106
[17] Yu B H, Dai N L, Wang Y, Li Y H, Ji L L, Zheng Q G, Lu P X 2007 Acta Phys. Sin. 56 5821 (in Chinese) [余本海, 戴能利, 王英, 李玉华, 季玲玲, 郑启光, 陆培祥 2007 56 5821]
[18] Yun Z Q, Wei R X, Li W, Luo W W, Wu Q, Xu X G, Zhang X Z 2013 Acta Phys. Sin. 62 068101 (in Chinese) [云志强, 魏汝省, 李威, 罗维维, 吴强, 徐现刚, 张心正 2013 62 068101]
[19] Shimotsuma Y, Kazansky P G, Qiu J R, Hirao K 2003 Phys. Rev. Lett. 91 247405
[20] Liao Y, Ni J L, Qiao L L, Huang M, Bellouard Y, Sugioka K, Cheng Y 2015 Optica 2 329
[21] Miyaji G, Miyazaki K 2016 Opt. Express 24 4648
[22] Sui C H, Cai P G, Xu X J, Chen N B, Wei G Y, Zhou H 2009 Acta Phys. Sin. 58 2792 (in Chinese) [隋成华, 蔡萍根, 许晓军, 陈乃波, 魏高尧, 周红 2009 58 2792]
[23] Kuang W J, Wu X Q, Wang X, Han E H 2015 Corrosion 71 687
[24] Wang H B, Daigo Y, Seino T, Ishibashi S, Sugiyama M 2016 Jpn. J. Appl. Phys. 55 105501
[25] Chen L 2009 M. S. Dissertation (Changchun: Jilin University) (in Chinese) [陈磊 2009 硕士学位论文(长春: 吉林大学)]
[26] Li Q K, Cao J J, Yu Y H, Wang L, Sun Y L, Chen Q D, Sun H B 2017 Opt. Lett. 42 543
[27] Qi L T, Hu J P, Yu X W 2012 J. Heilongjiang Instit. Sci. Technol. 22 297 (in Chinese) [齐立涛, 胡金平, 于信伟 2012 黑龙江科技学院学报 22 297]
[28] Zhao K H, Zhong X H 1984 Optics (Vol. 1)(Beijing: Peking University Press) p228 (in Chinese) [赵凯华, 钟锡华 1984 光学(上册)(北京: 北京大学出版社) 第228页]
[29] Gan F X, Wang Y 2011 Acta Opt. Sin. 31 0900104 (in Chinese) [干福熹, 王阳 2011 光学学报 31 0900104]
[30] Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 ACS Nano 3 4062
[31] Yang M 2014 Ph. D. Dissertation (Tianjin: Nankai University) (in Chinese) [杨明 2014 博士学位论文 (天津: 南开大学)]
[32] Emmony D C, Howson R P, Willis L J 1973 Appl. Phys. Lett. 23 598
[33] Young J F, Sipe J E, Vandriel H M 1984 Phys. Rev. B 30 2001
[34] Bonse J, Rosenfeld A, Kriiger J 2011 Appl. Surf. Sci. 257 5420
[35] Varlamova O, Reif J, Varlamov S 2010 E-MRS Symposium R on Laser Processing and Diagnostics for Micro and Nano Applications Strasbourg, France, Jun 7-11, 2010 p5465
[36] Reif J, Varlamova O, Varlamov S Bestehorn M 2011 Appl. Phys. A: Mater. Sci. Pro. 104 969
[37] Young J F, Sipe J E, Vandriel H M 1983 Opt. Lett. 8 431
[38] Hnatovsky C, Taylor R S, Simova E, Rajeev P P, Rayner D M, Bhardwaj V R, Corkum P B 2006 Appl. Phys. A: Mater. Sci. Pro. 84 47
[39] Wang L 2015 Ph. D. Dissertation (Changchun: Jilin University) (in Chinese) [王磊 2015 博士学位论文 (长春：吉林大学)]
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