太赫兹波发射晶体的亚波长微棱锥增透结构的设计与实验研究

胡晓堃; 李江; 李贤; 陈耘辉; 栗岩锋; 柴路; 王清月

doi:10.7498/aps.62.060701

摘要

光学整流方法产生太赫兹(THz)辐射常用的非线性发射晶体在THz波段都具有较高的折射率, 使得很大一部分THz波由于晶体表面的菲涅尔反射而无法有效耦合输出. 本文报道了GaP晶体THz波发射器输出表面上亚波长微棱锥增透结构的设计和实验研究. 利用有效介质模型在理论上验证了亚波长光栅结构的增透效果, 并进一步设计了适用于不同频段的增透结构的参数. 实验中, 通过微机械加工手段在GaP晶体输出端面刻划了多种亚波长微棱锥结构, 验证了其增透效果及参数对增透频带的关系. 理论与实验的符合证明该设计思想也可用于其他THz波发射晶体.

关键词:

Abstract

Nonlinear crystals commonly used in optical rectification for the generation of terahertz (THz) radiation have high refractive indices in the THz frequency range, and thus Fresnel reflection at the crystal-air output surface causes a large part of the generated THz wave to be reflected back into the crystals. Here we report on the design and experimental study of sub-wavelength antireflective micropyramid structures on GaP crystals. Effective medium theory is used to demonstrate the enhancement of THz output by the antireflective micropyramid structures, and further to design the antireflective structures at different frequencies. Several micropyramid structures are fabricated on the output surface of GaP crystals by micromachining, and the correlation between the THz output enhancement and the structure parameters is verified. The agreement between theory and experiment shows that our methodology is applicable to other THz emitters based on optical rectification.

Keywords:

THz wave /
optical rectification /
sub-wavelength antireflective micropyramid structures /
micromachining

作者及机构信息

1.
天津大学精密仪器与光电子工程学院, 超快激光研究室, 光电信息技术教育部重点实验室, 天津 300072;

2.
天津大学精密仪器与光电子工程学院, 精密测试技术及仪器国家重点实验室, 微纳加工技术中心, 天津 300072

基金项目: 国家自然科学基金 (批准号: 61077083, 61027013, 61078028, 60838004)、国家重点基础研究发展计划(批准号: 2007CB310408, 2010CB327604, 2011CB808101)和国家自然科学基金中俄合作交流项目(批准号: 61211120193)资助的课题.

Authors and contacts

1.
Ultrafast Laser Laboratory, College of Precision Instrument and Optoelectronics Engineering, Key Laboratory of Optelectronic Information Technology (Ministry of Education), Tianjin University, Tianjin 300072, China;

2.
State Key Laboratory of Precision Measuring Technology and Instruments, College of Precision Instrument and Optoelectronics Engineering, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin 300072, China

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61077083, 61027013, 61078028, 60838004), the National Basic Research Program of China (Grant Nos. 2007CB310408, 2010CB327604, 2011CB808101), and NSFC-RFBR Program (Grant No. 61211120193).

参考文献

[1]	Jacobsen R H, Mittleman D M, Nuss M C 1996 Opt. Lett. 21 2011
[2]	Shen Y C, Lo T, Taday P F, Cole B E, Tribe W R, Kemp M C 2005 Appl. Phys. Lett. 86 241116
[3]	Ikeda T, Matsushita A, Tatsuno M, Minami Y, Yamaguchi M, Yamamoto K, Tani M, Hangyo M 2005 Appl. Phys. Lett. 87 034105
[4]	Jeon T I, Grischkowsky D 1998 Appl. Phys. Lett. 72 3032
[5]	Markelz A G, Roitberg A, Heilweil E J 2000 Chem. Phys. Lett. 320 42
[6]	Yoneyama H, Yamashita M, Kasai S, Kawase K, Ito H, Ouchi T 2008 Opt. Commun. 281 1909
[7]	Chen D P, Xing C F, Zhang Z, Zhang C L 2012 Acta Phys. Sin. 61 024202 (in Chinese) [陈大鹏, 邢春飞, 张峥, 张存林 2012 61 024202]
[8]	Li Z Y, Yao J Q, Xu D G, Zhong K, Wang J L, Bing P B 2011 Chin. Phys. B 20 054207
[9]	Federici J, Moeller L 2010 J. Appl. Phys. 107 111101
[10]	Hoffmann M C, Flöp J A 2011 J. Phys. D: Appl. Phys. 44 083001
[11]	Vodopyanov K L 2006 Opt. Express 14 2263
[12]	Zhang T Y, Cao J C 2004 Chin. Phys. 13 1742
[13]	Beck M, Schäfer H, Klatt G, Demsar J, Winnerl S, Helm M, Dekorsy T 2010 Opt. Express 18 9251
[14]	Blanchard F, Razzari L, Bandulet H C, Sharma G, Morandotti R, Kieffer J C, Ozaki T, Reid M, Tiedje H F, Haugen H K, Hegmann F A 2007 Opt. Express 15 13212
[15]	Stepanov A G, Bonacina L, Chekalin S V, Wolf J P 2008 Opt. Lett. 33 2497
[16]	Hebling J, Yeh K L, Hoffmann M C, Bartal B, Nelson K A 2008 J. Opt. Soc. Am. B 25 B6
[17]	Gatesman A J, Waldman J, Ji M, Musante C, Yngvesson S 2000 IEEE Microw. Guided Wave Lett. 10 264
[18]	Hosako I 2005 Appl. Opt. 44 3769
[19]	Southwell W H 1991 J. Opt. Soc. Am. A 8 549
[20]	Brckner C, Käsebier T, Pradarutti B, Riehemann S, Notni G, Kley E B, Tnnermann A 2009 Opt. Express 17 3063
[21]	Kuroo S I, Oyama S, Shiraishi K, Sasho H, Fukushima K 2010 Appl. Opt. 49 2806
[22]	Escoubas L, Simon J J, Loli M, Berginc G, Flory F, Giovannini H 2003 Opt. Commun. 226 81
[23]	Moharam M G, Gaylord T K 1981 J. Opt. Soc. Am. 71 811
[24]	Raguin D H, Morris G M 1993 Appl. Opt. 32 1154
[25]	Han P, Chen Y W, Zhang X C 2010 IEEE J. Sel. Top. Quantum Electron. 16 338
[26]	Saleh B E A, Teich M C 2007 Fundamentals of Photonics (2nd Ed.) (New Jersey: Wiley Interscience), p246-260
[27]	Fang F Z, Liu Y C 2004 J. Micromech. Microeng. 14 984
[28]	Wang C L, Tian Z, Xing Q R, Gu J Q, Liu F, Hu M L, Chai L, Wang Q Y 2010 Acta Phys. Sin. 59 7857 (in Chinese) [王昌雷, 田震, 邢岐荣, 谷建强, 刘丰, 胡明列, 柴路, 王清月 2010 59 7857]
[29]	Liu F, Hu X K, Li Y F, Xing Q R, Hu M L, Chai L, Wang Q Y 2012 Acta Phys. Sin. 61 040703 (in Chinese) [刘丰, 胡晓堃, 栗岩锋, 邢岐荣, 胡明列, 柴路, 王清月 2012 61 040703]

施引文献

[1]	Jacobsen R H, Mittleman D M, Nuss M C 1996 Opt. Lett. 21 2011
[2]	Shen Y C, Lo T, Taday P F, Cole B E, Tribe W R, Kemp M C 2005 Appl. Phys. Lett. 86 241116
[3]	Ikeda T, Matsushita A, Tatsuno M, Minami Y, Yamaguchi M, Yamamoto K, Tani M, Hangyo M 2005 Appl. Phys. Lett. 87 034105
[4]	Jeon T I, Grischkowsky D 1998 Appl. Phys. Lett. 72 3032
[5]	Markelz A G, Roitberg A, Heilweil E J 2000 Chem. Phys. Lett. 320 42
[6]	Yoneyama H, Yamashita M, Kasai S, Kawase K, Ito H, Ouchi T 2008 Opt. Commun. 281 1909
[7]	Chen D P, Xing C F, Zhang Z, Zhang C L 2012 Acta Phys. Sin. 61 024202 (in Chinese) [陈大鹏, 邢春飞, 张峥, 张存林 2012 61 024202]
[8]	Li Z Y, Yao J Q, Xu D G, Zhong K, Wang J L, Bing P B 2011 Chin. Phys. B 20 054207
[9]	Federici J, Moeller L 2010 J. Appl. Phys. 107 111101
[10]	Hoffmann M C, Flöp J A 2011 J. Phys. D: Appl. Phys. 44 083001
[11]	Vodopyanov K L 2006 Opt. Express 14 2263
[12]	Zhang T Y, Cao J C 2004 Chin. Phys. 13 1742
[13]	Beck M, Schäfer H, Klatt G, Demsar J, Winnerl S, Helm M, Dekorsy T 2010 Opt. Express 18 9251
[14]	Blanchard F, Razzari L, Bandulet H C, Sharma G, Morandotti R, Kieffer J C, Ozaki T, Reid M, Tiedje H F, Haugen H K, Hegmann F A 2007 Opt. Express 15 13212
[15]	Stepanov A G, Bonacina L, Chekalin S V, Wolf J P 2008 Opt. Lett. 33 2497
[16]	Hebling J, Yeh K L, Hoffmann M C, Bartal B, Nelson K A 2008 J. Opt. Soc. Am. B 25 B6
[17]	Gatesman A J, Waldman J, Ji M, Musante C, Yngvesson S 2000 IEEE Microw. Guided Wave Lett. 10 264
[18]	Hosako I 2005 Appl. Opt. 44 3769
[19]	Southwell W H 1991 J. Opt. Soc. Am. A 8 549
[20]	Brckner C, Käsebier T, Pradarutti B, Riehemann S, Notni G, Kley E B, Tnnermann A 2009 Opt. Express 17 3063
[21]	Kuroo S I, Oyama S, Shiraishi K, Sasho H, Fukushima K 2010 Appl. Opt. 49 2806
[22]	Escoubas L, Simon J J, Loli M, Berginc G, Flory F, Giovannini H 2003 Opt. Commun. 226 81
[23]	Moharam M G, Gaylord T K 1981 J. Opt. Soc. Am. 71 811
[24]	Raguin D H, Morris G M 1993 Appl. Opt. 32 1154
[25]	Han P, Chen Y W, Zhang X C 2010 IEEE J. Sel. Top. Quantum Electron. 16 338
[26]	Saleh B E A, Teich M C 2007 Fundamentals of Photonics (2nd Ed.) (New Jersey: Wiley Interscience), p246-260
[27]	Fang F Z, Liu Y C 2004 J. Micromech. Microeng. 14 984
[28]	Wang C L, Tian Z, Xing Q R, Gu J Q, Liu F, Hu M L, Chai L, Wang Q Y 2010 Acta Phys. Sin. 59 7857 (in Chinese) [王昌雷, 田震, 邢岐荣, 谷建强, 刘丰, 胡明列, 柴路, 王清月 2010 59 7857]
[29]	Liu F, Hu X K, Li Y F, Xing Q R, Hu M L, Chai L, Wang Q Y 2012 Acta Phys. Sin. 61 040703 (in Chinese) [刘丰, 胡晓堃, 栗岩锋, 邢岐荣, 胡明列, 柴路, 王清月 2012 61 040703]

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